公开(公告)号：US20180238926A1

公开(公告)日：2018-08-23

申请号：US15554264

申请日：2016-11-09

Applicant: Hitachi, Ltd.

Inventor： Takashi SHIOTA ,  Tatsuyuki SAITO ,  Tatemi IDO ,  Noriyuki SAKUMA ,  Yuudai KAMADA ,  Atsushi ISOBE ,  Chisaki TAKUBO

IPC: G01P15/125 ,  B81C1/00 ,  G01P15/08

CPC classification number: G01P15/125 ,  B81B3/00 ,  B81B2201/0235 ,  B81C1/00047 ,  B81C1/00198 ,  B81C3/00 ,  G01P15/0802 ,  G01P2015/0862

Abstract: Airtightness in a cavity of an inertial sensor (acceleration sensor) is increased to achieve high sensitivity. In the acceleration sensor having movable electrodes VE1, VE2 and fixed electrodes FE1, FE2, the fixed electrodes are formed by portions surrounded by a through hole TH1 provided in a cap layer CL, and the through hole is filled with an insulating film IF1 and polysilicon P and has a wide portion (WP). The wide portion has a gap SP that is not filled with the insulating film IF1 and the polysilicon P, and the gap SP is filled with the interlayer insulating film ID. With such a configuration, degassing can be exhausted through the gap (airway) SP in a pressure reducing step.

公开(公告)号：US20200278463A1

公开(公告)日：2020-09-03

申请号：US16646197

申请日：2017-10-25

Applicant: HITACHI, LTD.

Inventor： Akira MAEKI ,  Shiro MAZAWA ,  Tatsuyuki SAITO ,  Takao SAKURAI ,  Tomonori SEKIGUCHI

IPC: G01V1/16 ,  G01V1/18

Abstract: An internal structure detection system includes: two kinds of sensors with different operating principles for receiving reflected waves of vibration applied to an inspection target in an investigation area; and a processing apparatus that detects an internal structure of the inspection target by using the sensor data received by the two kinds of sensors. The two kinds of sensors are deployed in the investigation area with different densities, in a distributed manner.