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25 条记录 (耗时 0.022 秒)

    Method and apparatus for lifting off photoresist beneath an overlayer
    5.
    发明授权
    Method and apparatus for lifting off photoresist beneath an overlayer 有权
    用于剥离覆盖层下面的光致抗蚀剂的方法和装置

    公开(公告)号：US08163185B1

    公开(公告)日：2012-04-24

    申请号：US12059903

    申请日：2008-03-31

    申请人： Hai Sun ,  Liubo Hong ,  Rowena Schmidt ,  Lijie Zhao ,  Winnie Yu ,  Hongping Yuan

    发明人： Hai Sun ,  Liubo Hong ,  Rowena Schmidt ,  Lijie Zhao ,  Winnie Yu ,  Hongping Yuan

    IPC分类号： B44C1/22

    CPC分类号： G11B5/3163 ,  Y10T29/49032

    摘要： A method of lifting off photoresist beneath an overlayer includes providing a structure including photoresist and depositing an overlayer impenetrable to a liftoff solution over the photoresist and a field region around the structure. The method also includes forming a mask over the structure and ion milling to remove the overlayer in the field region not covered by the mask. The method then includes lifting off the photoresist using the liftoff solution.

    摘要翻译： 提供覆盖层下面的光致抗蚀剂的方法包括提供包括光致抗蚀剂的结构，以及沉积在光致抗蚀剂上的不透气的覆盖层和围绕结构的场区域的覆盖层。 该方法还包括在结构上形成掩模和离子研磨以去除未被掩模覆盖的场区域中的覆盖层。 该方法然后包括使用提升溶液提取光致抗蚀剂。

    Damascene coil processes and structures
    6.
    发明申请
    Damascene coil processes and structures 审中-公开
    大马士革线圈工艺和结构

    公开(公告)号：US20100290157A1

    公开(公告)日：2010-11-18

    申请号：US12466353

    申请日：2009-05-14

    申请人： Jinqiu Zhang ,  Hongping Yuan ,  Hai Sun ,  Ming Zhao

    发明人： Jinqiu Zhang ,  Hongping Yuan ,  Hai Sun ,  Ming Zhao

    IPC分类号： G11B5/17 ,  B05D3/00 ,  B44C1/22 ,  C25D5/34

    CPC分类号： G11B5/3123 ,  C25D7/123 ,  G11B5/17

    摘要： A magnetic recording head is provided. The magnetic recording head comprises a write pole and a write coil structure configured to generate a magnetic field in the write pole. The write coil structure comprises a substrate layer and a coil material disposed within the substrate layer. The write coil structure is substantially free of photoresist. A method for forming a write coil structure is also provided. The method comprises the steps of providing a substrate layer, forming a photoresist pattern mask over the substrate layer, opening a damascene trench in the substrate layer by reactive ion etching, and disposing a coil material into the damascene trench in the substrate layer.

    摘要翻译： 提供磁记录头。 磁记录头包括写极和写线圈结构，其被配置为在写极中产生磁场。 写入线圈结构包括衬底层和设置在衬底层内的线圈材料。 写入线圈结构基本上不含光致抗蚀剂。 还提供了一种用于形成写入线圈结构的方法。 该方法包括以下步骤：提供衬底层，在衬底层上形成光致抗蚀剂图案掩模，通过反应离子蚀刻在衬底层中打开镶嵌沟槽，以及将线圈材料设置在衬底层中的镶嵌沟槽中。

    Perpendicular magnetic recording head
    7.
    发明授权
    Perpendicular magnetic recording head 有权
    垂直磁记录头

    公开(公告)号：US08284517B1

    公开(公告)日：2012-10-09

    申请号：US13372775

    申请日：2012-02-14

    申请人： Hai Sun ,  Jinqiu Zhang ,  Hongping Yuan ,  Donghong Li ,  Liubo Hong ,  Yong Shen

    发明人： Hai Sun ,  Jinqiu Zhang ,  Hongping Yuan ,  Donghong Li ,  Liubo Hong ,  Yong Shen

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49041

    摘要： A perpendicular magnetic recording (PMR) head comprises a PMR pole having at least one side, a bottom, and a top wider than the bottom, a first portion of the at least one side being substantially vertical, a second portion of the at least one side being nonvertical, the top portion having a width not greater than one hundred fifty nanometers. The PMR head further comprises a nonmagnetic layer surrounding the bottom and the at least one side of the PMR pole, an intermediate layer substantially surrounding at least the second portion of the at least one side of the PMR pole, and a planarization stop layer adjacent to the first portion of the at least one side of the PMR pole.

    摘要翻译： 垂直磁记录（PMR）头包括具有至少一个侧面，底部和顶部宽于底部的PMR极，所述至少一个侧面的第一部分基本上垂直，所述至少一个的第二部分 侧面是非垂直的，顶部具有不大于一百五十纳米的宽度。 PMR头还包括围绕PMR极的底部和至少一侧的非磁性层，基本上围绕PMR极的至少一个侧面的至少第二部分的中间层和与PMR极的相邻的平坦化停止层 PMR极点的至少一侧的第一部分。

    Method and system for providing a perpendicular magnetic recording head utilizing a mask having an undercut line
    8.
    发明授权
    Method and system for providing a perpendicular magnetic recording head utilizing a mask having an undercut line 有权
    用于使用具有底切线的掩模来提供垂直磁记录头的方法和系统

    公开(公告)号：US08136224B1

    公开(公告)日：2012-03-20

    申请号：US12121540

    申请日：2008-05-15

    申请人： Hai Sun ,  Jinqiu Zhang ,  Hongping Yuan ,  Donghong Li ,  Liubo Hong ,  Yong Shen

    发明人： Hai Sun ,  Jinqiu Zhang ,  Hongping Yuan ,  Donghong Li ,  Liubo Hong ,  Yong Shen

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49041

    摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask including a line on the intermediate layer. The line has at least one side, a top, and a bottom. The side(s) have an undercut such that the top of the line is wider than the bottom. The method further include providing a hard mask on the PMR transducer. The hard mask includes an aperture corresponding to the line. Thus, an aperture in the hard mask corresponding to the line is provided. The method and system also include forming a trench in the intermediate layer under the aperture. The trench has a bottom and a top wider than the bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.

    摘要翻译： 公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。 该方法和系统包括在中间层上提供包括线的掩模。 该线至少有一边，顶部和底部。 侧面具有底切，使得线的顶部比底部更宽。 该方法还包括在PMR传感器上提供硬掩模。 硬掩模包括对应于该线的孔。 因此，提供了对应于该线的硬掩模中的孔。 该方法和系统还包括在孔下方的中间层中形成沟槽。 沟槽的底部和顶部宽于底部。 该方法还包括提供PMR极，其至少一部分位于沟槽中。

    Method and system for providing a magnetic writer using a BARC
    9.
    发明授权
    Method and system for providing a magnetic writer using a BARC 有权
    使用BARC提供磁性写入器的方法和系统

    公开(公告)号：US08072705B1

    公开(公告)日：2011-12-06

    申请号：US11803071

    申请日：2007-05-11

    申请人： Yizhong Wang ,  Hong Zhang ,  Hai Sun ,  Hongping Yuan ,  Winnie Yu

    发明人： Yizhong Wang ,  Hong Zhang ,  Hai Sun ,  Hongping Yuan ,  Winnie Yu

    IPC分类号： G11B5/147

    CPC分类号： G11B5/1278 ,  G11B5/3133 ,  G11B5/3163

    摘要： A method and system for providing a magnetic writer are described. The method and system include providing a bottom antireflective coating (BARC) on a portion of the magnetic writer. The BARC has a low reflectivity. The method and system also include providing a barrier layer on at least a portion of the BAR and providing a mask on at least a portion of the barrier layer. The barrier layer isolates the BARC from the mask.

    摘要翻译： 描述了一种用于提供磁性写入器的方法和系统。 该方法和系统包括在磁性写入器的一部分上提供底部抗反射涂层（BARC）。 BARC具有低反射率。 所述方法和系统还包括在所述BAR的至少一部分上提供阻挡层并在所述阻挡层的至少一部分上提供掩模。 阻挡层将BARC与掩模隔离。