公开(公告)号：US20170023409A1

公开(公告)日：2017-01-26

申请号：US15120792

申请日：2015-01-16

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Tsuyoshi SONEHARA ,  Hiromi KUSAKA ,  Akira FUJII ,  Shuhei YAMAMOTO ,  Takeshi OOURA ,  Michiru FUJIOKA

IPC: G01J3/44 ,  G01N21/65 ,  G02B21/16 ,  G02B21/24 ,  G02B21/36 ,  G02B27/14 ,  G01J3/02 ,  G02B21/00

CPC classification number: G01J3/44 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0248 ,  G01J3/10 ,  G01J3/4406 ,  G01N21/6458 ,  G01N21/65 ,  G02B7/28 ,  G02B7/32 ,  G02B21/0004 ,  G02B21/16 ,  G02B21/244 ,  G02B21/36 ,  G02B21/365 ,  G02B27/141

Abstract: With a microspectroscopy device provided with an objective lens with a high numerical aperture, a defocus arises from thermal drift, etc., necessitating auto-focusing. Conventional auto-focus based on through-focus image acquisition takes time, and thus, it cannot be applied to continuous measurement over a long time wherein high-speed sampling is carried out. The present invention addresses this problem by having a defocus-sensing beam that has either defocus or astigmatism fall incident on the objective lens. Since how the image of the spot of the beam for defocus sensing blurs differs depending on the orientation of the defocus, real-time detection of the amount and orientation of defocus becomes possible, and high-speed realtime auto-focus becomes possible.

Abstract translation: 利用具有高数值孔径的物镜的显微光谱装置，由于热漂移等引起散焦，需要自动聚焦。 基于通过聚焦图像获取的常规自动对焦需要时间，因此不能将其应用于长时间进行高速采样的连续测量。 本发明通过具有散焦或像散落在物镜上的散焦感测光束来解决这个问题。 由于用于散焦感测模糊的光束的斑点的图像根据散焦的取向而不同，所以可以实现对散焦的量和取向的实时检测，并且可以实现高速实时自动对焦。