THERMO-OPTIC PHASE SHIFTERS
    1.
    发明公开

    公开(公告)号:US20240103217A1

    公开(公告)日:2024-03-28

    申请号:US17953804

    申请日:2022-09-27

    CPC classification number: G02B6/122 G02B2006/12142

    Abstract: Structures for a thermo-optic phase shifter and methods of forming such structures. The structure comprises a waveguide structure including a waveguide core. The structure further comprises a silicide layer, a first dielectric layer arranged in a lateral direction between the silicide layer and the waveguide core, and a second dielectric layer positioned over the waveguide core, the silicide layer, and the first dielectric layer. The first dielectric layer comprises a first material having a first thermal conductivity, and the second dielectric layer comprises a second material having a second thermal conductivity that is less than the first thermal conductivity.

    Thermo-optic phase shifters
    3.
    发明授权

    公开(公告)号:US12147074B2

    公开(公告)日:2024-11-19

    申请号:US17953804

    申请日:2022-09-27

    Abstract: Structures for a thermo-optic phase shifter and methods of forming such structures. The structure comprises a waveguide structure including a waveguide core. The structure further comprises a silicide layer, a first dielectric layer arranged in a lateral direction between the silicide layer and the waveguide core, and a second dielectric layer positioned over the waveguide core, the silicide layer, and the first dielectric layer. The first dielectric layer comprises a first material having a first thermal conductivity, and the second dielectric layer comprises a second material having a second thermal conductivity that is less than the first thermal conductivity.

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