摘要:
This invention is directed to methods for depositing multilayered thin films onto substrates, for example in making thin film magnetic heads. In accordance with the invention a first film, such as Cr, is deposited onto the substrate at a first pressure and a second layer, such as CoCrPt is deposited at a second pressure.
摘要:
This invention is directed to methods for depositing multilayered thin films onto substrates, for example in making thin film magnetic heads. In accordance with the invention a first film, such as Cr, is deposited onto the substrate at a first angle and a second layer, such as CoCrPt is deposited at a second angle.
摘要:
Blind wavelet extraction and de-convolution is performed on seismic data to enable its practical usage in seismic processing and to provide quality control of data obtained in areas where data from wells are not available. The wavelet extraction and deconvolution are realized in the time domain by iteration, producing a mixed phase wavelet with minimal prior knowledge of the actual nature of the wavelet. As a result of the processing, the de-convolved seismic reflectivity is obtained simultaneously.
摘要:
A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage. A dual-wafer table positioning system of a photolithography machine may be constructed by two said micro-stages in combination with a two-DOF large stroke linear motor. The present invention features simple structure, large driving force, small mass and absence of cable disturbance, and is possible to realize high precision, high acceleration six-DOF micro-motion.
摘要:
A two-dimensional locating method of a motion platform based on a magnetic steel array involves the following steps: placing more than four linear Hall sensors at any different positions within one or more polar distances of the magnetic steel array on the surface of the motion platform in a motion system; determining a magnetic flux density distribution model according to the magnetic steel array; determining the mounting positions of the above-mentioned linear Hall sensors, which are converted into phases with respect to the mass center of the motion platform; recording the magnetic flux density measured values of the linear Hall sensors as the motion proceeds; solving the phases of the mass center of the motion platform in a plane, with the measured values being served as observed quantities and the magnetic flux density distribution model being served as a computation model; and determining the position of the mass center of the motion platform with respect to an initial phase according to the phase, so as to realize the planar location of the motion platform. The present invention provides a simple, fast and robust method for computing mass center positions for a motion system containing a magnetic steel array.
摘要:
A vehicle-mounted antenna device is one in which rain water etc. do not accumulate around an antenna mast base structure and allowing a reduction of the antenna height. The vehicle-mounted antenna device having an antenna mast is constructed mainly from a base plate (10) on which a circuit board (11) is placed, a housing (20), and the antenna mast base structure (30) having a foldable structure. The housing (20) has a water discharge flow path (40) formed in a linear shape as viewed as viewed from the upper portion of the vehicle-mounted antenna device. The water discharge flow path (40) extends continuously underneath the antenna mast base structure while being inclined relative to the base plate. The water discharge flow path is constituted by, for example, the water discharge groove (41), which is formed at the bottom portion of the antenna mast receiving groove (22), and the water discharge flow path-cum-antenna mast receiving groove (42).
摘要:
A micro stage with 6 degrees of freedom used in super-precise processing and sensing equipment filed is disclosed. The micro stage has three sets of electromagnetic driving units arranged in a horizontal plane for driving the micro stage to obtain movements within the horizontal plane with 3 degrees of freedom in X, Y and θz directions and three electromagnetic driving units arranged in a vertical direction for driving the micro stage to obtain additional movements with 3 degrees of freedom in Z, θx and θy directions. Direct driving by electromagnetic force is used in the invention, resulting in advantages over stacked structures of having a simple structure, a compact profile, a low driven weight center, low stator inertia, etc. Thus, there is no mechanical friction and damping, and high displacement resolution can be provided. The positioning error of a wafer table of a lithographic machine can be compensated, and the leveling and focusing of the lithographic machine can be achieved. The invention is also applicable in super-precise processing and sensing fields for achieving 6 degree-of-freedom motions. The micro stage, which operates on the basis of Lorentz Law, provides a linear relation between the output pushing force and the input electrical current, and thus the movement control technique for it can be well established.
摘要:
An amorphous soft magnetic thin film material for forming shielding and keeper applications in MRAM devices. The amorphous soft magnetic material may be deposited using Physical Vapor Deposition (PVD) in the presence of a magnetic field, in order to form shielding layers and keepers in a multi-layer metallization process. The soft magnetic material may be an amorphous metallic alloy, such as CoZrX, where X may be Ta, Nb, Pd and/or Rh.
摘要:
A method and apparatus for fabricating a conformal thin film on a substrate are disclosed. The method includes introducing a gas from a gas inlet into an expansion volume associated with an atomic layer deposition (ALD) system. The gas is flowed through a diffuser plate adjacent to the expansion volume and a reaction chamber. The diffuser plate includes a protrusion located opposite the gas inlet and the protrusion reduces turbulence in the expansion volume.
摘要:
A method of distinguishing between daytime lighting conditions and nighttime lighting conditions based on a captured image by a vision-based imaging device along a path of travel. An image is captured by a vision-based imaging device. A region of interest is selected in the captured image. A light intensity value is determined for each pixel within the region of interest. A cumulative histogram is generated based on light intensity values within the region of interest. The cumulative histogram including a plurality of category bins representing the light intensity values. Each category bin identifies an aggregate value of light intensity values assigned to each respective category bin. An aggregate value is compared within a predetermined category bin of the histogram to a first predetermined threshold. A determination is made whether the image is captured during the daytime lighting conditions as a function of the aggregate value within the predetermined category bin.