公开(公告)号：US20230387641A1

公开(公告)日：2023-11-30

申请号：US18447514

申请日：2023-08-10

Applicant: Gigaphoton Inc.

Inventor： Junichi FUJIMOTO ,  Takahiro TATSUMI ,  Kazuki NAGAI ,  Jeffrey P. SERCEL

IPC: H01S3/03 ,  H01S3/041 ,  H01S3/04 ,  G03F7/00

CPC classification number: H01S3/03 ,  H01S3/041 ,  H01S3/0405 ,  H01S3/0407 ,  G03F7/70025 ,  G03F7/70891

Abstract: A chamber device includes an inner housing including a passage port through which light generated by excitation of laser gas at an internal space thereof passes, an outer housing surrounding at least a part of the inner housing from a lateral side of a travel direction of the light, and a partition wall arranged between the inner housing and the outer housing and fixed to the inner housing and the outer housing.

公开(公告)号：US20250096515A1

公开(公告)日：2025-03-20

申请号：US18968755

申请日：2024-12-04

Applicant: Gigaphoton Inc.

Inventor： Kazuki NAGAI ,  Yoichi SASAKI ,  Jeffrey P. SERCEL ,  Michael von DADELSZEN

IPC: H01S3/038 ,  H01S3/034 ,  H01S3/225

Abstract: A chamber for a gas laser device includes first and second main electrodes arranged with a longitudinal direction being along a predetermined direction as being spaced apart from and facing each other in the internal space, a window arranged at a wall surface of the chamber, and a first preionization electrode arranged beside one side of the first main electrode. The first preionization electrode includes a first dielectric pipe extending along the longitudinal direction, a first preionization inner electrode arranged in the first dielectric pipe and extending along the longitudinal direction, and a first preionization outer electrode extending along the longitudinal direction, including a first end portion facing an outer circumference surface of the first dielectric pipe, and extending from the first end portion in a direction away from the first dielectric pipe. In a plane perpendicular to the longitudinal direction, a first corona discharge angle is an acute angle.

公开(公告)号：US20230268710A1

公开(公告)日：2023-08-24

申请号：US18310089

申请日：2023-05-01

Applicant: Gigaphoton Inc.

Inventor： Youichi YAMANOUCHI ,  Hiroshi UMEDA ,  Kazuki NAGAI ,  Takeshi UEYAMA

IPC: H01S3/0977 ,  H01S3/097

CPC classification number: H01S3/0977 ,  H01S3/09702

Abstract: A gas laser apparatus according to an aspect of the present disclosure includes a main discharge circuit that supplies main discharge voltage that causes main discharge to a pair of main discharge electrodes, and a pre-ionization circuit that supplies pre-ionization voltage that causes corona discharge to a pre-ionization electrode. The main discharge circuit includes a step-up pulse transformer, a main capacitor and a switch connected to a primary side of the step-up pulse transformer, a first power source that charges the main capacitor, a first capacitor connected in parallel to a secondary side of the step-up pulse transformer, a first magnetic switch connected to the first capacitor, and a peaking capacitor connected in parallel to the first capacitor through the first magnetic switch and to the main discharge electrodes. An interval between start timings of the corona discharge and the main discharge is 30 ns to 60 ns inclusive.