公开(公告)号：US20150108594A1

公开(公告)日：2015-04-23

申请号：US14581141

申请日：2014-12-23

申请人： Headway Technologies, Inc.

发明人： Yuchen Zhou ,  Kunliang Zhang ,  Zhigang Bai

IPC分类号： H01L43/02 ,  H01L43/08

CPC分类号： G11B5/398 ,  B82Y10/00 ,  B82Y25/00 ,  B82Y40/00 ,  G01R33/093 ,  G01R33/098 ,  G11B5/3906 ,  G11B5/3909 ,  G11B5/3912 ,  G11B2005/3996 ,  H01F10/30 ,  H01F10/3259 ,  H01F10/3286 ,  H01F10/3295 ,  H01F41/307 ,  H01L43/02 ,  H01L43/08

摘要： A MR sensor is disclosed that has a free layer (FL) with perpendicular magnetic anisotropy (PMA) which eliminates the need for an adjacent hard bias structure to stabilize free layer magnetization and minimizes shield-FL interactions. In a TMR embodiment, a seed layer, free layer, junction layer, reference layer, and pinning layer are sequentially formed on a bottom shield. After patterning, a conformal insulation layer is formed along the sensor sidewall. Thereafter, a top shield is formed on the insulation layer and includes side shields that are separated from the FL by a narrow read gap. The sensor is scalable to widths

摘要翻译： 公开了具有垂直磁各向异性（PMA）的自由层（FL）的MR传感器，其不需要相邻的硬偏置结构来稳定自由层磁化并使屏蔽-FL相互作用最小化。 在TMR实施例中，种子层，自由层，结层，参考层和钉扎层依次形成在底部屏蔽上。 在图案化之后，沿传感器侧壁形成保形绝缘层。 此后，在绝缘层上形成顶部屏蔽，并且包括通过狭窄的读取间隙与FL分离的侧面屏蔽。 当PMA大于FL自扫描场时，传感器可缩放到宽度<50 nm。 有效偏置场对传感器纵横比相当不敏感，这使得高条纹和窄宽度传感器成为高RA TMR配置的可行方法。 传感器侧壁可以延伸到种子层或底部屏蔽中。

公开(公告)号：US20140177103A1

公开(公告)日：2014-06-26

申请号：US14193446

申请日：2014-02-28

申请人： Headway Technologies, Inc.

发明人： Zhigang Bai ,  Kowang Liu ,  Yan Wu ,  Moris Dovek

IPC分类号： G11B5/39

CPC分类号： G11B5/398 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  G11B5/3183 ,  G11B5/3186 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49048

摘要： A perpendicular magnetic recording (PMR) head is fabricated with a multi-level tapered write pole. The write pole comprises a main pole with a tapered tip on a leading edge or a trailing edge, on which is formed at least one yoke that has a tapered edge. The edge of the yoke is recessed from the ABS of the main pole, giving the head a stepped profile. The yoke can be a single yoke formed on one side of the main pole or it can be two yokes formed on both the leading and trailing sides of the main pole. The write pole structure creates an efficient channeling of magnetic flux to the ABS surface of the pole tip which produces magnetic recording field at high area densities.

摘要翻译： 垂直磁记录（PMR）头用多级锥形写柱制造。 写极包括在前缘或后缘具有锥形尖端的主极，在其上形成有至少一个具有锥形边缘的轭。 轭的边缘从主极的ABS凹入，使头部呈阶梯状。 轭可以是形成在主极的一侧上的单个磁轭，或者它可以是形成在主极的前侧和后侧的两个轭。 写磁极结构产生磁通量到磁极尖端的ABS表面的有效的通道，其产生高区域密度的磁记录场。

公开(公告)号：US20140091055A1

公开(公告)日：2014-04-03

申请号：US14098598

申请日：2013-12-06

申请人： Headway Technologies, Inc.

发明人： Yan Wu ,  Zhigang Bai ,  Moris Dovek ,  Cherng-Chyi Yan ,  Min Li ,  Jianing Zhou ,  Jiun-Ting Lee ,  Min Zheng

IPC分类号： G11B5/105

CPC分类号： G11B5/105 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163

摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a graded side shield that is conformal to the shape of the pole tip at an upper portion of the shield but not conformal to the pole tip at a lower portion. The shield includes a trailing shield, that is conformal to the trailing edge of the pole tip and may include a leading edge shield that magnetically connects two bottom ends of the graded side shield.

摘要翻译： 垂直磁记录（PMR）头被制造成具有通过分级侧屏蔽横向屏蔽的极尖，该平面侧屏蔽保护层在屏蔽的上部处与极尖的形状保持一致，但在下部不与极尖共形。 屏蔽件包括后挡板，其与电极尖端的后缘保持一致，并且可以包括磁性连接分级侧屏蔽件的两个底端的前缘屏蔽件。

公开(公告)号：US09025280B2

公开(公告)日：2015-05-05

申请号：US14193446

申请日：2014-02-28

申请人： Headway Technologies, Inc.

发明人： Zhigang Bai ,  Kowang Liu ,  Yan Wu ,  Moris Dovek

IPC分类号： G11B5/31 ,  G11B5/39 ,  G11B5/127

CPC分类号： G11B5/398 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  G11B5/3183 ,  G11B5/3186 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49044 ,  Y10T29/49048

摘要： A perpendicular magnetic recording (PMR) head is fabricated with a multi-level tapered write pole. The write pole comprises a main pole with a tapered tip on a leading edge or a trailing edge, on which is formed at least one yoke that has a tapered edge. The edge of the yoke is recessed from the ABS of the main pole, giving the head a stepped profile. The yoke can be a single yoke formed on one side of the main pole or it can be two yokes formed on both the leading and trailing sides of the main pole. The write pole structure creates an efficient channeling of magnetic flux to the ABS surface of the pole tip which produces magnetic recording field at high area densities.

摘要翻译： 垂直磁记录（PMR）头用多级锥形写柱制造。 写极包括在前缘或后缘具有锥形尖端的主极，在其上形成有至少一个具有锥形边缘的轭。 轭的边缘从主极的ABS凹入，使头部呈阶梯状。 轭可以是形成在主极的一侧上的单个磁轭，或者它可以是形成在主极的前侧和后侧的两个轭。 写磁极结构产生磁通量到磁极尖端的ABS表面的有效的通道，其产生高区域密度的磁记录场。

公开(公告)号：US08784674B2

公开(公告)日：2014-07-22

申请号：US14098598

申请日：2013-12-06

申请人： Headway Technologies, Inc.

发明人： Yan Wu ,  Zhigang Bai ,  Moris Dovek ,  Cherng-Chyi Han ,  Min Li ,  Jianing Zhou ,  Jiun-Ting Lee ,  Min Zheng

IPC分类号： B44C1/22 ,  G11B5/127 ,  G11B5/31 ,  G11B5/105

CPC分类号： G11B5/105 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163

摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a graded side shield that is conformal to the shape of the pole tip at an upper portion of the shield but not conformal to the pole tip at a lower portion. The shield includes a trailing shield, that is conformal to the trailing edge of the pole tip and may include a leading edge shield that magnetically connects two bottom ends of the graded side shield.

摘要翻译： 垂直磁记录（PMR）头被制造成具有通过分级侧屏蔽横向屏蔽的极尖，该平面侧屏蔽保护层在屏蔽的上部处与极尖的形状保持一致，但在下部不与极尖共形。 屏蔽件包括后挡板，其与电极尖端的后缘保持一致，并且可以包括磁性连接分级侧屏蔽件的两个底端的前缘屏蔽件。

公开(公告)号：US09520147B2

公开(公告)日：2016-12-13

申请号：US14581141

申请日：2014-12-23

申请人： Headway Technologies, Inc.

发明人： Yuchen Zhou ,  Kunliang Zhang ,  Zhigang Bai

IPC分类号： G11B5/39 ,  G11B5/11 ,  B82Y10/00 ,  B82Y25/00 ,  G01R33/09 ,  H01F10/30 ,  H01F10/32 ,  H01F41/30 ,  B82Y40/00 ,  H01L43/02 ,  H01L43/08

CPC分类号： G11B5/398 ,  B82Y10/00 ,  B82Y25/00 ,  B82Y40/00 ,  G01R33/093 ,  G01R33/098 ,  G11B5/3906 ,  G11B5/3909 ,  G11B5/3912 ,  G11B2005/3996 ,  H01F10/30 ,  H01F10/3259 ,  H01F10/3286 ,  H01F10/3295 ,  H01F41/307 ,  H01L43/02 ,  H01L43/08

摘要： A MR sensor is disclosed that has a free layer (FL) with perpendicular magnetic anisotropy (PMA) which eliminates the need for an adjacent hard bias structure to stabilize free layer magnetization and minimizes shield-FL interactions. In a TMR embodiment, a seed layer, free layer, junction layer, reference layer, and pinning layer are sequentially formed on a bottom shield. After patterning, a conformal insulation layer is formed along the sensor sidewall. Thereafter, a top shield is formed on the insulation layer and includes side shields that are separated from the FL by a narrow read gap. The sensor is scalable to widths

摘要翻译： 公开了具有垂直磁各向异性（PMA）的自由层（FL）的MR传感器，其不需要相邻的硬偏置结构来稳定自由层磁化并使屏蔽-FL相互作用最小化。 在TMR实施例中，种子层，自由层，结层，参考层和钉扎层依次形成在底部屏蔽上。 在图案化之后，沿传感器侧壁形成保形绝缘层。 此后，在绝缘层上形成顶部屏蔽，并且包括通过狭窄的读取间隙与FL分离的侧面屏蔽。 当PMA大于FL自扫描场时，传感器可缩放到宽度<50 nm。 有效偏置场对传感器纵横比相当不敏感，这使得高条纹和窄宽度传感器成为高RA TMR配置的可行方法。 传感器侧壁可以延伸到种子层或底部屏蔽中。

公开(公告)号：US20150029616A1

公开(公告)日：2015-01-29

申请号：US14484442

申请日：2014-09-12

申请人： Headway Technologies, Inc.

发明人： Zhigang Bai ,  Yan Wu ,  Moris Dovek ,  Cherng Chyi Han

IPC分类号： G11B5/60 ,  G11B5/11 ,  G11B5/127

CPC分类号： G11B5/6082 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/315 ,  G11B5/3163 ,  Y10T428/1171

摘要： A perpendicular magnetic recording (PMR) head is fabricated with a main pole shielded laterally by a pair of side shields, shielded above by a trailing shield and shielded optionally below by a leading shield. The shields and the seed layers on which they are formed are formed of materials having substantially the same physical characteristics including the same material composition, the same hardness, the same response to processes such as ion beam etching (IBE), chemical mechanical polishing (CMP), mechanical lapping, such as the slider ABS lapping, the same coefficient of thermal expansion (CTE) as well as the same Bs. Optionally, the trailing shield may be formed on a high Bs seed layer to provide the write head with improved down-track performance.

摘要翻译： 垂直磁记录（PMR）头被制造成具有由一对侧屏蔽横向屏蔽的主极，屏蔽在后面并由屏蔽罩屏蔽并且被前屏蔽罩屏蔽。 其形成的屏蔽层和种子层由具有相同物理特性的材料形成，包括相同的材料组成，相同的硬度，对离子束蚀刻（IBE），化学机械抛光（CMP） ），机械研磨，如滑块ABS研磨，相同的热膨胀系数（CTE）以及相同的Bs。 可选地，后屏蔽可以形成在高Bs种子层上，以向写头提供改进的下行轨迹性能。