公开(公告)号：US10309836B2

公开(公告)日：2019-06-04

申请号：US15331036

申请日：2016-10-21

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Junji Okuma ,  Yasunori Igasaki ,  Yasunaga Nara

IPC: G01B9/02 ,  G01J9/02

Abstract: A collimation evaluation device includes a first reflection member, a second reflection member, a screen, and a housing. A first reflection surface of the first reflection member and a first reflection surface of the second reflection member face each other and are parallel to each other. Further, interference fringes are formed on the screen by light L12 reflected on the first reflection surface of the first reflection member and a second reflection surface of the second reflection member and light L21 reflected on a second reflection surface of the first reflection member and the first reflection surface of the second reflection member, and collimation of incident light is evaluated on the basis of a direction of the interference fringes.

公开(公告)号：US12030136B2

公开(公告)日：2024-07-09

申请号：US16964268

申请日：2019-01-23

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Yasunaga Nara

IPC: B23K26/53 ,  B23K26/06 ,  B23K26/0622 ,  B23K26/064 ,  B23K26/067 ,  B23K26/08 ,  B23K103/00 ,  G02B27/14 ,  G02B27/28 ,  H01L21/67 ,  H10N30/088

CPC classification number: B23K26/53 ,  B23K26/0608 ,  B23K26/0622 ,  B23K26/064 ,  B23K26/0676 ,  H01L21/67092 ,  H01L21/67115 ,  H10N30/088 ,  B23K26/0626 ,  B23K26/083 ,  B23K2103/56 ,  G02B27/141 ,  G02B27/283

Abstract: A processing device forms, in an object to be processed, a modified spot constituting a modified region. The processing device includes a first irradiation unit configured to irradiate the object with first light to temporarily increase absorptivity in a partial region of the object as compared with the absorptivity before irradiation of the first light, and a second irradiation unit configured to irradiate the partial region with second light in an absorptivity increase period in which the absorptivity of the partial region is temporarily increased.