公开(公告)号：US09851397B2

公开(公告)日：2017-12-26

申请号：US14635125

申请日：2015-03-02

Applicant: GLOBALFOUNDRIES INC.

Inventor： Fen Chen ,  Cathryn J. Christiansen ,  Deborah M. Massey ,  Prakash Periasamy ,  Michael A. Shinosky

IPC: G01R31/00 ,  G01R31/28 ,  H01L21/00 ,  G01N1/00

CPC classification number: G01R31/2858 ,  G01N1/00 ,  H01L21/00 ,  H01L2221/00

Abstract: A system for electromigration testing is disclosed. The system includes a conductive member, a cap layer of insulative material over at least a portion of a top surface of the conductive member, a cathode conductively connected to a first end of the conductive member; an anode conductively connected to a second end of the conductive member, and a current source conductively connected to the cathode and the anode. A plurality of sensory pins are disposed along a length of the conductive member between the first end and the second end of the conductive member. The sensory pins are conductively connected to a bottom surface of the conductive member. At least one measurement device is conductively connected to at least one sensory pin of the plurality of sensory pins. The at least one measurement device determines a resistance of at least one portion of the conductive member.

公开(公告)号：US20160258998A1

公开(公告)日：2016-09-08

申请号：US14635125

申请日：2015-03-02

Applicant: GLOBALFOUNDRIES INC.

Inventor： Fen Chen ,  Cathryn J. Christiansen ,  Deborah M. Massey ,  Prakash Periasamy ,  Michael A. Shinosky

IPC: G01R31/28

CPC classification number: G01R31/2858 ,  G01N1/00 ,  H01L21/00 ,  H01L2221/00

Abstract: A system for electromigration testing is disclosed. The system includes a conductive member, a cap layer of insulative material over at least a portion of a top surface of the conductive member, a cathode conductively connected to a first end of the conductive member; an anode conductively connected to a second end of the conductive member, and a current source conductively connected to the cathode and the anode. A plurality of sensory pins are disposed along a length of the conductive member between the first end and the second end of the conductive member. The sensory pins are conductively connected to a bottom surface of the conductive member. At least one measurement device is conductively connected to at least one sensory pin of the plurality of sensory pins. The at least one measurement device determines a resistance of at least one portion of the conductive member.

Abstract translation: 公开了用于电迁移测试的系统。 该系统包括导电构件，在导电构件的顶表面的至少一部分上的绝缘材料的覆盖层，阴极，导电地连接到导电构件的第一端; 导电性地连接到导电构件的第二端的阳极和与阴极和阳极导通地连接的电流源。 沿着导电构件的长度在导电构件的第一端和第二端之间设置多个感应针。 传感针与导电构件的底面导电连接。 至少一个测量装置导电地连接到多个感觉针的至少一个感觉针。 所述至少一个测量装置确定所述导电构件的至少一部分的电阻。