Integration techniques for micromachined pMUT arrays and electronics using thermocompression bonding, eutectic bonding, and solder bonding

    公开(公告)号:US12172189B2

    公开(公告)日:2024-12-24

    申请号:US17119737

    申请日:2020-12-11

    Abstract: The present disclosure provides methods to integrate piezoelectric micromachined ultrasonic transducer (pMUT) arrays with an application-specific integrated circuit (ASIC) using thermocompression or eutectic/solder bonding. In an aspect, the present disclosure provides a device comprising a first substrate and a second substrate, the first substrate comprising a pMUT array and the second substrate comprising an electrical circuit, wherein the first substrate and the second substrate are bonded together using thermocompression, wherein any set of individual PMUTs of PMUT array is addressable. In another aspect, the present disclosure provides a device comprising a first substrate and a second substrate, the first substrate comprising a pMUT array and the second substrate comprising an electrical circuit, wherein the first substrate and the second substrate are bonded together using eutectic or solder bonding, wherein any set of individual PMUTs of the PMUT array is addressable.

    Ultrasonic probe and manufacturing method thereof

    公开(公告)号:US11759171B2

    公开(公告)日:2023-09-19

    申请号:US17386171

    申请日:2021-07-27

    CPC classification number: A61B8/4444 A61B8/4494 B06B1/0622 H10N30/088

    Abstract: An ultrasonic probe of an embodiment includes a vibrator, an acoustic matching layer, and a back layer. The vibrator includes a plurality of vibrating elements arranged in a first direction. The acoustic matching layer is formed on a living body side of the vibrator. The back layer is formed on a back side of the vibrator opposite the living body side. The plurality of vibrating elements are formed by being divided by first grooves passing through the vibrator and the back layer. Second grooves passing through the vibrating elements and penetrating into the back layer are provided in each of the vibrating elements. A penetration depth of the second grooves in a second direction in the back layer is less than a width of the second grooves in the first direction in the vibrating elements.

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