Photosensitive resin composition and dry film resist using the same
    3.
    发明申请
    Photosensitive resin composition and dry film resist using the same 审中-公开
    感光树脂组合物和使用其的干膜抗蚀剂

    公开(公告)号:US20070060729A1

    公开(公告)日:2007-03-15

    申请号:US10555706

    申请日:2004-05-06

    IPC分类号: C08F30/02

    摘要: The present invention relates to an alkali-soluble photosensitive resin composition and a dry film resist using the same, more particularly to a photosensitive resin composition having superior heat resistance, chemical resistance and long-time stability and good adhesivity to a Cu or ITO (indium tin oxide) substrate by containing an acrylate resin, which is effective in improving adhesivity, and a photosensitive dry film resist using the same.

    摘要翻译: 本发明涉及一种碱溶性感光性树脂组合物和使用其的干膜抗蚀剂,更具体地说,涉及具有优异的耐热性,耐化学性和长时间稳定性以及对Cu或ITO(铟)的良好粘附性的感光性树脂组合物 氧化锡)基材,以及使用其的感光性干膜抗蚀剂。

    Photosensitive resin composition controlling solubility and pattern formation method of double-layer structure using the same
    5.
    发明授权
    Photosensitive resin composition controlling solubility and pattern formation method of double-layer structure using the same 有权
    控制溶解度的光敏树脂组合物和使用其的双层结构的图案形成方法

    公开(公告)号:US07611826B2

    公开(公告)日:2009-11-03

    申请号:US12351398

    申请日:2009-01-09

    IPC分类号: G03F7/00 G03F7/004

    摘要: The present invention relates to a new photosensitive resin composition capable of solubility control and a pattern formation method of a double-layer structure using the same, and more particularly to a photosensitive resin composition that can control the -value using a new photopolymerization initiator and lower layer hardener and that can control a film thickness according to the exposure energy without pattern breakup, even with low exposure energy. This photosensitive resin composition is useful for color filters and overcoating materials of LCD (liquid crystal display) manufacturing processes.

    摘要翻译: 本发明涉及一种能够进行溶解度控制的新的感光性树脂组合物和使用该感光性树脂组合物的双层结构的图案形成方法,更具体地说,涉及可以控制 - 使用 新的光聚合引发剂和下层硬化剂,并且即使在低曝光能量下也可以根据曝光能量控制膜厚而无图案破裂。 该感光性树脂组合物可用于LCD(液晶显示)制造工艺的滤色器和外涂层材料。

    Photosensitive resin composition, method for preparing the same, and dry film resist comprising the same
    9.
    发明申请
    Photosensitive resin composition, method for preparing the same, and dry film resist comprising the same 审中-公开
    感光树脂组合物,其制备方法和含有该组合物的干膜抗蚀剂

    公开(公告)号:US20060141392A1

    公开(公告)日:2006-06-29

    申请号:US11292411

    申请日:2005-11-30

    IPC分类号: G03C1/76

    摘要: The present invention relates to a photosensitive resin composition, a preparation method thereof, and a dry film resist comprising the same. More particularly, the photosensitive resin composition of the present invention is directed to a photosensitive resin composition including a) an alkali-soluble acrylate resin, b) a cross-linking monomer having at least two ethylenic double bonds, and c) a phosphine oxide based photopolymerization initiator and an acridon based photopolymerization initiator. According to the photosensitive resin composition and the dry film resist, it is easy to finely pattern using a laser direct image with high density and the dry film has excellent sensitivity, resolution, and adhesiveness to the substrate.

    摘要翻译: 本发明涉及感光性树脂组合物及其制备方法以及含有该感光性树脂组合物的干膜抗蚀剂。 更具体地,本发明的感光性树脂组合物涉及感光性树脂组合物,其包含a)碱溶性丙烯酸酯树脂,b)具有至少2个烯键式双键的交联单体,和c)基于氧化膦的 光聚合引发剂和吖啶类光聚合引发剂。 根据感光性树脂组合物和干膜抗蚀剂,可以容易地使用高密度的激光直接图像进行精细图案化,并且干膜对基材具有优异的灵敏度,分辨率和粘附性。