METHOD OF FABRICATING ELECTRICALLY ISOLATED DIAMOND NANOWIRES AND ITS APPLICATION FOR NANOWIRE MOSFET

    公开(公告)号:US20200235211A1

    公开(公告)日:2020-07-23

    申请号:US16825914

    申请日:2020-03-20

    发明人: Biqin HUANG Xiwei Bai

    摘要: A method for fabricating an electrically isolated diamond nanowire includes forming a diamond nanowire on a diamond substrate, depositing a dielectric or a polymer on the diamond nanowire and on the diamond substrate, planarizing the dielectric or the polymer, etching a portion of the planarized dielectric or polymer to expose a first portion of the diamond nanowire, depositing a metal layer to conformably cover the first portion of the diamond nanowire, and implanting ions into a second portion of the diamond nanowire between the first portion of the diamond nanowire and the diamond substrate or at an intersection of the diamond nanowire and the diamond substrate, wherein the ions are implanted at an oblique angle from a first side of the diamond nanowire.