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公开(公告)号：US20190252846A1
公开(公告)日：2019-08-15
申请号：US16396072
申请日：2019-04-26
Inventor： Weihua JIANG , Hiroshi UMEDA , Hakaru MIZOGUCHI , Takashi MATSUNAGA , Hiroaki TSUSHIMA , Tomoyuki OHKUBO
CPC classification number: H01S3/09702 , H01S3/036 , H01S3/038 , H01S3/041 , H01S3/08009 , H01S3/0971 , H01S3/10069 , H01S3/134 , H01S3/225
Abstract: A high-voltage pulse generator may include a number “n” (n is a natural number of not less than 2) of primary electric circuits connected in parallel to one another on the primary side of a pulse transformer, and a secondary electric circuit of the pulse transformer, which is connected to a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus. The “n” primary electric circuits may include a number “n” of primary coils connected in parallel to one another, a number “n” of capacitors respectively connected in parallel to the “n” primary coils, and a number “n” of switches respectively connected in series to the “n” capacitors. The “n” primary electric circuits may be connected to a number “n” of chargers for charging the “n” capacitors, respectively. The secondary electric circuit may include a number “n” of secondary coils connected in series to one another, and a number “n” of diodes each connected to opposite ends of each of the “n” secondary coils, to prevent a reverse current flowing from the pair of discharge electrodes toward the secondary coils.
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公开(公告)号：US20190081451A1
公开(公告)日：2019-03-14
申请号：US16185542
申请日：2018-11-09
Applicant: GIGAPHOTON INC.
Inventor： Akihiko KUROSU , Takashi MATSUNAGA , Hiroyuki MASUDA , Osamu WAKABAYASHI , Hiroaki TSUSHIMA , Masanori YASHIRO , Takeshi OHTA
IPC: H01S3/036 , H01S3/04 , H01S3/0971 , H01S3/104 , H01S3/097 , H01S3/225 , H01S3/041 , H01S3/134 , H01S3/13 , H01S3/08 , H01S3/03
Abstract: There may be provided a laser unit including a display configured to display one or both of electric power consumed by the laser unit and electric energy consumed by the laser unit.
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公开(公告)号：US20150380893A1
公开(公告)日：2015-12-31
申请号：US14852120
申请日：2015-09-11
Applicant: Gigaphoton Inc.
Inventor： Takashi MATSUNAGA , Takahito KUMAZAKI , Keisuke ISHIDA , Osamu WAKABAYASHI
CPC classification number: H01S3/137 , H01S3/104 , H01S3/1055 , H01S3/1305 , H01S3/139 , H01S3/225 , H01S3/2251 , H01S3/2256
Abstract: A laser device (100) may include: a laser resonator (20, 30) configured to output pulsed laser light (L); an actuator (35, 36, 37) configured to change wavelength of the pulsed laser light; and a controller (110) configured to receive data of target wavelength for a plurality of pulses of the pulsed laser light before the pulsed laser light is output, and to control the actuator, based on the data of the target wavelength for the plurality of pulses, such that the wavelength of the pulsed laser light approaches the data of the target wavelength.
Abstract translation: 激光装置（100）可以包括：激光谐振器（20,30），被配置为输出脉冲激光（L）; 被配置为改变脉冲激光的波长的致动器（35,36,37）; 以及控制器（110），被配置为在脉冲激光输出之前接收脉冲激光的多个脉冲的目标波长的数据，并且基于多个脉冲的目标波长的数据来控制致动器 使得脉冲激光的波长接近目标波长的数据。
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公开(公告)号：US20140105238A1
公开(公告)日：2014-04-17
申请号：US14049383
申请日：2013-10-09
Applicant: Gigaphoton Inc.
Inventor： Akihiko KUROSU , Junichi FUJIMOTO , Yosuke ISHIZUKA , Takashi MATSUNAGA , Osamu WAKABAYASHI
CPC classification number: H01S3/036 , F16C32/047 , H01S3/02 , H01S3/041 , H01S3/223 , H01S3/2232 , H01S3/2258
Abstract: A discharge-pumped gas laser device may include a laser chamber, a pair of discharge electrodes provided in the laser chamber, a fan with a magnetic bearing being provided in the laser chamber and configured to be capable of circulating a gas in the laser chamber, a housing configured to contain the laser chamber, and a magnetic bearing controller connected to the magnetic bearing electrically, being capable of controlling the magnetic bearing, and provided in the housing separately from the laser chamber.
Abstract translation: 放电泵浦气体激光装置可以包括激光室，设置在激光室中的一对放电电极，具有磁性轴承的风扇设置在激光室中并且能够使激光室中的气体循环， 被配置为容纳激光室的壳体，以及与磁性轴承电连接的磁性轴承控制器，其能够控制磁性轴承，并且与激光室分开设置在壳体中。
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公开(公告)号：US20130208744A1
公开(公告)日：2013-08-15
申请号：US13738028
申请日：2013-01-10
Applicant: Gigaphoton Inc.
Inventor： Takahito KUMAZAKI , Takashi MATSUNAGA , Kazuya TAKEZAWA
IPC: H01S3/04
CPC classification number: H01S3/04 , G02B7/008 , H01S3/0401 , H01S3/08004 , H01S3/08009 , H01S3/08036 , H01S3/106 , H01S3/225 , H01S3/2333
Abstract: An excimer laser may include a frame, a base plate on which the frame is disposed, an excimer laser configured to oscillate and output laser light by discharge-pumping within a chamber containing a laser gas, an optical element that is mounted upon the frame and that is disposed in the optical path of the outputted laser light and a heat removal mechanism connected to both the frame and the base plate.
Abstract translation: 准分子激光器可以包括框架，设置框架的基板，被配置为通过在包含激光气体的腔室内的放电泵送来振荡和输出激光的准分子激光器，安装在框架上的光学元件和 其设置在输出的激光的光路中，以及连接到框架和基板的散热机构。
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Patent Agency Ranking
公开(公告)号：US20160365696A1
公开(公告)日：2016-12-15
申请号：US15245245
申请日：2016-08-24
Applicant: Gigaphoton Inc.
Inventor： Hiroaki TSUSHIMA , Kouji KAKIZAKI , Takashi MATSUNAGA , Takeshi ASAYAMA , Hisakazu KATSUUMI , Hiroshi UMEDA , Hiroyuki IKEDA
CPC classification number: H01S3/036 , H01S3/038 , H01S3/0384 , H01S3/0407 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/09702 , H01S3/09713 , H01S3/134 , H01S3/225
Abstract: A laser chamber including a first space and a second space in communication with the first space may include: a first discharge electrode disposed in the first space; a second discharge electrode disposed in the first space to face the first discharge electrode; a fan disposed in the first space and configured to flow laser gas between the first discharge electrode and the second discharge electrode; a peaking condenser disposed in the second space; and an electrical insulating member configured to partition the first space and the second space from one another, and disposed to allow the laser gas to pass through between the first space and the second space.
Abstract translation: 包括与第一空间连通的第一空间和第二空间的激光室可以包括：设置在第一空间中的第一放电电极; 设置在所述第一空间中以面对所述第一放电电极的第二放电电极; 风扇，设置在所述第一空间中并且被配置为使所述第一放电电极和所述第二放电电极之间的激光气体流动; 设置在所述第二空间中的峰化冷凝器; 以及电绝缘构件，其被配置为将所述第一空间和所述第二空间彼此分隔开，并且被设置成允许所述激光气体在所述第一空间和所述第二空间之间通过。
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公开(公告)号：US20160248214A1
公开(公告)日：2016-08-25
申请号：US15144081
申请日：2016-05-02
Applicant: GIGAPHOTON INC.
Inventor： Akihiko KUROSU , Takashi MATSUNAGA , Hiroyuki MASUDA , Osamu WAKABAYASHI , Hiroaki TSUSHIMA , Masanori YASHIRO , Takeshi OHTA
CPC classification number: H01S3/036 , H01S3/03 , H01S3/0404 , H01S3/0407 , H01S3/041 , H01S3/08009 , H01S3/08031 , H01S3/09702 , H01S3/0971 , H01S3/104 , H01S3/1306 , H01S3/134 , H01S3/2258
Abstract: There may be provided a laser unit including a display configured to display one or both of electric power consumed by the laser unit and electric energy consumed by the laser unit.
Abstract translation: 可以提供一种激光单元，其包括被配置为显示激光单元消耗的电力中的一个或两个以及由激光单元消耗的电能的显示器。
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公开(公告)号：US20150340837A1
公开(公告)日：2015-11-26
申请号：US14818939
申请日：2015-08-05
Applicant: Gigaphoton Inc.
Inventor： Takashi MATSUNAGA , Takahito KUMAZAKI , Osamu WAKABAYASHI
CPC classification number: H01S3/08004 , H01S3/1305 , H01S3/137 , H01S3/2251 , H01S3/2256 , H01S3/2366
Abstract: There is provided a method of controlling the wavelength of a laser beam. The method includes measuring an absolute wavelength of the laser beam; calculating a difference between a reference wavelength and the absolute wavelength of the laser beam; and adjusting the reference wavelength of the laser beam based on the difference between the reference wavelength and the absolute wavelength of the laser beam, at an interval shorter than an interval for which the absolute wavelength of the laser beam is measured.
Abstract translation: 提供了一种控制激光束波长的方法。 该方法包括测量激光束的绝对波长; 计算参考波长和激光束的绝对波长之间的差; 并且以比测量激光束的绝对波长的间隔短的间隔，基于激光束的参考波长和绝对波长之间的差来调整激光束的参考波长。
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公开(公告)号：US20170338618A1
公开(公告)日：2017-11-23
申请号：US15671572
申请日：2017-08-08
Inventor： Weihua JIANG , Hiroshi UMEDA , Hakaru MIZOGUCHI , Takashi MATSUNAGA , Hiroaki TSUSHIMA , Tomoyuki OHKUBO
CPC classification number: H01S3/09702 , H01S3/036 , H01S3/038 , H01S3/041 , H01S3/08009 , H01S3/0971 , H01S3/10069 , H01S3/134 , H01S3/225
Abstract: A high-voltage pulse generator may include a number “n” (n is a natural number of not less than 2) of primary electric circuits connected in parallel to one another on the primary side of a pulse transformer, and a secondary electric circuit of the pulse transformer, which is connected to a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus. The “n” primary electric circuits may include a number “n” of primary coils connected in parallel to one another, a number “n” of capacitors respectively connected in parallel to the “n” primary coils, and a number “n” of switches respectively connected in series to the “n” capacitors. The “n” primary electric circuits may be connected to a number “n” of chargers for charging the “n” capacitors, respectively. The secondary electric circuit may include a number “n” of secondary coils connected in series to one another, and a number “n” of diodes each connected to opposite ends of each of the “n” secondary coils, to prevent a reverse current flowing from the pair of discharge electrodes toward the secondary coils.
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公开(公告)号：US20150055672A1
公开(公告)日：2015-02-26
申请号：US14531876
申请日：2014-11-03
Applicant: Gigaphoton Inc.
Inventor： Akihiko KUROSU , Junichi FUJIMOTO , Yosuke ISHIZUKA , Takashi MATSUNAGA , Osamu WAKABAYASHI
CPC classification number: H01S3/036 , F16C32/047 , H01S3/02 , H01S3/041 , H01S3/223 , H01S3/2232 , H01S3/2258
Abstract: A discharge-pumped gas laser device may include a laser chamber, a pair of discharge electrodes provided in the laser chamber, a fan with a magnetic bearing being provided in the laser chamber and configured to be capable of circulating a gas in the laser chamber, a housing configured to contain the laser chamber, and a magnetic bearing controller connected to the magnetic bearing electrically, being capable of controlling the magnetic bearing, and provided in the housing separately from the laser chamber.
Abstract translation: 放电泵浦气体激光装置可以包括激光室，设置在激光室中的一对放电电极，具有磁性轴承的风扇设置在激光室中并且能够使激光室中的气体循环， 被配置为容纳激光室的壳体，以及与磁性轴承电连接的磁性轴承控制器，其能够控制磁性轴承，并且与激光室分开设置在壳体中。
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