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公开(公告)号：US20180321274A1
公开(公告)日：2018-11-08
申请号：US15756279
申请日：2016-11-08
申请人： HITACHI, LTD.
IPC分类号： G01P15/125 , G01V1/18 , G01R19/00 , G01V1/30
CPC分类号： G01P15/125 , G01P15/08 , G01P15/13 , G01P2015/0862 , G01R19/0084 , G01V1/18 , G01V1/181 , G01V1/28 , G01V1/30
摘要： Provided are acceleration sensor, geophone and seismic prospecting system with high sensitivity and low power consumption. The acceleration sensor includes a mass body displaceable with respect to a rotation shaft. The acceleration sensor includes a first AC servo control facing a first symmetrical region of the first movable portion, a second AC servo control electrode facing a second symmetrical region of the second movable portion, and a DC servo control electrode facing an asymmetrical region of the second movable portion. A first AC servo capacitive element is formed by the first movable portion and the first AC servo control electrode, a second AC servo capacitive element is formed by the second movable portion and the second AC servo control electrode, and a DC servo capacitive element is formed by the second movable portion and the DC servo control electrode.
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公开(公告)号：US20180252745A1
公开(公告)日：2018-09-06
申请号：US15758188
申请日：2015-09-15
申请人： HITACHI, LTD.
IPC分类号： G01P15/125 , G01P15/18 , G01P15/08
摘要： There is provided an acceleration sensor with low noise and high sensitivity. Specifically, a first number of opening portions are formed in a region corresponding to a heavyweight section of a mass body, on a surface of a membrane layer, and a second number of opening portions are formed in a region corresponding to the heavyweight section of the mass body, on a back surface of the membrane layer. The opening portion and the opening portion are connected to each other to form a plurality of through portions on the membrane layer, and the first number is larger than the second number.
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公开(公告)号：US20180210005A1
公开(公告)日：2018-07-26
申请号：US15742550
申请日：2015-07-10
申请人： Hitachi, Ltd.
发明人： Atsushi ISOBE , Yuki FURUBAYASHI , Takashi OSHIMA , Yuudai KAMADA , Takashi SHIOTA , Chisaki TAKUBO , Noriyuki SAKUMA
IPC分类号： G01P15/125 , G01P15/13 , G01P15/08 , G01P15/18
CPC分类号： G01P15/125 , B81B2201/0235 , G01P15/0802 , G01P15/131 , G01P15/18
摘要： There is provided an inertia sensor with low noise and high sensitivity. The inertia sensor captures a physical quantity as a change of electrostatic capacitance and detects the physical quantity based on a servo voltage generating electrostatic force that cancels the change of the electrostatic capacitance. The inertia sensor includes a detection capacitor unit that captures the physical quantity as the change of the electrostatic capacitance and a servo capacitor unit to which the servo voltage is applied. Here, the detection capacitor unit and the servo capacitor unit are connected mechanically through an insulation material.
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公开(公告)号：US20180370793A1
公开(公告)日：2018-12-27
申请号：US15918502
申请日：2018-03-12
申请人： Hitachi, Ltd.
发明人： Masaharu KINOSHITA , Atsushi ISOBE , Kazuo ONO , Noriyuki SAKUMA , Tomonori SEKIGUCHI , Keiji WATANABE
摘要： A manufacturing method of a MEMS sensor includes a step of, by irradiating a first hole formed in a second layer on a semiconductor substrate with a focused ion beam for a first predetermined time, forming a first sealing film, which seals the first hole, on the first hole, and a step of, by irradiating a second hole formed in the second layer with a focused ion beam for a second predetermined time, forming a second sealing film, which seals the second hole, on the second hole. At this time, each of the first predetermined time and the second predetermined time is a time in which thermal equilibrium of the second layer is maintainable, and the step of forming the first sealing film and the step of forming the second sealing film are performed repeatedly.
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公开(公告)号：US20230327164A1
公开(公告)日：2023-10-12
申请号：US18112693
申请日：2023-02-22
申请人： Hitachi, Ltd.
IPC分类号： H01M8/1286 , H01M8/1253 , H01M8/1226 , H01M8/1231 , H01M8/248 , H01M8/2457
CPC分类号： H01M8/1286 , H01M8/1253 , H01M8/1226 , H01M8/1231 , H01M8/248 , H01M8/2457 , H01M2008/1293
摘要： An object of the present invention is to provide a fuel cell that obtains high output density and prevents stress application to the cell during stack assembling and breakage. The fuel cell is equipped with a unit cell including a structure in which an electrolyte layer is sandwiched between an anode electrode layer and a cathode electrode layer. The unit cell is disposed between a first member and a second member. An intermediate substrate is disposed between the first member and the second member. The unit cell is supported at the outer peripheral portion thereof by the intermediate substrate. The width of the electrolyte layer is the maximum width or less of a hollow portion formed between at least one of the first member and the second member and the unit cell.
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公开(公告)号：US20170292970A1
公开(公告)日：2017-10-12
申请号：US15511444
申请日：2014-11-11
申请人： HITACHI, LTD.
IPC分类号： G01P15/125
CPC分类号： G01P15/125
摘要： An acceleration sensor (1) includes a fixed portion (33), a movable portion (31) connected to the fixed portion (33), a lower electrode (11) that is disposed to face a lower surface of the movable portion (31), and an upper electrode (21) that is disposed to face an upper surface of the movable portion (31). A distance in an x-axis direction between an end portion (41) of the lower electrode (11) and the fixed portion (33) is shorter than a distance in the x-axis direction between an end portion (51) of the upper electrode (21) and the fixed portion (33). Further, a distance in the x-axis direction between an end portion (42) of the lower electrode (11) and the fixed portion (33) is shorter than a distance in the x-axis direction between an end portion (52) of the upper electrode (21) and the fixed portion (33).
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公开(公告)号：US20160091525A1
公开(公告)日：2016-03-31
申请号：US14856537
申请日：2015-09-16
申请人： HITACHI, LTD.
IPC分类号： G01P15/125
CPC分类号： G01P15/125
摘要： An acceleration sensor that achieves a simultaneous operation method of a signal detection and a servo control is provided as an alternative to a time-division processing method. The acceleration sensor is a MEMS capacitive acceleration sensor. The acceleration sensor includes signal detection capacitor pairs 12, 15, and DC servo control capacitor pairs 13, 16, and AC servo control capacitor pairs 14, 17, which are different from the signal detection capacitor pairs 12, 15. A voltage that generates a force in a direction opposite to a detection signal of acceleration detected by the signal detection capacitor pairs 12, 15 is applied to the DC servo control capacitor pairs 13, 16 and the AC servo control capacitor pairs 14, 17.
摘要翻译： 提供了实现信号检测和伺服控制的同时操作方法的加速度传感器作为时分处理方法的替代。 加速度传感器是MEMS电容式加速度传感器。 加速度传感器包括不同于信号检测电容器对12,15的信号检测电容器对12,15和DC伺服控制电容器对13,16以及AC伺服控制电容器对14,17。 与由信号检测用电容器对12,15检测出的加速度检测信号相反的方向的力被施加到DC伺服控制电容器对13,16和AC伺服控制电容器对14,17。
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公开(公告)号：US20180372774A1
公开(公告)日：2018-12-27
申请号：US16064562
申请日：2016-04-18
申请人： HITACHI, LTD.
IPC分类号： G01P15/125 , G01P15/08
摘要： An acceleration sensor has high sensitivity, low power consumption and high linearity of output to the applied acceleration under gravity. To solve the above problem, the acceleration sensor is provided with a movable section placed between a base substrate and a cap substrate and rotating about a rotation axis. A top left electrode included in the cap substrate and a left movable electrode included in the movable section form a left capacitor, and a top right electrode included in the cap substrate and a right movable electrode included in the movable section form a right capacitor. Then, a lateral width of a first detection region in which capacitance is detected between the top left electrode and the left movable electrode, and a lateral width of a second detection region in which capacitance is detected between the top right electrode and the right movable electrode are different from each other.
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公开(公告)号：US20180252744A1
公开(公告)日：2018-09-06
申请号：US15671340
申请日：2017-08-08
申请人： HITACHI, LTD.
IPC分类号： G01P15/125 , B81B3/00 , G01P15/08 , G01P15/18 , H01H1/00
CPC分类号： G01P15/125 , B81B3/0051 , B81B2201/0235 , G01P15/0802 , G01P15/18 , G01P2015/0871 , H01H1/0036 , H01H36/0006
摘要： Provided is an acceleration sensor having a large mass in a movable portion, and realizing high impact resistance. An acceleration sensor element 10a includes an upper substrate 20, a lower substrate 21 spaced apart from the upper substrate 20, and an intermediate substrate 19 provided between the upper substrate 20 and the lower substrate 21. Each of a first movable portion 16, a second movable portion 17, a frame portion 12, a fixed portion 13, and a spring portion 14 constituting the intermediate substrate 19 is configured with two layers of an upper layer and a lower layer, and a stopper portion 18 is provided at one end of the frame portion 12. A distance 31 between an end portion of the first movable portion 16 or the second movable portion 17 and an end portion of the stopper portion 18 in the upper layer and a distance 32 between an end portion of the first movable portion 16 or the second movable portion 17 and an end portion of the stopper portion 18 in the lower layer are different from each other.
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公开(公告)号：US20230369628A1
公开(公告)日：2023-11-16
申请号：US18139742
申请日：2023-04-26
申请人： Hitachi, Ltd.
IPC分类号： H01M8/24 , H01M8/2465 , H01M8/04089 , H01M8/0271
CPC分类号： H01M8/2459 , H01M8/2465 , H01M8/04089 , H01M8/0271
摘要： A preferred aspect of the present invention is a fuel cell stack provided with a plurality of fuel cells each including a solid electrolyte layer and first and second electrode layers formed across the solid electrolyte layer. The fuel cells are stacked with the first or second electrode layers of adjacent cells facing each other. A common flow path for supplying a first gas to both of the first electrode layers facing each other is formed in an area where the first electrode layers face each other. A common flow path for supplying a second gas to both of the second electrode layers facing each other is formed in an area where the second electrode layers face each other. A connection electrode is formed at the end of the fuel cell. At least some of the stacked cells are connected in series via the connection electrode.
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