公开(公告)号：US20020127351A1

公开(公告)日：2002-09-12

申请号：US10094622

申请日：2002-03-12

Applicant: Futaba Corporation

Inventor： Hirofumi Takikawa ,  Yoshihiko Hibi ,  Shigeo Itoh

IPC: H05H001/24 ,  B05D001/32

CPC classification number: B82Y30/00 ,  B01J19/088 ,  B01J2219/082 ,  B01J2219/0839 ,  B01J2219/0869 ,  B01J2219/0875 ,  B01J2219/0879 ,  B01J2219/0892 ,  B01J2219/0894 ,  B82Y10/00 ,  B82Y40/00 ,  C01B32/152 ,  C01B32/162 ,  C01B2202/02 ,  H01J37/32055 ,  H01J2201/30469 ,  H01J2209/022 ,  H05H1/48 ,  H05H2001/483 ,  H05H2245/124 ,  Y10S977/844 ,  Y10T428/30

Abstract: There are provided a method of preparing nano-carbon comprising evaporating a material to be arced containing carbon as a main component by means of arc discharge which does not necessarily require a process container and so on, but uses an apparatus having a welding arc torch or an analogous structure to generate soot, a method of preparing an electron emitting source by supporting the soot, and an apparatus for preparing the same. A torch electrode 10 of an arc torch 1 as a first electrode is placed opposite to a material to be arced 2 using graphite as a second electrode. A voltage is applied between the torch electrode 10 and an edge portion of the material to be arced 2 to generate arc discharge, to evaporate the edge portion of the material to be arced 2 exposed to the arc discharge, to generate soot. The soot thus generated is deposited on the surface of a substrate opposite to an arc discharge-generating area through a mask having a patterned opening.

Abstract translation: 提供了一种制备纳米碳的方法，其包括通过不需要处理容器等的电弧放电蒸发含有作为主要成分的碳的待煅烧材料，但是使用具有焊接电弧焊炬或 用于产生烟灰的类似结构，通过支持烟灰制备电子发射源的方法及其制备装置。 作为第一电极的电弧焊炬1的焊炬电极10与使用石墨作为第二电极的待弧焊材料2相对放置。 在焊炬电极10和待弧形材料2的边缘部分之间施加电压以产生电弧放电，以使待暴露于电弧放电的待蚀刻材料的边缘部分蒸发，以产生烟灰。 这样生成的烟炱通过具有图案化开口的掩模沉积在与电弧放电产生区域相对的基板的表面上。

公开(公告)号：US20020061638A1

公开(公告)日：2002-05-23

申请号：US09989024

申请日：2001-11-21

Applicant: Futaba Corporation

Inventor： Hirofumi Takikawa ,  Yoshihiko Hibi

IPC: H01L021/00 ,  H01L021/84 ,  H01L021/3205 ,  H01L021/4763 ,  H01L021/44

CPC classification number: B01J19/088 ,  B01J2219/0809 ,  B01J2219/082 ,  B01J2219/0822 ,  B01J2219/083 ,  B01J2219/0839 ,  B01J2219/0886 ,  B01J2219/0892 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  H01J9/025 ,  H01J2201/30469 ,  Y10S977/742 ,  Y10S977/844

Abstract: A method and an apparatus capable of instantaneously forming a surface of an arc-treated material mainly consisting of graphite into nano-tubes due to arc discharge carried out using a unit like a welding arc torch or the like without necessarily requiring a processing container, resulting in the nano-tube being applied to an electron emission source. A torch electrode acting as a first electrode and the arc-treated material made of graphite and acting as a second electrode are arranged opposite to each other. A potential is applied between both electrodes to generate arc discharge therebetween. A mask having an opening pattern is arranged on the arc-treated material, so that only graphite positioned on portions of a surface of the arc-treated material 2 corresponding to openings of the mask are exposed to arc, to thereby be formed into nano-tubes.

Abstract translation: 一种方法和装置，其能够使用诸如焊接电弧焊炬等的单元进行的电弧放电，将由石墨主要由石墨组成的电弧处理材料的表面瞬时地形成，而不需要加工容器，从而得到 在纳米管中被施加到电子发射源。 用作第一电极的焊炬电极和由石墨制成并用作第二电极的电弧处理材料彼此相对布置。 在两个电极之间施加电位以在其间产生电弧放电。 具有开口图案的掩模布置在电弧处理材料上，使得仅位于与掩模开口相对应的电弧处理材料2的表面的部分上的石墨暴露于电弧，从而形成纳米级， 管。