公开(公告)号：US20210193445A1

公开(公告)日：2021-06-24

申请号：US17252473

申请日：2019-06-14

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masahiro HAYASHI

IPC: H01J43/24 ,  H01J43/28

Abstract: The MCP assembly of this embodiment is formed at least of a conductive upper support member, an MCP unit, an output electrode, a flexible sheet electrode, and a conductive lower support member as a structure for improving handleability of a flexible sheet electrode having a mesh area. The flexible sheet electrode includes the mesh area provided with plural openings. The flexible sheet electrode and the lower support member are physically and electrically connected to each other, and the flexible sheet electrode is sandwiched between the upper support member and the lower support member. As a result, even if the flexible sheet electrode becomes thin as an opening ratio of the mesh area increases, potential is set while the flexible sheet electrode is firmly held in the MCP assembly.

公开(公告)号：US20230238227A1

公开(公告)日：2023-07-27

申请号：US18076500

申请日：2022-12-07

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masahiro HAYASHI

IPC: H01J43/22 ,  G01N23/2273 ,  H01J43/12

CPC classification number: H01J43/22 ,  G01N23/2273 ,  H01J43/12 ,  G01N2223/07 ,  G01N2223/507

Abstract: A charged particle detector includes a microchannel plate having an input surface having electrons (charged particles) input thereon, a multiplication portion performing multiplication of electrons while maintaining positional information of the electrons, and an output surface outputting electrons multiplied by the multiplication portion; a multi-dynode having a plurality of dynodes multiplying the electrons output from the output surface, and insulation regions positioned between the dynodes; and an anode disposed in a spatial region between the output surface and the multi-dynode, and having collection portions for collecting electrons multiplied by the dynodes and aperture portions for allowing electrons output from the output surface to pass therethrough to the dynodes side. All of the insulation regions overlap the collection portions when viewed in an output direction of the electrons from the output surface.

公开(公告)号：US20170047213A1

公开(公告)日：2017-02-16

申请号：US15232066

申请日：2016-08-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masahiro HAYASHI

IPC: H01J49/02 ,  H01J49/26

CPC classification number: H01J49/025 ,  H01J43/246

Abstract: The present embodiment relates to a charged-particle detector, etc. provided with a structure for effectively suppressing ion feedbacks under a low-vacuum environment. In order to capture the residual-gas ions, which are generated by collisions between the electrons output from a MCP unit 200 and residual-gas molecules, by a second electrode 400, which is electrically insulated from a first electrode 300, which is mainly for capturing electrons, the potential of the first electrode 300 is set to be higher than an output-side potential of the MCP unit 200, and, on the other hand, the potential of the second electrode 400 is set to be lower than the output-side potential of the MCP unit 200. As a result, the ion feedbacks to the MCP unit 200 are effectively suppressed.

Abstract translation: 本实施例涉及具有用于在低真空环境下有效抑制离子反馈的结构的带电粒子检测器等。 为了通过与第一电极300电绝缘的第二电极400捕获由MCP单元200输出的电子与残留气体分子之间的碰撞产生的残留气体离子，其主要用于 捕获电子时，将第一电极300的电位设定为高于MCP单元200的输出侧电位，另一方面，将第二电极400的电位设定为低于输出侧电位， MCP单元200的侧电位。结果，有效地抑制了对MCP单元200的离子反馈。

公开(公告)号：US20160217995A1

公开(公告)日：2016-07-28

申请号：US15001709

申请日：2016-01-20

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masahiro HAYASHI

IPC: H01J49/40 ,  H01J49/02

CPC classification number: H01J49/025 ,  H01J43/20 ,  H01J43/246 ,  H01J49/40

Abstract: An embodiment of the invention relates to a TOF-MS capable of performing mass spectrometry of a sample at a high throughput. The TOF-MS has an acceleration part for accelerating an ion, a detector for detecting an event of arrival of the accelerated ion, and a data processing part for performing mass spectrometry of the sample, based on a time of flight of the ion. A first structure of the detector includes an MCP, a dynode, and an anode. In the first structure, the dynode is set at a potential higher than that of an output face of the MCP. The anode is disposed at an intermediate position between the MCP and the dynode or on the dynode side with respect to the intermediate position. The anode has plural apertures and is set at a potential higher than that of the dynode.

Abstract translation: 本发明的实施方案涉及能够以高产量进行样品的质谱分析的TOF-MS。 TOF-MS具有用于加速离子的加速部分，用于检测加速离子的到达事件的检测器，以及用于基于离子的飞行时间进行样品的质谱分析的数据处理部。 检测器的第一结构包括MCP，倍增电极和阳极。 在第一结构中，倍增电极被设置为高于MCP的输出面的电位。 阳极设置在MCP和倍增电极之间的中间位置处，或者相对于中间位置设置在倍增极侧。 阳极具有多个孔，并且被设置为高于倍增极的电位。

公开(公告)号：US20160217972A1

公开(公告)日：2016-07-28

申请号：US15000305

申请日：2016-01-19

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masahiro HAYASHI

IPC: H01J37/28 ,  H01J37/06 ,  H01J37/04

CPC classification number: H01J37/28 ,  H01J37/04 ,  H01J37/06 ,  H01J37/244 ,  H01J2237/2444 ,  H01J2237/2806

Abstract: An embodiment of the invention relates to a SEM enabling a surface analysis of a sample at a high throughput. The SEM has an electron gun, an irradiation unit, and a detector. The detector, as a first structure, includes an MCP, an anode, and a dynode. The dynode is set at a potential higher than a potential of an output face of the MCP and the anode is set at a potential higher than that of the dynode. The anode is disposed on the dynode side with respect to an intermediate position between the output face of the MCP and the dynode. The anode has an aperture for letting electrons from the output face of the MCP pass toward the dynode.

Abstract translation: 本发明的一个实施方案涉及能够以高产量进行样品的表面分析的SEM。 SEM具有电子枪，照射单元和检测器。 作为第一结构的检测器包括MCP，阳极和倍增极。 倍增电极被设置为高于MCP的输出面的电位的电位，并且阳极被设置为高于倍增极的电位。 阳极相对于MCP的输出面和倍增极之间的中间位置设置在倍增极侧。 阳极具有用于使来自MCP的输出面的电子朝向倍增极的孔径。

公开(公告)号：US20210272786A1

公开(公告)日：2021-09-02

申请号：US17253897

申请日：2019-06-14

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masahiro HAYASHI

IPC: H01J43/24 ,  H01J49/02

Abstract: An MCP assembly of this embodiment is provided with an MCP unit and a flexible sheet electrode having a structure for facilitating handling thereof as a single body. The flexible sheet electrode is constituted by a mesh area provided with plural openings and a deformation suppressing portion surrounding the mesh area. Both the mesh area and the deformation suppressing portion are comprised of the same conductive material, and physical strength of the deformation suppressing portion is higher than that of the mesh area. With this configuration, the physical strength of an entire flexible sheet electrode is secured even if an opening ratio of the mesh area is increased, so that the handling of the flexible sheet electrode as a single body is facilitated.