公开(公告)号：US20190292046A1

公开(公告)日：2019-09-26

申请号：US16182659

申请日：2018-11-07

Applicant: HITACHI, LTD.

Inventor： Toshiyuki MINE ,  Keiji WATANABE ,  Koji FUJISAKI ,  Masaharu KINOSHITA ,  Masatoshi MORISHITA ,  Daisuke RYUZAKI

IPC: B81C99/00 ,  G01R31/02 ,  G01R31/28 ,  H01J37/30 ,  H01J37/305 ,  H01J37/304

Abstract: A redeposited material is removed so as to electrically observe a microelement without causing foreign matters or metal contamination. An FIB device (charged particle beam device) includes an FIB barrel which discharges the focused ion beam (charged particle beam), a stage which holds a sample (substrate), a microcurrent measuring device (current measuring unit) which measures a leakage current from the sample, and a timer (time measuring unit) which measures a time to emit the focused ion beam and a time to measure the leakage current. Further, the FIB device includes a system control unit (control unit) which synchronizes a time to emit the focused ion beam and a time to measure the leakage current by the microcurrent measuring device.

公开(公告)号：US20210227348A1

公开(公告)日：2021-07-22

申请号：US17117807

申请日：2020-12-10

Applicant: Hitachi, Ltd.

Inventor： Tsukasa FUJIMORI ,  Masatoshi MORISHITA

IPC: H04W4/021 ,  B61L25/02

Abstract: Provided is a sensing system in which optimal measurement by a wireless sensor node is maintained even when a surrounding environment of the wireless sensor node changes with a movement of a train. The sensing system includes one or a plurality of wireless sensor nodes and a sensing control device. Each of the wireless sensor nodes performs measurement based on a parameter value group that is one or a plurality of parameter values affecting the measurement and is installed on the train. The sensing control device determines a position of the train, determines, for at least one wireless sensor node, a parameter value group of the wireless sensor node corresponding to the specified position of the train, and performs control to set the determined parameter value group in the wireless sensor node.

公开(公告)号：US20180261423A1

公开(公告)日：2018-09-13

申请号：US15909601

申请日：2018-03-01

Applicant: Hitachi, Ltd.

Inventor： Keiji WATANABE ,  Toshiyuki MINE ,  Hiroyasu SHICHI ,  Masatoshi MORISHITA

IPC: H01J37/147 ,  H01J37/304 ,  H01J37/30 ,  H01J37/15

CPC classification number: H01J37/1471 ,  H01J37/15 ,  H01J37/3007 ,  H01J37/3045 ,  H01J37/3056 ,  H01J37/3171 ,  H01J2237/20285 ,  H01J2237/30455 ,  H01J2237/30472 ,  H01J2237/31735 ,  H01J2237/31749

Abstract: The present invention is directed to a technique for correcting processing positional deviation and processing size deviation during processing by a focused ion beam device. A focused ion beam device control method includes forming a first processed figure on the surface of a specimen through the application of a focused ion beam in a first processing range of vision; determining the position of a next, second processing range of vision based on the outer dimension of the first processed figure; and moving a stage to the position of the second processing range of vision thus determined. Further, the control method includes forming a second processed figure through the application of the focused ion beam in a second processing range of vision.

公开(公告)号：US20200037272A1

公开(公告)日：2020-01-30

申请号：US16523552

申请日：2019-07-26

Applicant: Hitachi, Ltd.

Inventor： Tsukasa FUJIMORI ,  Masatoshi MORISHITA ,  Yasuyuki OKUMA

IPC: H04W52/44 ,  H04W4/38 ,  H04L9/32 ,  H04L9/08

Abstract: According to one embodiment, a sensor system includes a sensor node that collects data; and a data collection apparatus that is wirelessly connected to the sensor node. The sensor node encrypts the sensor data measured by the sensor device using the received encryption key according to the received measurement parameter and transmits the encrypted sensor data to the data collection apparatus. The data collection apparatus decrypts the sensor data received from the sensor node, stores the decrypted sensor data in a storage unit when the sensor data is normally decrypted, and discards non-decrypted sensor data and transmits the measurement parameter and the encryption key to the sensor node when the sensor data is not normally decrypted.