公开(公告)号：US5298975A

公开(公告)日：1994-03-29

申请号：US767300

申请日：1991-09-27

申请人： Henri A. Khoury ,  Calvin K. Chi ,  Joachim G. Clabes ,  Philip C. D. Hobbs ,  Laszlo Landstein ,  Martin P. O'Boyle ,  Hemantha K. Wickramasinghe ,  Sandra K. Wolterman

发明人： Henri A. Khoury ,  Calvin K. Chi ,  Joachim G. Clabes ,  Philip C. D. Hobbs ,  Laszlo Landstein ,  Martin P. O'Boyle ,  Hemantha K. Wickramasinghe ,  Sandra K. Wolterman

IPC分类号： G01B7/34 ,  G01B7/00 ,  G01B11/00 ,  G01B11/02 ,  G01B11/30 ,  G01B21/02 ,  G01B21/30 ,  G01M11/00 ,  G01N37/00 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/02 ,  G01Q60/24 ,  G03F7/20 ,  G01B11/04

CPC分类号： G03F7/70633 ,  B82Y35/00 ,  G01B11/02 ,  G01Q20/02 ,  G01Q30/025 ,  Y10S977/87

摘要： An integrated scanning force microprobe and optical microscopy metrology system is disclosed, that measures the depth and width of a trench in a sample. The probe remains fixed while the sample is moved relative to the probe. The system detects the proximity of the probe to a sample and to the side walls of the trench, providing output signals indicating the vertical and transverse relationship of the probe to the sample. The system adjusts the relative position of the sample vertically and transversely as a function of the output signals. Variety of probes can be used with this system to detect the depth and width of the trench. The probe should have at least one protuberance extending down to sense the bottom of the trench. The tip of the probe can have Lateral protuberances that can extend in opposite directions (across the width of the trench) from the probe to detect the side walls of the trench. Forces on the protuberances are measured to determine the depth and the location of the side walls of the trench.

摘要翻译： 公开了一种集成的扫描力微探针和光学显微术测量系统，其测量样品中的沟槽的深度和宽度。 当样品相对于探针移动时，探针保持固定。 系统检测探头与样品和沟槽侧壁的接近度，提供指示探针与样品的垂直和横向关系的输出信号。 该系统根据输出信号垂直和横向地调整样本的相对位置。 该系统可以使用各种探头来检测沟槽的深度和宽度。 探针应具有向下延伸的至少一个突起以感测沟槽的底部。 探针的尖端可以具有横向突起，其可以从探针沿相反方向（跨越沟槽的宽度）延伸以检测沟槽的侧壁。 测量突起上的力以确定沟槽的侧壁的深度和位置。