Apparatus for ejecting relatively thin IC chip from semiconductor wafer
    1.
    发明申请
    Apparatus for ejecting relatively thin IC chip from semiconductor wafer 审中-公开
    用于从半导体晶片排出相对薄的IC芯片的装置

    公开(公告)号:US20060003491A1

    公开(公告)日:2006-01-05

    申请号:US11153750

    申请日:2005-06-14

    IPC分类号: H01L21/44

    CPC分类号: H01L21/67132

    摘要: An apparatus and method for ejecting a thin IC chip from a UV-sensitive tape attached to a bottom face of a semiconductor wafer, includes a vacuum holder that partly supports the UV-sensitive tape by applying vacuum force. The apparatus further includes an ejecting block inserted in the vacuum holder and configured to move vertically relative to the vacuum holder, and a plurality of ejecting pins inserted in the ejecting block and configured to move vertically and elastically. The ejecting pins move upward from the ejecting block driven by a pin-driving plate, detaching the IC chip from the UV-sensitive tape. Then the ejecting block moves upward from the vacuum holder driven by a block-driving shaft, applying a pressure to the bottom face of the IC chip.

    摘要翻译: 从安装在半导体晶片底面的紫外线敏感胶带排出薄IC芯片的装置和方法包括通过施加真空力部分地支撑UV敏感胶带的真空支架。 所述装置还包括插入所述真空保持器中并被配置为相对于所述真空保持件垂直移动的排出块,以及插入所述排出块中并被构造成垂直和弹性移动的多个排出销。 排出销从由销驱动板驱动的排出块向上移动,将IC芯片从紫外线敏感胶带分离。 然后,排出块从由块驱动轴驱动的真空保持器向上移动,向IC芯片的底面施加压力。