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    LASER APPARATUS
    3.
    发明申请
    LASER APPARATUS 审中-公开

    公开(公告)号：US20190173259A1

    公开(公告)日：2019-06-06

    申请号：US16266189

    申请日：2019-02-04

    申请人： Gigaphoton Inc.

    发明人： Takeshi ASAYAMA ,  Hiroyuki MASUDA

    IPC分类号： H01S3/097 ,  H01S3/038 ,  H01S3/036

    摘要： A laser apparatus includes a chamber accommodating a pair of discharge electrodes, a gas supply and exhaust device configured to supply laser gas to an interior of the chamber and exhaust laser gas from the interior of the chamber, and a controller. The controller performs first control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber at every first number of pulses or first elapsed time, and second control to control the gas supply and exhaust device so as to suspend laser oscillation and replace laser gas in the chamber before the first control at every second number of pulses less than the first number of pulses or second elapsed time less than the first elapsed time.

    LASER APPARATUS, LASER APPARATUS MANAGEMENT SYSTEM, AND LASER APPARATUS MANAGEMENT METHOD
    4.
    发明申请
    LASER APPARATUS, LASER APPARATUS MANAGEMENT SYSTEM, AND LASER APPARATUS MANAGEMENT METHOD 审中-公开

    公开(公告)号：US20200067259A1

    公开(公告)日：2020-02-27

    申请号：US16674918

    申请日：2019-11-05

    申请人： Gigaphoton Inc.

    发明人： Hiroyuki MASUDA ,  Osamu WAKABAYASHI

    IPC分类号： H01S3/13 ,  H01S3/134

    摘要： A laser apparatus according to the present disclosure includes: a laser output unit configured to perform laser oscillation; and a control unit configured to acquire first laser performance data obtained when the laser output unit performs laser oscillation based on a first laser control parameter, and second laser performance data obtained when the laser output unit performs laser oscillation based on a second laser control parameter, while laser output from the laser output unit to an external device is stopped, and determine whether the second laser performance data has been improved as compared to the first laser performance data.