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公开(公告)号：US11631596B2
公开(公告)日：2023-04-18
申请号：US16807722
申请日：2020-03-03
发明人： Toru Shimizu , Masakazu Minami
IPC分类号： C23C16/448 , H01L21/67 , G05D11/13
摘要： In order to provide a concentration control apparatus that, without adding any new sensors or the like, makes it possible to accurately estimate a quantity of source consumed inside a vaporization tank, and to perform highly accurate concentration control in accordance with the remaining quantity of source, there is provided a concentration control apparatus that, in a vaporizer that is equipped with at least a vaporization tank containing a liquid or solid source, a carrier gas supply path that supplies a carrier gas to the vaporization tank, and a source gas extraction path along which flows a source gas which is created by vaporizing the source and is then extracted from the vaporization tank, controls a concentration of the source gas and includes a concentration monitor that is provided on the source gas extraction path, and outputs output signals in accordance with a concentration of the source gas.
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公开(公告)号：US11519070B2
公开(公告)日：2022-12-06
申请号：US16778503
申请日：2020-01-31
发明人： Toru Shimizu , Masakazu Minami
IPC分类号： C23C16/52
摘要： In order to inhibit overshoot in the concentration of a source gas immediately after a gas supply period starts, there is provided a vaporization device that is equipped with a vaporization tank that holds a liquid or a solid source, a carrier gas supply path that supplies carrier gas to the vaporization tank, a source gas extraction path along which flows a source gas which is obtained by vaporizing the source and which is extracted from the vaporization tank, a concentration monitor that is provided on the source gas extraction path, and a concentration control mechanism that is provided with a fluid controller which controls a concentration of the source gas extracted from the source gas extraction path. This vaporization device alternates between supplying the source gas and stopping the supply of the source gas.
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公开(公告)号：US11493443B2
公开(公告)日：2022-11-08
申请号：US16849381
申请日：2020-04-15
发明人： Toru Shimizu , Yuhei Sakaguchi , Masakazu Minami
IPC分类号： G01N21/61
摘要： In order to make it possible to conduct a zero calibration even though an interference gas exists in a measurement area of a detector, a light absorbance analysis apparatus includes a detector that detects an intensity of light that transmits a gas, a total pressure sensor that measures a total pressure of the gas, an absorbance calculating part that calculates an absorbance based on an output value of the detector and a previously set zero reference value, a partial pressure—absorbance relation storing part that stores a partial pressure—absorbance relational data that indicates a relationship between a partial pressure of an interference gas that exists in a measurement area of the detector and an absorbance calculated by the absorbance calculating part, and a partial pressure calculating part that calculates an interference gas partial pressure as a partial pressure of the interference gas.
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公开(公告)号：US20180258530A1
公开(公告)日：2018-09-13
申请号：US15911650
申请日：2018-03-05
IPC分类号： C23C16/455 , G05D11/13
CPC分类号： C23C16/45523 , C23C16/4482 , C23C16/45502 , C23C16/45512 , C23C16/45557 , C23C16/45561 , G05D11/132 , G05D11/138
摘要： The present invention makes it easy to control the amount of material gas led out of a tank. Accordingly, carrier gas is introduced into a tank containing a material and together with the carrier gas, from the tank, material gas produced by vaporization of the material is led out. A control part controls the flow rate of the carrier gas so that a concentration index value obtained by measuring mixed gas led out of the tank and indicating the concentration of the material gas in the mixed gas comes close to a predetermined target concentration index value. In addition, the control part controls the flow rate of the carrier gas to change at a predetermined change rate, and then controls the flow rate of the carrier gas on the basis of the deviation between the concentration index value and the target concentration index value.
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公开(公告)号：US11365480B2
公开(公告)日：2022-06-21
申请号：US16749282
申请日：2020-01-22
发明人： Toru Shimizu , Masakazu Minami
IPC分类号： C23C16/40 , C23C16/455 , C23C16/448 , H01L21/67
摘要： A concentration control apparatus capable of appropriately making a zero adjustment of a concentration measurement mechanism without interrupting a semiconductor manufacturing process includes: a control valve that controls gas flowing through a lead-out flow path; a concentration measurement mechanism that measures the concentration of source gas contained in gas flowing through the lead-out flow path; a concentration controller that controls the control valve so that the deviation between measured concentration measured by the concentration measurement mechanism and preset set concentration decreases; a judgement time point determination part that determines a judgement time point that is the time point when the gas present in a measurement part where the concentration measurement mechanism performs the concentration measurement has been replaced with other gas; and a zero adjustment part that makes a zero adjustment of the concentration measurement mechanism at or after the judgement time point.
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公开(公告)号：US11226235B2
公开(公告)日：2022-01-18
申请号：US16860602
申请日：2020-04-28
发明人： Toru Shimizu , Yuhei Sakaguchi , Masakazu Minami
摘要： An absorption spectroscopic system is provided with a detector that detects an intensity of light transmitted through a gas, a total pressure sensor that measures a total pressure of the gas, an interference gas partial pressure-absorbance relationship storage unit that stores interference gas partial pressure-absorbance relationship data, an interference gas partial pressure estimation unit that estimates the partial pressure of the interference gas based on the total pressure measured by the total pressure sensor, an interference gas absorbance conversion unit that converts an estimated partial pressure of the interference gas estimated by the interference gas partial pressure estimation unit into an absorbance of the interference gas based on the interference gas partial pressure-absorbance relationship data, and a target gas absorbance calculation unit that calculates an absorbance of the target gas based on output values from the detector and on the absorbance of the interference gas.
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公开(公告)号：US11225719B2
公开(公告)日：2022-01-18
申请号：US16217778
申请日：2018-12-12
发明人： Toru Shimizu
摘要： In a concentration controller that intermittently leads out material gas from a vaporization tank, in order to control the flow rates of carrier and diluent gases so that the concentration of the material gas can be suppressed from overshooting immediately after the start of material gas supply period, the concentration controller is adapted to include: a concentration calculation part that calculates the concentration of the material gas on the basis of an output signal from a concentration monitor; and a set flow rate calculation part that, on the basis of actual concentration calculated by the concentration calculation part, an actual flow rate outputted from a flow rate control device or the set flow rate of the flow rate control device, and a preset target concentration, calculates the initial set flow rate of the flow rate control device.
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公开(公告)号：US10718050B2
公开(公告)日：2020-07-21
申请号：US16134082
申请日：2018-09-18
发明人： Toru Shimizu , Masakazu Minami
IPC分类号： C23C16/448 , C23C14/54 , C23C16/455
摘要： Provided is a concentration control apparatus that, without reducing maintainability, can shorten piping to improve responsiveness. The concentration control apparatus is one adapted to introduce carrier gas into a storage tank storing a material, and control the concentration of material gas that is led out of the storage tank as mixed gas with the carrier gas and results from vaporization of the material. Also, the concentration control apparatus includes: a first unit that controls the flow rate of the carrier gas to be introduced into the storage tank; and a second unit that detects the concentration of the material gas led out of the storage tank.
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公开(公告)号：US10655220B2
公开(公告)日：2020-05-19
申请号：US15911650
申请日：2018-03-05
IPC分类号： G05D11/13 , C23C16/455 , C23C16/448
摘要： The present invention makes it easy to control the amount of material gas led out of a tank. Accordingly, carrier gas is introduced into a tank containing a material and together with the carrier gas, from the tank, material gas produced by vaporization of the material is led out. A control part controls the flow rate of the carrier gas so that a concentration index value obtained by measuring mixed gas led out of the tank and indicating the concentration of the material gas in the mixed gas comes close to a predetermined target concentration index value. In addition, the control part controls the flow rate of the carrier gas to change at a predetermined change rate, and then controls the flow rate of the carrier gas on the basis of the deviation between the concentration index value and the target concentration index value.
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