公开(公告)号：US20240030013A1

公开(公告)日：2024-01-25

申请号：US18222029

申请日：2023-07-14

Applicant: HORIBA STEC, Co., Ltd.

Inventor： Miyako HADA ,  Motonobu TAKAHASHI ,  Masakazu MINAMI ,  Yuhei SAKAGUCHI ,  Toru SHIMIZU ,  Tetsuo FUJII

IPC: H01J37/32 ,  H01L21/67

CPC classification number: H01J37/32981 ,  H01J37/32926 ,  H01L21/67069 ,  H01L21/67253 ,  H01J2237/2445 ,  H01J2237/3341

Abstract: The present invention is aimed to perform precise monitoring of the processed amount by which a workpiece is processed, and includes a measurement unit that measures a concentration or a partial pressure of a reaction product generated while the workpiece is being processed, and an operation unit that calculates the processed amount of the workpiece using an output value of the measurement unit. The measurement unit includes: a laser light source that irradiates target gas containing the reaction product with a laser beam; a photodetector that detects a laser beam having passed through the target gas; and a signal processing unit that calculates the concentration or the partial pressure of the reaction product based on a detection signal of the photodetector. The operation unit includes a time integration unit; a relationship data storage unit; and a processed amount calculation unit.

公开(公告)号：US20200182776A1

公开(公告)日：2020-06-11

申请号：US16689455

申请日：2019-11-20

Applicant: HORIBA STEC, CO., LTD.

Inventor： Miyako HADA ,  Daisuke HAYASHI

IPC: G01N21/03

Abstract: In order to provide an absorption analyzer capable of directly measuring an analysis target gas flowing into or produced in a vessel such as a chamber and preventing a measurement error due to moisture condensation, the absorption analyzer is adapted to include: a light emission module that is attached covering a first opening of the vessel into which the analysis target gas flows or in which the analysis target gas is produced and emits light into the vessel; and a light detection module that detects the light emitted from the light emission module and passing through the vessel. In addition, the light emission module is adapted to include: a base flange that is attached around the first opening on an outer surface of the vessel; a window material whose outer surface is tilted at a predetermined angle; a seal member; and a pressing body.