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公开(公告)号：US07852474B2
公开(公告)日：2010-12-14
申请号：US11785153
申请日：2007-04-16
IPC分类号： G01J3/28
CPC分类号： G02B21/0064 , G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0259 , G01J3/1804 , G02B21/16
摘要： A spectral analytical unit for acting on a parallel light bundle having different wavelengths. The spectral analytical unit includes a diffraction grating on which the light bundle falls, the diffraction grating splitting the different wavelengths through diffraction in first spectral directions defining a light bundle diffraction order 1 without recycle, and the diffraction grating bending the light bundle in second directions defining a light bundle diffraction order 0 without recycle, a detector line made up of a plurality of elements, optics for focusing the split light bundle diffraction order 1 without recycle on the detector line, evaluation electronics connected to the detector line for obtaining data related to a created spectrum, and a deflecting device wherein the diffraction order 0 light bundle without recycle meets on the deflecting device which is so directed and positioned that this light bundle falls on the diffraction grating thereby creating a reflected diffraction order 1 light bundle with first recycle and a reflected diffraction order 0 light bundle with first recycle whereby the diffraction order 1 without recycle and the reflected diffraction order 1 light bundle with first recycle each of a part wavelength range are impressed through the optics on a single element of the detector line.
摘要翻译： 用于作用于具有不同波长的平行光束的光谱分析单元。 光谱分析单元包括光束落在其上的衍射光栅，衍射光栅通过在限定光束衍射级数1而不进行再循环的第一光谱方向上通过衍射分离不同波长，并且衍射光栅在限定第二方向的第二方向上折射光束 没有再循环的光束衍射级0，由多个元件组成的检测器线，用于将分束光束衍射级1聚焦在检测器线路上而不再循环的光学器件，连接到检测器线的评估电子设备，用于获得与 以及偏转装置，其中没有再循环的衍射级0光束在偏转装置上相遇，所述偏转装置被定向和定位成使得该光束落在衍射光栅上，从而产生具有第一再循环的反射衍射级1光束和 反射衍射级0光束与fi 第一次循环，其中没有再循环的衍射级1和具有部分波长范围的第一次再循环的反射衍射级1光束通过检测器线的单个元件上的光学器件施加。
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公开(公告)号：US20070242268A1
公开(公告)日：2007-10-18
申请号：US11785153
申请日：2007-04-16
IPC分类号： G01J3/28
CPC分类号： G02B21/0064 , G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0259 , G01J3/1804 , G02B21/16
摘要： A spectral analytical unit for acting on a parallel light bundle having different wavelengths. The spectral analytical unit includes a diffraction grating on which the light bundle falls, the diffraction grating splitting the different wavelengths through diffraction in first spectral directions defining a light bundle diffraction order 1 without recycle, and the diffraction grating bending the light bundle in second directions defining a light bundle diffraction order 0 without recycle, a detector line made up of a plurality of elements, optics for focusing the split light bundle diffraction order 1 without recycle on the detector line, evaluation electronics connected to the detector line for obtaining data related to a created spectrum, and a deflecting device wherein the diffraction order 0 light bundle without recycle meets on the deflecting device which is so directed and positioned that this light bundle falls on the diffraction grating thereby creating a reflected diffraction order 1 light bundle with first recycle and a reflected diffraction order 0 light bundle with first recycle whereby the diffraction order 1 without recycle and the reflected diffraction order 1 light bundle with first recycle each of a part wavelength range are impressed through the optics on a single element of the detector line.
摘要翻译： 用于作用于具有不同波长的平行光束的光谱分析单元。 光谱分析单元包括光束落在其上的衍射光栅，衍射光栅通过在限定光束衍射级数1而不进行再循环的第一光谱方向上通过衍射分离不同波长，并且衍射光栅在限定第二方向的第二方向上折射光束 没有再循环的光束衍射级0，由多个元件组成的检测器线，用于将分束光束衍射级1聚焦在检测器线路上而不再循环的光学器件，连接到检测器线的评估电子设备，用于获得与 以及偏转装置，其中没有再循环的衍射级0光束在偏转装置上相遇，所述偏转装置被定向和定位成使得该光束落在衍射光栅上，从而产生具有第一再循环的反射衍射级1光束和 反射衍射级0光束与fi 第一次循环，其中没有再循环的衍射级1和具有部分波长范围的第一次再循环的反射衍射级1光束通过检测器线的单个元件上的光学器件施加。
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公开(公告)号：US07554664B2
公开(公告)日：2009-06-30
申请号：US11878998
申请日：2007-07-30
IPC分类号： G01N21/25
CPC分类号： G02B21/0076
摘要： Laser Scanning Microscope with an illumination beam path for illumination of a sample and a detection beam path for wavelength-dependent recording of the light from the sample, whereby filters for selection of the detection wavelengths are provided, characterized in that at least one graduated filter spatially variable in regard to the threshold wavelength between the transmission and reflection is provided in several partial beam paths for the selection of the wavelengths.
摘要翻译： 激光扫描显微镜具有用于照射样品的照明光束路径和用于来自样品的光的波长依赖性记录的检测光束路径，由此提供用于选择检测波长的滤光器，其特征在于，至少一个刻度滤光器在空间上 关于透射和反射之间的阈值波长可变的几个部分光束路径被提供用于选择波长。
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公开(公告)号：US20080024782A1
公开(公告)日：2008-01-31
申请号：US11878998
申请日：2007-07-30
CPC分类号： G02B21/0076
摘要： Laser Scanning Microscope with an illumination beam path for illumination of a sample and a detection beam path for wavelength-dependent recording of the light from the sample, whereby filters for selection of the detection wavelengths are provided, characterized in that at least one graduated filter spatially variable in regard to the threshold wavelength between the transmission and reflection is provided in several partial beam paths for the selection of the wavelengths.
摘要翻译： 激光扫描显微镜具有用于照射样品的照明光束路径和用于来自样品的光的波长依赖性记录的检测光束路径，由此提供用于选择检测波长的滤光器，其特征在于，至少一个刻度滤光器在空间上 关于透射和反射之间的阈值波长可变的几个部分光束路径被提供用于选择波长。
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公开(公告)号：US20060273261A1
公开(公告)日：2006-12-07
申请号：US11416394
申请日：2006-05-03
IPC分类号： G01N21/64
CPC分类号： G02B21/008
摘要： A Laser Scanning Microscope with an illumination radiation distribution, which is guided over a sample for scanning and in which an image of the sample is taken from the sample radiation generated and detected during the scanning, wherein the sample is sampled with an imaging rate of x images per second, wherein in a mode for the adjustment of the device parameters, the imaging rate is reduced with uniform sampling speed. preferably for sparing the sample the exposure, to a fraction X/Y of X, Y>1.
摘要翻译： 具有照射辐射分布的激光扫描显微镜，其被引导到用于扫描的样本上，并且其中从扫描期间产生和检测的样品辐射中取出样品的图像，其中以x的成像速率 图像每秒，其中在用于调整设备参数的模式下，以均匀的采样速度降低成像速率。 优选用于将样品暴露于X，Y> X的分数X / Y。
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公开(公告)号：US20100188741A1
公开(公告)日：2010-07-29
申请号：US12691185
申请日：2010-01-21
IPC分类号： G02B21/06
CPC分类号： G02B21/0032 , G02B21/0048 , G02B21/0076
摘要： A laser scanning microscope has an illumination beam path and a detection beam path. A beamsplitter is provided which reflects the illumination light in direction of the sample and transmits the detection light in direction of the detection arrangement. An additional beamsplitter is provided for reflecting the illumination light and for transmitting the detection light, this additional beamsplitter being arranged in the illumination beam path downstream of the first beamsplitter in the illumination direction, and this additional beamsplitter substantially transmits the illumination light reflected at the first beamsplitter and the detection light, but acquires a wavelength range substantially different from the first beamsplitter with respect to its reflectivity.
摘要翻译： 激光扫描显微镜具有照明光束路径和检测光束路径。 提供了一种分束器，其在样品的方向上反射照明光并沿检测装置的方向透过检测光。 提供了附加的分光器，用于反射照明光并传输检测光，该附加分光器被布置在照明光束路径中的第一分束器在照明方向下游，并且该附加分束器基本上透射在第一 分束器和检测光，但是相对于其反射率获取与第一分束器基本不同的波长范围。
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公开(公告)号：US07369305B2
公开(公告)日：2008-05-06
申请号：US10967335
申请日：2004-10-19
IPC分类号： G02B21/00
CPC分类号： G02B21/0032 , G02B15/173 , G02B21/0052
摘要： For a confocal scanning electron microscope (1) an optical zoom system (41) is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable imaging length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.
摘要翻译： 对于共焦扫描显微镜（1），提供了一种光学变焦系统（41），其不仅使得变焦功能成为可能，因为图像的可变放大率是可能的，而是另外在照射光束中产生光瞳图像 路径（IB）[BS]，从而使可变成像长度成为可能（原始瞳孔（En.P）[EP]和成像/再现瞳孔（Ex.P）[AP]之间的距离）），使得轴向变化的目标瞳孔 因此可以补偿位置。
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公开(公告)号：US20060012871A1
公开(公告)日：2006-01-19
申请号：US10967638
申请日：2004-10-19
IPC分类号： G02B21/06
CPC分类号： G02B21/0044 , G01J3/02 , G01J3/0202 , G01J3/021 , G01J3/0227 , G01J3/0237 , G01J3/06 , G01J3/10 , G01J3/44 , G01J2003/1217 , G02B21/0064 , G02B21/008
摘要： In a confocal laser scanning microscope with an illuminating configuration (2), which provides an illuminating beam for illuminating a probe region (23), with a scanning configuration (3, 4), which guides the illuminating beam over the probe while scanning, and with a detector configuration (5), which via the scanning configuration (3, 4) images the illuminated probe region (23) by means of a confocal aperture (26) on to at least one detector unit (28), it is provided that the illuminating configuration (2) of the scanning configuration (3, 4) provides a line-shaped illuminating beam, that the scanning configuration (3, 4) guides the line-shaped illuminating beam over the probe f while scanning and that the confocal aperture is designed as a slotted aperture (26) or as a slot-shaped region (28, 48) of the detector unit (28) acting as a confocal aperture.
摘要翻译： 在具有照射配置（2）的共聚焦激光扫描显微镜中，其提供用于照射探针区域（23）的照明光束，所述照射光束具有扫描配置（3,4），其在扫描时将照射光束引导到探测器上;以及 具有检测器配置（5），其通过扫描配置（3,4）通过共焦孔（26）将照射的探测区域（23）映射到至少一个检测器单元（28）上， 扫描配置（3,4）的照明配置（2）提供线形照明光束，扫描配置（3,4）在扫描时将线形照明光束引导到探头f上，并且共焦孔 被设计为作为共焦孔的检测器单元（28）的开槽孔（26）或槽形区域（28,48）。
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公开(公告)号：US07888628B2
公开(公告)日：2011-02-15
申请号：US12320293
申请日：2009-01-22
CPC分类号： G02B21/0072 , G02B15/173
摘要： For a confocal scanning microscope (1) an optical zoom system (41) with linear scanning is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable image length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.
摘要翻译： 对于共焦扫描显微镜（1），提供了具有线性扫描的光学变焦系统（41），其不仅使得变焦功能成为可能，因为图像的可变放大倍率是可能的，而是另外产生瞳孔图像 照明光束路径（IB）[BS]，从而使可变图像长度成为可能（原始瞳孔（En.P）[EP]和成像/再现瞳孔（Ex.P）[AP]之间的距离） 可以补偿变化的物镜光瞳位置。
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公开(公告)号：US20090236522A1
公开(公告)日：2009-09-24
申请号：US12320293
申请日：2009-01-22
CPC分类号： G02B21/0072 , G02B15/173
摘要： For a confocal scanning electron microscope (1) an optical zoom system (41) with linear scanning is provided, which not only makes a zoom function possible, in that a variable magnification of an image is possible, but rather which additionally produces a pupil image in the illuminating beam path (IB) [BS] and thereby makes a variable imaging length possible (distance between the original pupil (En.P) [EP] and the imaged/reproduced pupil (Ex.P) [AP]) so that axially varying objective pupil positions can thereby be compensated.
摘要翻译： 对于共焦扫描电子显微镜（1），提供了具有线性扫描的光学变焦系统（41），其不仅使得变焦功能成为可能，因为图像的可变放大倍率是可能的，而是另外产生瞳孔图像 在照明光束路径（IB）[BS]中，从而使可变成像长度成为可能（原始瞳孔（En.P）[EP]和成像/再现瞳孔（Ex.P）[AP]之间的距离）），使得 从而可以补偿轴向变化的物镜光瞳位置。
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