公开(公告)号：US20130108400A1

公开(公告)日：2013-05-02

申请号：US13633155

申请日：2012-10-02

Applicant: Hitachi High-Technologies Corporation

Inventor： Keita NOGI ,  Teruo NAKATA ,  Yoshiro SUEMITSU ,  Michinori KAWAGUCHI ,  Satomi INOUE

IPC: H01L21/677

CPC classification number: H01L21/67276

Abstract: Transportation control in a vacuum processing device with high transportation efficiency without lowering throughput is provided. A control unit is configured to update in real time and holds device state information showing an action state of each of a process chamber, a transportation mechanism unit, a buffer room, and a holding mechanism unit, the presence of a process subject member, and a process state thereof; select a transport algorithm from among transport algorithm judgment rules that are obtained by simulating in advance a plurality of transport algorithms for controlling transportation of a process subject member for each condition of a combination of the number and arrangement of the process chambers and process time of a process subject member based on the device state information and process time of the process subject member; and compute a transport destination of the process subject member based on the selected transport algorithm.

Abstract translation: 提供了具有高运输效率而不降低生产量的真空处理装置中的运输控制。 控制单元被配置为实时更新并保持表示处理室，运送机构单元，缓冲室和保持机构单元的动作状态的装置状态信息，处理对象构件的存在和 其处理状态; 从传输算法判断规则中选择一种传输算法，该传输算法判断规则是通过预先模拟用于控制处理室的数量和布置的组合的每个条件的处理对象构件的传送的多个传输算法而获得的，以及处理室的处理时间 基于过程主体的设备状态信息和处理时间处理主题成员; 并基于所选择的传输算法计算过程主体成员的传输目的地。

公开(公告)号：US20140099176A1

公开(公告)日：2014-04-10

申请号：US14023874

申请日：2013-09-11

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Keita NOGI ,  Teruo NAKATA ,  Kenji TAMAI ,  Michinori KAWAGUCHI ,  Yoshiro SUEMITSU

IPC: H01L21/677

CPC classification number: H01L21/677 ,  H01L21/67276 ,  H01L21/67703 ,  H01L21/67739 ,  H01L21/67745

Abstract: A semiconductor processing apparatus is provided, which includes processing chambers coupled together by transport mechanisms having transfer robots. After having completed wafer processing in each processing chamber, the allowable value of a time permitted for a processing-completed wafer to continue residing within the processing chamber is set up. Then, a time consumed up to the completion of transportation of a wafer scheduled to be next processed is estimated, thereby controlling a transfer robot in a way such that, when the estimated transfer time exceeds the allowable value of the waiting time, priority is given to an operation for unloading a processed wafer from the processing chamber insofar as the processed wafer's transfer destination is already in its state capable of accepting such wafer.

Abstract translation: 提供一种半导体处理装置，其包括通过具有传送机器人的传送机构联接在一起的处理室。 在每个处理室中完成晶片处理之后，建立处理完成的晶片继续驻留在处理室内所允许的时间允许值。 然后，估计到预定进行下一次处理的晶片的运送完成所消耗的时间，从而以这样的方式控制传送机器人，使得当估计的传送时间超过等待时间的允许值时，给予优先级 涉及从处理室卸载经处理的晶片的操作，只要处理的晶片的转印目的地已经处于能够接受该晶片的状态。

公开(公告)号：US20130274908A1

公开(公告)日：2013-10-17

申请号：US13859812

申请日：2013-04-10

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Teruo NAKATA ,  Keita NOGI ,  Satomi INOUE

IPC: G05B15/02

CPC classification number: G05B15/02 ,  G05B19/41865 ,  G05B2219/32328 ,  G05B2219/45031 ,  Y02P90/083 ,  Y02P90/18 ,  Y02P90/20 ,  Y02P90/26 ,  Y02P90/265 ,  Y02P90/28

Abstract: Provided is a method that may quickly and simply select the allocation of the type of wafers to the processing chamber having a higher productivity in a semiconductor processing device in which a plurality of conveyance robots is disposed in a conveyance mechanism to which a processing chamber is connected and an object to be processed is delivered between the plurality of conveyance robots, when processings are performed on a plurality of types of wafers in parallel. From the information on the arrangement of the processing chambers of the semiconductor processing device and input type of wafers to be processed, the processing chamber allocation candidate is comprehensively generated and a simulation that manufactures all processing targets for each of the processing chamber allocation candidates is performed to calculate a productivity and the candidates are displayed in the order from a higher productivity to support the adoption of a user.

Abstract translation: 提供了一种方法，其可以在半导体处理装置中快速简单地选择对具有较高生产率的处理室的类型的分配，其中多个输送机器人设置在处理室被连接到的输送机构中 并且当在多个类型的晶片上并行执行处理时，在多个输送机器人之间传送被处理物体。 根据关于半导体处理装置的处理室的布置的信息和要处理的晶片的输入类型，综合地生成处理室分配候选，并且执行为处理室分配候选中的每一个生成所有处理目标的模拟 计算生产率，候选人按照更高的生产率显示顺序，以支持用户的采用。