LASER DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

    公开(公告)号:US20190239330A1

    公开(公告)日:2019-08-01

    申请号:US16379511

    申请日:2019-04-09

    Inventor: Motoki NIWANO

    Abstract: A laser device includes: a master oscillator (100) configured to output a pulse laser beam (L) based on a light emission trigger signal (S21); a delay circuit (153) configured to generate a switching signal (S10) after a predetermined delay time has elapsed since reception of the light emission trigger signal (S21); a high voltage switch (304) configured to generate a high voltage pulse based on the switching signal (S10); an optical shutter (32k) positioned on the optical path of the pulse laser beam (L) and driven based on the high voltage pulse; and a high voltage monitor (151) configured to detect the high voltage pulse and transmit a high voltage pulse sensing signal (S6) to the delay circuit (153). The delay circuit (153) determines the delay time based on the light emission trigger signal (S21) and the high voltage pulse sensing signal (S6).

    LINE NARROWING LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20240413600A1

    公开(公告)日:2024-12-12

    申请号:US18807533

    申请日:2024-08-16

    Abstract: A line narrowing laser device includes an optical element and a diffractive optical element positioned on an optical path of an optical resonator, a wavelength actuator configured to change an incident angle of light incident on the diffractive optical element by moving the optical element, a wavelength driver configured to drive the wavelength actuator, a processor configured to output a wavelength control signal to the wavelength driver so that a wavelength of pulse laser light output from the optical resonator periodically changes, and a notch filter arranged in a path of the wavelength control signal and configured to operate at a notch frequency different from a drive frequency of the wavelength actuator.

    LASER DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

    公开(公告)号:US20190235287A1

    公开(公告)日:2019-08-01

    申请号:US16377412

    申请日:2019-04-08

    Inventor: Motoki NIWANO

    Abstract: A laser device includes: a plurality of optical shutters (61, 62); a power source device (303n) configured to generate high voltage to be applied to the optical shutters (61, 62); a high-voltage side wire (63h) connecting the power source device (303n) and each of the optical shutters (61, 62); a ground-side wire (63g) grounding each of the optical shutters (61, 62); and a high-voltage side shared wire (64h) and a ground-side shared wire (64g) connecting the optical shutters (61, 62) in parallel. One of the high-voltage side wire (63h) and the ground-side wire (63g) is connected with the optical shutter (61) disposed on the most upstream side in the traveling direction of the laser beam, and the other of the high-voltage side wire (63h) and the ground-side wire (63g) is connected with the optical shutter (62) disposed on the most downstream side in the traveling direction of the laser beam.

    LASER SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND METHOD OF CONTROLLING LASER APPARATUS
    4.
    发明申请
    LASER SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND METHOD OF CONTROLLING LASER APPARATUS 审中-公开
    激光系统,极光紫外线发光系统及控制激光装置的方法

    公开(公告)号:US20160087389A1

    公开(公告)日:2016-03-24

    申请号:US14960579

    申请日:2015-12-07

    Abstract: A laser system capable of appropriately controlling the energy of a laser beam pulse is provided. An exemplary laser system of the present disclosure may control an optical isolator to switch from a closed state to an open state and then to return to the closed state for each of the laser beam pulses repeatedly outputted from a master oscillator. The laser system may control the optical attenuator to set an optical transmittance of the optical attenuator for each of the laser beam pulses repeatedly outputted from the master oscillator.

    Abstract translation: 提供能够适当地控制激光束脉冲的能量的激光系统。 本公开的示例性激光系统可以控制光隔离器从关闭状态切换到打开状态,然后对于从主振荡器重复输出的每个激光束脉冲返回关闭状态。 激光系统可以控制光衰减器以对从主振荡器重复输出的每个激光束脉冲设置光衰减器的光透射率。

Patent Agency Ranking