Adhering Substance Collecting Device and Inspection System

    公开(公告)号:US20200319061A1

    公开(公告)日:2020-10-08

    申请号:US16305812

    申请日:2017-05-29

    申请人: Hitachi, Ltd.

    摘要: In order to detach substances stably from an inspection object, an adhering substance collecting device includes: ejection openings configured to eject gas; a housing on which the ejection openings are provided; and supporting portions which are installed on a surface of the housing on which the ejection openings are provided, and have a prescribed height. The supporting portions include protruded portions formed on the housing. The supporting portions each have a cuboid shape, and are installed such that a distance therebetween becomes smaller toward a direction of a recovery opening that is configured to collect substances having been detached from an inspection object, from the gas.

    ATTACHED SUBSTANCE COLLECTION DEVICE AND ATTACHED SUBSTANCE ANALYSIS SYSTEM

    公开(公告)号:US20220373434A1

    公开(公告)日:2022-11-24

    申请号:US17625369

    申请日:2020-06-17

    申请人: HITACHI, LTD.

    IPC分类号: G01N1/14

    摘要: An attached substance collection device comprising, a nozzle configured to jet gas upward, a surface equipped with an opening portion through which the gas jets, a collection opening through which the gas jetted toward an inspection object is collected, and a contact detection sensor configured to detect whether or not the inspection object has come into contact with the upper surface, wherein an attached substance attached to the inspection object is collected by using the gas, a height of a distal end of the nozzle is substantially equal to a height of the surface; or equal to or less than a height of the surface, the surface includes a recess portion, and, relative to a jet opening of the nozzle, the recess portion is closer to the collection opening, and is in contact with the jet opening of the nozzle or includes the jet opening of the nozzle.

    MASS SPECTROMETER AND MASS SPECTROMETRY METHOD

    公开(公告)号:US20240038524A1

    公开(公告)日:2024-02-01

    申请号:US18213974

    申请日:2023-06-26

    申请人: HITACHI, LTD.

    IPC分类号: H01J49/42 H01J49/06 H01J49/00

    摘要: The present disclosure proposes a mass spectrometer including a linear ion trap section and an analyzer that analyzes the ions ejected from the linear ion trap section having a multipole rod electrode including a plurality of segments arranged in a direction of a center axis of the linear ion trap section. A first radio frequency voltage in opposite phase is applied to adjacent rod electrodes. An electrostatic voltage having the same amplitude and a second radio frequency voltage are applied to the segments having the same position in the direction of the center axis. The electrostatic voltage is applied to the segments such that the electrostatic voltage decreases from an inlet to an outlet of the linear ion trap section. The second radio frequency voltage is applied to the segments such that the second radio frequency voltage increases from the inlet to the outlet of the linear ion trap section.