Ion detector
    1.
    发明授权

    公开(公告)号:US12112932B2

    公开(公告)日:2024-10-08

    申请号:US17743563

    申请日:2022-05-13

    IPC分类号: H01J43/30 H01J43/12

    CPC分类号: H01J43/30 H01J43/12

    摘要: An ion detector includes: a first electron multiplier for detecting first ions having a first polarity; a second electron multiplier for detecting second ions having a second polarity different from the first polarity; a first anode for capturing electrons emitted from the first electron multiplier; a second anode for capturing electrons emitted from the second electron multiplier; and a switching circuit including a first input terminal electrically connected to the first anode, a second input terminal electrically connected to the second anode, and an output terminal, the switching circuit selectively connecting one of the first input terminal and the second input terminal to the output terminal.

    SYSTEM AND METHOD FOR PHOTOMULTIPLIER TUBE IMAGE CORRECTION

    公开(公告)号:US20210104388A1

    公开(公告)日:2021-04-08

    申请号:US17031327

    申请日:2020-09-24

    申请人: KLA Corporation

    发明人: Derek Mackay

    摘要: A photomultiplier tube (PMT) detector assembly includes a PMT and an analog PMT detector circuit. The PMT includes a photocathode configured to emit an initial set of photoelectrons in response to an absorption of photons. The PMT includes a dynode chain with a plurality of dynodes. The dynode chain is configured to receive the initial set of photoelectrons, generate at least one amplified set of photoelectrons, and direct the at least one amplified set of photoelectrons. The PMT includes an anode configured to receive the at least one amplified set of photoelectrons, with a digitized image being generated based on a measurement of the final amplified set of photoelectrons. The digitized image is corrected by applying an output of the signal measured by the analog PMT detector circuit to the digitized image.

    DIGITAL ELECTRON AMPLIFIER WITH ANODE READOUT DEVICES AND METHODS OF FABRICATION
    3.
    发明申请
    DIGITAL ELECTRON AMPLIFIER WITH ANODE READOUT DEVICES AND METHODS OF FABRICATION 审中-公开
    具有阳极读出装置的数字电子放大器和制造方法

    公开(公告)号:US20160314947A1

    公开(公告)日:2016-10-27

    申请号:US14694935

    申请日:2015-04-23

    IPC分类号: H01J43/12 H01J43/28

    CPC分类号: H01J43/246

    摘要: Scalable electron amplifier devices and methods of fabricating the devices an atomic layer deposition (“ALD”) fabrication process are described. The ALD fabrication process allows for large area (e.g., eight inches by eight inches) electron amplifier devices to be produced at reduced costs compared to current fabrication processes. The ALD fabrication process allows for nanostructure functional coatings, to impart a desired electrical conductivity and electron emissivity onto low cost borosilicate glass micro-capillary arrays to form the electron amplifier devices.

    摘要翻译: 描述了可扩展电子放大器装置和制造器件的原子层沉积(“ALD”)制造工艺的方法。 与目前的制造工艺相比,ALD制造工艺允许以更低的成本制造大面积(例如8英寸×8英寸)的电子放大器装置。 ALD制造工艺允许纳米结构功能涂层在低成本硼硅玻璃微毛细管阵列上赋予期望的电导率和电子发射率以形成电子放大器装置。

    Electron discharge device having a thermionic electron control plate
    5.
    发明授权
    Electron discharge device having a thermionic electron control plate 失效
    具有热离子电子控制板的电子放电装置

    公开(公告)号:US4588922A

    公开(公告)日:1986-05-13

    申请号:US590792

    申请日:1984-03-19

    CPC分类号: H01J43/04

    摘要: An improved electron discharge device comprises an evacuated envelope having therein a photoemissive cathode for providing photoelectrons in response to radiation incident thereon, an electron multiplier, including a primary dynode spaced from the cathode, and a focusing assembly disposed between the cathode and the multiplier. A thermionic electron control plate is disposed between the focusing assembly and the multiplier to prevent thermionic electrons from the focusing assembly from impinging on the primary dynode, while permitting the passage of photoelectrons to the primary dynode. The control plate overlies the primary dynode and is contiguous therewith.

    摘要翻译: 一种改进的电子放电装置包括一个抽真空的外壳,其中具有用于响应于入射到其上的辐射而提供光电子的光发射阴极,包括与阴极隔开的主要倍增极的电子倍增器以及设置在阴极和乘法器之间的聚焦组件。 热离子电子控制板设置在聚焦组件和乘法器之间,以防止来自聚焦组件的热离子电子撞击在主倍增极上,同时允许光电子通过主要倍增极。 控制板覆盖在主要倍增极上并与其相邻。

    Electron multipliers having improved gain stability

    公开(公告)号:US11948785B2

    公开(公告)日:2024-04-02

    申请号:US18041462

    申请日:2021-08-10

    IPC分类号: H01J43/22 H01J43/12 H01J43/24

    CPC分类号: H01J43/22 H01J43/12 H01J43/24

    摘要: The present invention relates to electron multiplier apparatus of the type used in ion detectors. In one form, the invention is an electron multiplier having two or more electron emissive surfaces, each having a different composition so as to together limit or overcome an acute gain effect on the electron multiplier due to the exposure of the two or more electron emissive surfaces to water molecules. Alternatively, the multiplier may have a single electron emissive surface of mixed composition comprising a first composition component and a second composition component so as to together limit or overcome an acute gain effect on the electron multiplier due to the exposure of the electron emissive surface to water molecules.

    CHARGED PARTICLE DETECTOR
    9.
    发明公开

    公开(公告)号:US20230238227A1

    公开(公告)日:2023-07-27

    申请号:US18076500

    申请日:2022-12-07

    发明人: Masahiro HAYASHI

    摘要: A charged particle detector includes a microchannel plate having an input surface having electrons (charged particles) input thereon, a multiplication portion performing multiplication of electrons while maintaining positional information of the electrons, and an output surface outputting electrons multiplied by the multiplication portion; a multi-dynode having a plurality of dynodes multiplying the electrons output from the output surface, and insulation regions positioned between the dynodes; and an anode disposed in a spatial region between the output surface and the multi-dynode, and having collection portions for collecting electrons multiplied by the dynodes and aperture portions for allowing electrons output from the output surface to pass therethrough to the dynodes side. All of the insulation regions overlap the collection portions when viewed in an output direction of the electrons from the output surface.

    ION DETECTOR
    10.
    发明申请

    公开(公告)号:US20230005726A1

    公开(公告)日:2023-01-05

    申请号:US17743563

    申请日:2022-05-13

    IPC分类号: H01J43/30 H01J43/12

    摘要: An ion detector includes: a first electron multiplier for detecting first ions having a first polarity; a second electron multiplier for detecting second ions having a second polarity different from the first polarity; a first anode for capturing electrons emitted from the first electron multiplier; a second anode for capturing electrons emitted from the second electron multiplier; and a switching circuit including a first input terminal electrically connected to the first anode, a second input terminal electrically connected to the second anode, and an output terminal, the switching circuit selectively connecting one of the first input terminal and the second input terminal to the output terminal.