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公开(公告)号：US5298975A
公开(公告)日：1994-03-29
申请号：US767300
申请日：1991-09-27
申请人： Henri A. Khoury , Calvin K. Chi , Joachim G. Clabes , Philip C. D. Hobbs , Laszlo Landstein , Martin P. O'Boyle , Hemantha K. Wickramasinghe , Sandra K. Wolterman
发明人： Henri A. Khoury , Calvin K. Chi , Joachim G. Clabes , Philip C. D. Hobbs , Laszlo Landstein , Martin P. O'Boyle , Hemantha K. Wickramasinghe , Sandra K. Wolterman
IPC分类号： G01B7/34 , G01B7/00 , G01B11/00 , G01B11/02 , G01B11/30 , G01B21/02 , G01B21/30 , G01M11/00 , G01N37/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q60/24 , G03F7/20 , G01B11/04
CPC分类号： G03F7/70633 , B82Y35/00 , G01B11/02 , G01Q20/02 , G01Q30/025 , Y10S977/87
摘要： An integrated scanning force microprobe and optical microscopy metrology system is disclosed, that measures the depth and width of a trench in a sample. The probe remains fixed while the sample is moved relative to the probe. The system detects the proximity of the probe to a sample and to the side walls of the trench, providing output signals indicating the vertical and transverse relationship of the probe to the sample. The system adjusts the relative position of the sample vertically and transversely as a function of the output signals. Variety of probes can be used with this system to detect the depth and width of the trench. The probe should have at least one protuberance extending down to sense the bottom of the trench. The tip of the probe can have Lateral protuberances that can extend in opposite directions (across the width of the trench) from the probe to detect the side walls of the trench. Forces on the protuberances are measured to determine the depth and the location of the side walls of the trench.
摘要翻译： 公开了一种集成的扫描力微探针和光学显微术测量系统，其测量样品中的沟槽的深度和宽度。 当样品相对于探针移动时，探针保持固定。 系统检测探头与样品和沟槽侧壁的接近度，提供指示探针与样品的垂直和横向关系的输出信号。 该系统根据输出信号垂直和横向地调整样本的相对位置。 该系统可以使用各种探头来检测沟槽的深度和宽度。 探针应具有向下延伸的至少一个突起以感测沟槽的底部。 探针的尖端可以具有横向突起，其可以从探针沿相反方向（跨越沟槽的宽度）延伸以检测沟槽的侧壁。 测量突起上的力以确定沟槽的侧壁的深度和位置。
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2.发明授权
公开(公告)号：US5208648A
公开(公告)日：1993-05-04
申请号：US667773
申请日：1991-03-11
IPC分类号： G01N21/88 , G01J3/42 , G01J3/44 , G01J9/02 , G01N21/35 , G01N21/95 , G01N21/956 , G01Q30/02 , G02B3/00 , G02B21/00 , G02B27/00 , H01L21/66
CPC分类号： G01N21/9505 , G02B21/0016 , G02B3/00 , G01J2003/421 , G01J2009/0207 , G01J3/44 , G01N2021/1725 , G01N2021/1782 , G01N2021/8822 , G01N21/3563 , G01N21/359 , G01N2201/0638 , G01N2201/1087
摘要： Apparatus and a method for performing high resolution optical imaging in the near infrared of internal features of semiconductor wafers uses an optical device made from a material having a high index of refraction and held in very close proximity to the wafer. The optical device may either be a prism or a plano-convex lens. The plano-convex lens may be held in contact with the wafer or separated from the wafer via an air bearing or an optical coupling fluid to allow the sample to be navigated beneath the lens. The lens may be used in a number of optical instruments such as a bright field microscope, a Schlieren microscope, a dark field microscope, a Linnik interferometer, a Raman spectroscope and an absorption spectroscope.
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3.发明授权System and method for automatic thresholding of signals in the presence of Gaussian noise 失效在存在高斯噪声的情况下自动阈值信号的系统和方法
公开(公告)号：US5204631A
公开(公告)日：1993-04-20
申请号：US703072
申请日：1991-05-20
申请人： Philip C. D. Hobbs
发明人： Philip C. D. Hobbs
IPC分类号： G01R19/165 , G01T1/17 , G08B21/18
CPC分类号： G08B21/182
摘要： A system and method for detecting information signals by automatically thresholding input signals in the presence of noise of accurately known statistics concerning a predetermined acceptable false alarm rate data. A first subcircuit including a comparator and a servo amplifier is used for setting and adjusting a threshold value signal based on the input signal and the statistics concerning a predetermined acceptable false alarm rate. A second comparator is used for comparing the threshold value signal to the input signal, and outputting a signal corresponding to the difference therebetween.
摘要翻译： 一种用于在存在关于预定的可接受的错误报警率数据的精确已知统计数据的噪声的情况下自动阈值输入信号来检测信息信号的系统和方法。 使用包括比较器和伺服放大器的第一分支电路，用于基于输入信号和关于预定的可接受的误报率的统计来设置和调整阈值信号。 第二比较器用于将阈值信号与输入信号进行比较，并输出对应于它们之间的差值的信号。
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公开(公告)号：US5133602A
公开(公告)日：1992-07-28
申请号：US682752
申请日：1991-04-08
CPC分类号： G01N15/0205 , G01N2015/0238 , G01N2021/1759 , G01N2021/4792
摘要： A bright-field, particle position determining optical system is disclosed that uses both phase shift and extinction signals to determine particle trajectories. In a first embodiment, a pair of orthogonally polarized beams are positioned along an axis that intersects a particle's flow path at an acute angle. An optical system recombines the beams after they exit the flow path, the combined beams manifesting an elliptical polarization if a particle intersects one of the beams. Bright field detectors detect polarization components of the combined beam, provide a phase shift signal between the beam's orthogonal components and provide corresponding signals to a processor. The processor determines a signal asymmetry from the phase shift signal that is indicative of a particle's position in the flow path. Another embodiment of the invention examines a signal resulting from the beam's phase shift and determines a correction factor that is dependent upon the distance of the particle from the focal plane of the beams. Another embodiment employs a dithering system for cyclically moving one or more optical beams across a particle to further enable its trajectory or position to be determined.
摘要翻译： 公开了使用相移和消光信号来确定粒子轨迹的明场，粒子位置确定光学系统。 在第一实施例中，一对正交偏振光束沿着与颗粒的流动通道以锐角相交的轴线定位。 光束在离开流路之后将光束重新组合，如果粒子与光束之一相交，那么组合光束表现出椭圆极化。 光场检测器检测组合光束的偏振分量，在光束的正交分量之间提供相移信号，并向处理器提供相应的信号。 处理器确定来自指示颗粒在流动路径中的位置的相移信号的信号不对称性。 本发明的另一个实施例检查由光束的相移产生的信号，并确定取决于粒子与光束的焦平面的距离的校正因子。 另一个实施例采用抖动系统来循环移动一个或多个光束穿过颗粒，以进一步确定其轨迹或位置。
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公开(公告)号：US07889992B1
公开(公告)日：2011-02-15
申请号：US12563183
申请日：2009-09-21
IPC分类号： H04B10/16
CPC分类号： G06N99/002 , B82Y10/00
摘要： A hybrid superconductor-optical quantum repeater is provided. The hybrid superconductor-optical quantum repeater comprises an optical subsystem configured to receive an optical signal via an optical channel and a superconductor subsystem coupled to the optical subsystem. The optical subsystem and superconductor subsystem are coupled to one another via a microwave transmission medium. The optical subsystem is configured to receive an optical signal via the optical channel and down-convert a photon of the optical signal to a microwave photon in a microwave output signal that is output to the superconductor subsystem via the microwave transmission medium. The superconductor subsystem stores a quantum state of the microwave photon and transmits the microwave photon along an output channel from the superconductor subsystem.
摘要翻译： 提供了一种混合超导体光量子中继器。 混合超导体光量子转发器包括被配置为经由光学信道接收光学信号的光学子系统和耦合到光学子系统的超导体子系统。 光学子系统和超导体子系统通过微波传输介质相互耦合。 光学子系统经配置以通过光通道接收光信号，并将微信号的光信号经微波传输介质输出到超导体子系统的微波输出信号中，将光信号下转换成微波光子。 超导体子系统存储微波光子的量子态，并从超导体子系统沿着输出通道传输微波光子。
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公开(公告)号：US07412134B2
公开(公告)日：2008-08-12
申请号：US11540268
申请日：2006-09-30
IPC分类号： G02B6/34
CPC分类号： G02B6/2821 , G02B6/02 , G02B6/02033 , G02B6/03622 , G02B6/283 , G02B6/29316 , G02B6/421 , G02B6/4249
摘要： A single-mode optical waveguide with a core, surrounded by a cladding consisting of an inner soft layer and an outer harder layer is described. The outer layer has a grating structure on its inner surface, whose spatial frequency is the same as that of the guided mode. The thickness of the inner cladding is sufficient to keep the grating outside the mode field in undeformed regions of the waveguide, so that normally no out-coupling of the light results. Connections are made by crossing two such waveguides at an angle and pressing them together. This results in deformation of the two waveguides such that the gratings are brought into proximity with the cores. Light is coupled out of one waveguide and into the other in the deformed region, resulting in a self-aligning optical connection. The out-coupled light propagates normal to the waveguide axis, so errors in the crossing angle cause little change in efficiency. Because the cladding system is sufficiently resilient to recover after deformation, the connection is remakeable.
摘要翻译： 描述了具有由包含内软层和外硬层的覆层围绕的芯的单模光波导。 外层在其内表面具有光栅结构，其空间频率与导向模式相同。 内包层的厚度足以将光栅保持在波导的未变形区域中的模场外，使得通常不会导致光的外耦合。 通过将两个这样的波导以一定角度交叉并将它们压在一起而形成连接。 这导致两个波导的变形，使得光栅与芯接近。 光从一个波导耦合到变形区域中的另一个，导致自对准光学连接。 输出耦合光垂直于波导轴传播，因此交叉角的误差几乎不会导致效率的变化。 因为包层系统具有足够的弹性以在变形后恢复，所以连接是可重新制造的。
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公开(公告)号：US5638176A
公开(公告)日：1997-06-10
申请号：US670046
申请日：1996-06-25
CPC分类号： G01B11/26 , A61B3/113 , G02B27/0093 , G06K9/00604
摘要： An inexpensive eye tracking system requires no head gear. The eye tracking system uses the interference fringes between the corneal glint and the "red eye" retinal reflection to obtain an angularly resolved, background-immune eye point signal for use as a pointing device for personal computers. Tunable (eye safe) diode laser spectroscopy is used to measure the period and amplitude of the Fabry-Perot fringes caused by the interference between the corneal glint and the "red" reflection form the retina.
摘要翻译： 廉价的眼睛跟踪系统不需要头档。 眼睛跟踪系统使用角膜闪烁和“红眼”视网膜反射之间的干涉条纹，以获得用于个人计算机的定点装置的角度分辨的背景免疫眼点信号。 可调谐（眼睛安全）二极管激光光谱仪用于测量由角膜闪烁和视网膜“红色”反射之间的干涉引起的法布里 - 珀罗条纹的周期和幅度。
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8.发明授权Noise cancelling circuitry for optical systems with signal dividing and combining means 失效噪声消除电路与信号分配和组合方式的光学系统
公开(公告)号：US5134276A
公开(公告)日：1992-07-28
申请号：US594178
申请日：1990-10-09
申请人： Philip C. D. Hobbs
发明人： Philip C. D. Hobbs
CPC分类号： G01J1/16 , G01S7/493 , H01S3/1303
摘要： A noise suppression system is described for use with a laser measurement system in which a beam sampler divides the laser beam into a signal beam and a sample beam. The signal beam is passed through an optical system before being received at the detector while the sample beam is received directly at the detector. The beam sampler is selected such that the received sample beam has a slightly greater steady-state intensity than the received signal beam. The detector circuitry includes two linear wideband photodetectors which produce respective signal and sample currents of opposite polarity. The sample photocurrent is subdivided into two component currents, one of which has substantially the same direct current (DC) value as the signal photocurrent. This component is combined with the signal photocurrent to cancel undesirable noise components in the original laser beam. In a second embodiment of the invention, the dividing circuitry is controlled in a feedback loop to keep the DC portion of the output current at zero.
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公开(公告)号：US06259712B1
公开(公告)日：2001-07-10
申请号：US09164881
申请日：1998-10-01
IPC分类号： H01S313
CPC分类号： H01S5/0687
摘要： An interferometric method for providing stability of a laser is enabled by way of utilization of a novel optical interferometric measurement apparatus. The method can enable locking of a laser to a cavity in a bandwidth limited only by propagation delays in the cavity and the tuning behavior of the laser.
摘要翻译： 用于提供激光器稳定性的干涉测量方法通过利用新颖的光学干涉测量装置来实现。 该方法可以使激光器在仅由腔内的传播延迟和激光器的调谐行为限制的带宽内锁定到空腔。
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10.发明授权Method for controlling a line dimension arising in photolithographic processes 失效用于控制光刻工艺中出现的线尺寸的方法
公开(公告)号：US5516608A
公开(公告)日：1996-05-14
申请号：US203212
申请日：1994-02-28
申请人： Philip C. D. Hobbs , Steven Holmes , Robert Jackson , Jerry C. Shaw , John L. Sturtevant , Theodore G. van Kessel
发明人： Philip C. D. Hobbs , Steven Holmes , Robert Jackson , Jerry C. Shaw , John L. Sturtevant , Theodore G. van Kessel
IPC分类号： G03F7/20 , H01L21/027 , G03C5/00 , G01B9/02 , G01B11/02
CPC分类号： G03F7/70558 , G03F7/70675
摘要： In a photolithographic process utilizing a wafer coated with a chemically amplified photoresist, a method for controlling a line dimension. The method comprises the steps of measuring at at least two times, and from at least two angles, evolving signals comprising intensities of light diffracted from a portion of an exposed patterned area on the waver, the evolving signals corresponding to vector combinations of time dependent light diffracted from the pattern appearing in the photoresist; and substantially time invariant light diffracted due to any underlying pattern beneath the photoresist; and, combining the measurements mathematically for extracting a contribution due to the pattern evolving in the photoresist.
摘要翻译： 在利用涂覆有化学放大光致抗蚀剂的晶片的光刻工艺中，用于控制线尺寸的方法。 该方法包括以下步骤：至少测量两次，并且从至少两个角度测量包括从所述摇摆器上的暴露图案化区域的一部分衍射的光的强度的演变信号，所述演变信号对应于时间相关光的矢量组合 从出现在光致抗蚀剂中的图案衍射; 并且基本上时间不变的光由于光致抗蚀剂下方的任何底层图案衍射; 并且在数学上组合用于提取由于在光致抗蚀剂中演变的图案的贡献的测量。
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