Integrated circuits including magnetic random access memory structures and methods for fabricating the same

    公开(公告)号:US10411069B1

    公开(公告)日:2019-09-10

    申请号:US15898547

    申请日:2018-02-17

    Abstract: Integrated circuits and methods for fabricating integrated circuits are provided herein. The integrated circuit includes a first MTJ stack overlying a semiconductor substrate. The integrated circuit further includes a second lower MTJ stack spaced from the first lower MTJ stack and overlying the semiconductor substrate. The integrated circuit further includes a dielectric layer disposed between the first lower MTJ stack and the second lower MTJ stack. The dielectric layer is overlying the semiconductor substrate. The integrated circuit further includes a spin orbit torque coupling layer overlying the first lower MTJ stack, the dielectric layer, and the second lower MTJ stack. The integrated circuit further includes a first upper MTJ stack overlying the spin orbit torque coupling layer and the first lower MTJ stack. The integrated circuit further includes a second upper MTJ stack overlying the spin orbit torque coupling layer and the second lower MTJ stack.

    INTEGRATED CIRCUITS INCLUDING MAGNETIC RANDOM ACCESS MEMORY STRUCTURES AND METHODS FOR FABRICATING THE SAME

    公开(公告)号:US20190259808A1

    公开(公告)日:2019-08-22

    申请号:US15898547

    申请日:2018-02-17

    Abstract: Integrated circuits and methods for fabricating integrated circuits are provided herein. The integrated circuit includes a first MTJ stack overlying a semiconductor substrate. The integrated circuit further includes a second lower MTJ stack spaced from the first lower MTJ stack and overlying the semiconductor substrate. The integrated circuit further includes a dielectric layer disposed between the first lower MTJ stack and the second lower MTJ stack. The dielectric layer is overlying the semiconductor substrate. The integrated circuit further includes a spin orbit torque coupling layer overlying the first lower MTJ stack, the dielectric layer, and the second lower MTJ stack. The integrated circuit further includes a first upper MTJ stack overlying the spin orbit torque coupling layer and the first lower MTJ stack. The integrated circuit further includes a second upper MTJ stack overlying the spin orbit torque coupling layer and the second lower MTJ stack.

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