公开(公告)号：US08216643B2

公开(公告)日：2012-07-10

申请号：US12160837

申请日：2007-05-21

申请人： Hee Young Kim ,  Kyung Koo Yoon ,  Yong Ki Park ,  Won Choon Choi ,  Sang Jin Moon

发明人： Hee Young Kim ,  Kyung Koo Yoon ,  Yong Ki Park ,  Won Choon Choi ,  Sang Jin Moon

IPC分类号： C23C16/24

CPC分类号： C23C16/4581 ,  C01B33/035 ,  C23C16/24 ,  Y10T428/2913

摘要： A method for preparing a polysilicon rod using a metallic core means, including: installing a core means in an inner space of a deposition reactor used for preparing a silicon rod, the core means being constituted by forming at least one separation layer on the surface of a metallic core element and being connected to an electrode means, heating the core means by supplying electricity through the electrode means, and supplying a reaction gas into the inner space for silicon deposition, thereby forming a deposition output in an outward direction on the surface of the core means. The deposition output and the core means can be separated easily from the silicon rod output obtained by the process of silicon deposition, and the contamination of the deposition output caused by impurities of the metallic core element can be minimized, thereby a high-purity silicon can be prepared more economically and conveniently.

摘要翻译： 一种使用金属芯装置制备多晶硅棒的方法，包括：将芯装置安装在用于制备硅棒的沉积反应器的内部空间中，所述芯装置通过在至少一个分离层的表面上形成 金属芯元件，与电极装置连接，通过电极装置供电来加热芯装置，并将反应气体供给到用于硅沉积的内部空间中，从而在表面上形成向外的沉积输出 核心手段。 沉积输出和芯装置可以容易地从通过硅沉积过程获得的硅棒输出分离，并且可以最小化由金属芯元件的杂质引起的沉积输出的污染，从而高纯度的硅可以 准备更经济，便捷。

公开(公告)号：US07923358B2

公开(公告)日：2011-04-12

申请号：US12603072

申请日：2009-10-21

申请人： Hee Young Kim ,  Kyung Koo Yoon ,  Yong Ki Park ,  Won Choon Choi ,  Sang Jin Moon

发明人： Hee Young Kim ,  Kyung Koo Yoon ,  Yong Ki Park ,  Won Choon Choi ,  Sang Jin Moon

IPC分类号： C23C16/24

CPC分类号： C23C16/4581 ,  C01B33/035 ,  C23C16/24 ,  Y10T428/2913

摘要： The present invention relates to a method for preparing a polysilicon rod using a metallic core means, comprising: installing a core means in an inner space of a deposition reactor used for preparing a silicon rod, wherein the core means is constituted by forming one or a plurality of separation layer(s) on the surface of a metallic core element and is connected to an electrode means; heating the core means by supplying electricity through the electrode means; and supplying a reaction gas into the inner space for silicon deposition, thereby forming a deposition output in an outward direction on the surface of the core means. According to the present invention, the deposition output and the core means can be separated easily from the silicon rod output obtained by the process of silicon deposition, and the contamination of the deposition output caused by impurities of the metallic core element can be minimized, thereby a high-purity silicon can be prepared in a more economic and convenient way.

摘要翻译： 本发明涉及一种使用金属芯装置制备多晶硅棒的方法，包括：在用于制备硅棒的沉积反应器的内部空间中安装芯装置，其中芯装置通过形成一个或一个 金属芯体表面上的多个分离层连接到电极装置; 通过电极装置供电来加热芯装置; 并将反应气体供给到用于硅沉积的内部空间中，从而在芯装置的表面上沿向外的方向形成沉积输出。 根据本发明，沉积输出和芯装置可以容易地从通过硅沉积过程获得的硅棒输出分离，并且可以最小化由金属芯元件的杂质引起的沉积输出的污染，由此 可以以更经济和便利的方式制备高纯度硅。

公开(公告)号：US20100041215A1

公开(公告)日：2010-02-18

申请号：US12603072

申请日：2009-10-21

申请人： Hee Young Kim ,  Kyung-Koo Yoon ,  Yong Ki Park ,  Won Choon Choi ,  Sang Jin Moon

发明人： Hee Young Kim ,  Kyung-Koo Yoon ,  Yong Ki Park ,  Won Choon Choi ,  Sang Jin Moon

IPC分类号： H01L21/20

CPC分类号： C23C16/4581 ,  C01B33/035 ,  C23C16/24 ,  Y10T428/2913

摘要： The present invention relates to a method for preparing a polysilicon rod using a metallic core means, comprising: installing a core means in an inner space of a deposition reactor used for preparing a silicon rod, wherein the core means is constituted by forming one or a plurality of separation layer(s) on the surface of a metallic core element and is connected to an electrode means; heating the core means by supplying electricity through the electrode means; and supplying a reaction gas into the inner space for silicon deposition, thereby forming a deposition output in an outward direction on the surface of the core means. According to the present invention, the deposition output and the core means can be separated easily from the silicon rod output obtained by the process of silicon deposition, and the contamination of the deposition output caused by impurities of the metallic core element can be minimized, thereby a high-purity silicon can be prepared in a more economic and convenient way.

摘要翻译： 本发明涉及一种使用金属芯装置制备多晶硅棒的方法，包括：在用于制备硅棒的沉积反应器的内部空间中安装芯装置，其中芯装置通过形成一个或一个 金属芯体表面上的多个分离层连接到电极装置; 通过电极装置供电来加热芯装置; 并将反应气体供给到用于硅沉积的内部空间中，从而在芯装置的表面上沿向外的方向形成沉积输出。 根据本发明，沉积输出和芯装置可以容易地从通过硅沉积过程获得的硅棒输出分离，并且可以最小化由金属芯元件的杂质引起的沉积输出的污染，由此 可以以更经济和便利的方式制备高纯度硅。

公开(公告)号：US08431032B2

公开(公告)日：2013-04-30

申请号：US12609330

申请日：2009-10-30

申请人： Hee Young Kim ,  Kyung Koo Yoon ,  Yong Ki Park ,  Won Choon Choi

发明人： Hee Young Kim ,  Kyung Koo Yoon ,  Yong Ki Park ,  Won Choon Choi

IPC分类号： B44C1/22

CPC分类号： C30B29/06 ,  B01J8/1809 ,  B01J8/1827 ,  B01J8/1836 ,  B01J8/24 ,  B01J8/34 ,  B01J19/02 ,  B01J2208/00398 ,  B01J2208/00407 ,  B01J2208/00415 ,  B01J2208/00495 ,  B01J2208/00539 ,  B01J2208/0084 ,  B01J2208/00991 ,  B01J2219/0209 ,  B01J2219/0218 ,  B01J2219/0236 ,  B01J2219/0254 ,  B01J2219/0272 ,  B01J2219/029 ,  C01B33/027 ,  C30B28/14

摘要： There is provided a method for continual preparation of granular polycrystalline silicon using a fluidized bed reactor, enabling a stable, long-term operation of the reactor by effective removal of silicon deposit accumulated on the inner wall of the reactor tube. The method comprises (i) a silicon particle preparation step, wherein silicon deposition occurs on the surface of the silicon particles, while silicon deposit is accumulated on the inner wall of the reactor tube encompassing the reaction zone; (ii) a silicon particle partial discharging step, wherein a part of the silicon particles remaining inside the reactor tube is discharged out of the fluidized bed reactor so that the height of the bed of the silicon particles does not exceed the height of the reaction gas outlet; and (iii) a silicon deposit removal step, wherein the silicon deposit is removed by supplying an etching gas into the reaction zone.

摘要翻译： 提供了一种使用流化床反应器连续制备颗粒状多晶硅的方法，通过有效去除积聚在反应器管内壁上的硅沉积物，能够稳定地长期运行反应器。 该方法包括：（i）硅颗粒制备步骤，其中在硅颗粒的表面上发生硅沉积，同时硅沉积物堆积在包围反应区的反应器管的内壁上; （ii）硅颗粒部分排出步骤，其中残留在反应器管内的硅颗粒的一部分从流化床反应器中排出，使得硅颗粒的床的高度不超过反应气体的高度 出口; 和（iii）硅沉积物去除步骤，其中通过向反应区域中提供蚀刻气体来除去硅沉积物。

公开(公告)号：US08114352B2

公开(公告)日：2012-02-14

申请号：US12609364

申请日：2009-10-30

申请人： Hee Young Kim ,  Kyung Koo Yoon ,  Yong Ki Park ,  Won Choon Choi

发明人： Hee Young Kim ,  Kyung Koo Yoon ,  Yong Ki Park ,  Won Choon Choi

IPC分类号： G05D16/00 ,  G05B1/00 ,  B01J19/00 ,  B01J8/18 ,  F27B15/00 ,  F27B15/08 ,  F27B15/14 ,  F27B15/16 ,  C01B33/02

CPC分类号： C01B33/027 ,  B01J3/046 ,  B01J8/1827 ,  B01J8/1836 ,  B01J2208/00398 ,  B01J2208/00407 ,  C01B33/029 ,  C01B33/03

摘要： The present invention relates to a high-pressure fluidized bed reactor for preparing granular polycrystalline silicon, comprising (a) a reactor tube, (b) a reactor shell encompassing the reactor tube, (c) an inner zone formed within the reactor tube, where a silicon particle bed is formed and silicon deposition occurs, and an outer zone formed in between the reactor shell and the reactor tube, which is maintained under the inert gas atmosphere, and (d) a controlling means to keep the difference between pressures in the inner zone and the outer zone being maintained within the range of 0 to 1 bar, thereby enabling to maintain physical stability of the reactor tube and efficiently prepare granular polycrystalline silicon even at relatively high reaction pressure.

摘要翻译： 本发明涉及一种用于制备颗粒状多晶硅的高压流化床反应器，包括（a）反应器管，（b）包围反应器管的反应器壳，（c）在反应器管内形成的内部区，其中 形成硅颗粒床并发生硅沉积，并且在反应器壳体和反应器管之间形成的外部区域保持在惰性气体气氛下，以及（d）控制装置，以保持在 内部区域和外部区域保持在0至1巴的范围内，从而能够保持反应管的物理稳定性，并且即使在相对高的反应压力下也能有效地制备颗粒状多晶硅。

公开(公告)号：US08821827B2

公开(公告)日：2014-09-02

申请号：US12609414

申请日：2009-10-30

申请人： Hee Young Kim ,  Kyung Koo Yoon ,  Yong Ki Park ,  Won Choon Choi

发明人： Hee Young Kim ,  Kyung Koo Yoon ,  Yong Ki Park ,  Won Choon Choi

IPC分类号： C01B33/021 ,  B01J8/24

CPC分类号： C01B33/027 ,  C23C16/24 ,  C23C16/4401 ,  C23C16/442

摘要： An apparatus for preparing granular polysilicon comprises a reactor tube, a reactor shell, an internal heater, and components for controlling pressure, supplying a fluidizing gas and a reaction gas, discharging gas, and discharging particles. The reactor tube is associated with an inner space comprising an inner zone that contains a bed of silicon particles and is the site at which silicon deposition occurs. The inner zone comprises a heating zone and a reaction zone. The fluidizing gas supplying component supplies a fluidizing gas for fluidizing the bed of silicon particles to a bottom of the heating zone. The apparatus can minimize the problems occurring during the heating of silicon particles at high temperature for silicon deposition on the surface of the silicon particles.

摘要翻译： 制备颗粒状多晶硅的装置包括反应器管，反应器壳，内部加热器和用于控制压力的部件，供应流化气体和反应气体，排出气体和排出颗粒。 反应器管与包含含有硅颗粒床的内部区域的内部空间相关联，并且是发生硅沉积的位置。 内部区域包括加热区域和反应区域。 流化气体供应部件提供用于使硅颗粒床流化到加热区的底部的流化气体。 该装置可以最大限度地减少硅粒子在高温下加热硅沉积在硅颗粒表面上的问题。

公开(公告)号：US08430959B2

公开(公告)日：2013-04-30

申请号：US12160241

申请日：2007-05-11

申请人： Hee Young Kim ,  Kyung Koo Yoon ,  Yong Ki Park ,  Won Choon Choi ,  Won Wook So

发明人： Hee Young Kim ,  Kyung Koo Yoon ,  Yong Ki Park ,  Won Choon Choi ,  Won Wook So

IPC分类号： C30B25/02

CPC分类号： C01B33/035 ,  Y10T117/10 ,  Y10T117/1004

摘要： Disclosed are a method and an apparatus for preparing a polycrystalline silicon rod using a mixed core means, comprising: installing a first core means made of a resistive material together with a second core means made of silicon material in an inner space of a deposition reactor; electrically heating the first core means and pre-heating the second core by the first core means which is electrically heated; electrically heating the preheated second core means; and supplying a reaction gas into the inner space in a state where the first core means and the second core means are electrically heated for silicon deposition.

摘要翻译： 公开了一种使用混合芯装置制备多晶硅棒的方法和装置，包括：在沉积反应器的内部空间中安装由电阻材料制成的第一芯装置和由硅材料制成的第二芯装置; 电加热第一芯装置并且通过电加热的第一芯装置预加热第二芯; 电加热预热的第二芯装置; 以及在第一芯装置和第二芯装置被电加热以进行硅沉积的状态下将反应气体供应到内部空间中。

公开(公告)号：US07771687B2

公开(公告)日：2010-08-10

申请号：US12160145

申请日：2007-02-14

申请人： Hee Young Kim ,  Kyung Koo Yoon ,  Yong Ki Park ,  Won Choon Choi

发明人： Hee Young Kim ,  Kyung Koo Yoon ,  Yong Ki Park ,  Won Choon Choi

IPC分类号： B01J8/18 ,  B01J8/42 ,  B01J9/12 ,  C01B33/02 ,  C01B33/21 ,  C01B33/27

CPC分类号： C01B33/027 ,  C01B33/029 ,  C01B33/03

摘要： The present invention relates to a method for mass preparation of granular polycrystalline silicon in a fluidized bed reactor, comprising (a) a reactor tube, (b) a reactor shell encompassing the reactor tube, (c) an inner zone formed within the reactor tube, where a silicon particle bed is formed and silicon deposition occurs, and an outer zone formed in between the reactor shell and the reactor tube, which is maintained under an inert gas atmosphere, and (d) a controlling means to keep the pressure difference between the inner zone and the outer zone being maintained within the range of 0 to 1 bar, thereby capable of maintaining physical stability of the reactor tube and efficiently preparing granular polycrystalline silicon even at a relatively high reaction pressure.

摘要翻译： 本发明涉及一种在流化床反应器中大量制备颗粒状多晶硅的方法，包括（a）反应器管，（b）包围反应器管的反应器壳，（c）在反应器管内形成的内部区 ，其中形成硅颗粒床并发生硅沉积，以及形成在反应器壳和反应器管之间的外部区域，其保持在惰性气体气氛下，以及（d）控制装置，以保持压力差之间的压力差 内部区域和外部区域保持在0至1巴的范围内，从而能够维持反应器管的物理稳定性，并且即使在相对高的反应压力下也能有效地制备颗粒状多晶硅。

公开(公告)号：US20100221454A1

公开(公告)日：2010-09-02

申请号：US12160837

申请日：2007-05-21

申请人： Hee Young Kim ,  Kyung Koo Yoon ,  Young Ki Park ,  Won Choon Choi ,  Sang Jin Moon

发明人： Hee Young Kim ,  Kyung Koo Yoon ,  Young Ki Park ,  Won Choon Choi ,  Sang Jin Moon

IPC分类号： C23C16/24 ,  C23C16/46

CPC分类号： C23C16/4581 ,  C01B33/035 ,  C23C16/24 ,  Y10T428/2913

摘要： The present invention relates to a method for preparing a polysilicon rod using a metallic core means, comprising: installing a core means in an inner space of a deposition reactor used for preparing a silicon rod, wherein the core means (C) is constituted by forming one or a plurality of separation layer(s) on the surface of a metallic core element and is connected to an electrode means (E), heating the core means (C) by supplying electricity through the electrode means (E), and supplying a reaction gas (Gf) into the inner space (Ri) for silicon deposition, thereby forming a deposition output in an outward direction on the surface of the core means (C). According to the present invention, the deposition output (D) and the core means (C) can be separated easily from the silicon rod output obtained by the process of silicon deposition, and the contamination of the deposition output caused by impurities of the metallic core element (Ca) can be minimized, thereby a high-purity silicon can be prepared in a more economic and convenient way.

摘要翻译： 本发明涉及一种使用金属芯装置制备多晶硅棒的方法，包括：在用于制备硅棒的沉积反应器的内部空间中安装芯装置，其中芯装置（C）由成形 金属芯体表面上的一个或多个分离层，并连接到电极装置（E），通过电极装置（E）供电来加热芯装置（C），并且将 反应气体（Gf）进入用于硅沉积的内部空间（Ri）中，从而在芯装置（C）的表面上沿向外的方向形成沉积输出。 根据本发明，沉积输出（D）和芯装置（C）可以容易地从通过硅沉积过程获得的硅棒输出分离，并且由金属芯的杂质引起的沉积输出的污染 元素（Ca）可以最小化，从而可以以更经济和方便的方式制备高纯度硅。

公开(公告)号：US08747757B2

公开(公告)日：2014-06-10

申请号：US12282604

申请日：2007-08-09

申请人： Hee Young Kim ,  Kyung Koo Yoon ,  Yong Ki Park ,  Won Choon Choi

发明人： Hee Young Kim ,  Kyung Koo Yoon ,  Yong Ki Park ,  Won Choon Choi

IPC分类号： C01B33/021 ,  B01J8/24

CPC分类号： C01B33/027 ,  C23C16/24 ,  C23C16/4401 ,  C23C16/442

摘要： A process for preparing granular polysilicon using a fluidized bed reactor is disclosed. Upper and lower spaces of the bed are the reaction zone and heating zone, respectively, wherein the height of the reaction gas outlet is the reference height. Reactor productivity is maximized by sufficiently providing the heat required and stably maintaining the reaction temperature in the reaction zone, without impairing the mechanical stability of the fluidized bed reactor. This is achieved through electrical resistance heating in the heating zone where an internal heater is installed between the reaction gas supplying means and the inner wall of the reactor tube, thereby heating the fluidizing gas and the silicon particles in the heating zone. The heat generated is transferred to the reaction zone by supplying the fluidizing gas at a rate silicon particles can be intermixed between the reaction zone and the heating zone in a continuous, fluidized state.

摘要翻译： 公开了一种使用流化床反应器制备颗粒状多晶硅的方法。 床的上部和下部空间分别是反应区和加热区，其中反应气体出口的高度是参考高度。 通过充分提供所需的热量并稳定地维持反应区中的反应温度，而不损害流化床反应器的机械稳定性，使反应器生产率最大化。 这通过在反应气体供给装置和反应器管的内壁之间安装有内部加热器的加热区域中的电阻加热来实现，从而加热流化气体和加热区域中的硅颗粒。 通过以一定速率供应流化气体将产生的热量转移到反应区，硅颗粒可以在连续的流化状态下混合在反应区和加热区之间。