Threshold voltage (VT)-type transistor sensitive and/or fan-out sensitive selective voltage binning

    公开(公告)号:US09653330B1

    公开(公告)日:2017-05-16

    申请号:US15015535

    申请日:2016-02-04

    CPC classification number: G01R31/31718 H01L22/14 H01L22/20 H01L22/34

    Abstract: Disclosed are methods for performing threshold voltage (VT)-type transistor sensitive and/or fan-out sensitive selective voltage binning (SVB) to improve SVB accuracy and, thereby product yield and reliability. In the methods, a process distribution for an integrated circuit chip design is divided into process windows, each associated with a corresponding performance range and a corresponding minimum supply voltage. First performance measurements are acquired from first performance monitors associated with first transistors on chips manufactured according to the design. Based on the first performance measurements, the chips are assigned to groups corresponding to the process windows. Second performance measurements are also be acquired from second performance monitors associated with second transistors, which are on the chips and which have either a different VT-type or a different maximum fan-out than the first transistors. Based on the second performance measurements, a determination is made as to whether chip group reassignment is warranted.

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