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93 条记录 (耗时 0.036 秒)

    Projecting type charged particle microscope and projecting type substrate inspection system
    1.
    发明授权
    Projecting type charged particle microscope and projecting type substrate inspection system 有权
    投影式带电粒子显微镜和突出型基片检查系统

    公开(公告)号：US06310341B1

    公开(公告)日：2001-10-30

    申请号：US09253456

    申请日：1999-02-22

    申请人： Hideo Todokoro ,  Tohru Ishitani ,  Yasutsugu Usami ,  Shunroku Taya ,  Hiroyuki Shinada ,  Taku Ninomiya ,  Tsuyoshi Ohnishi

    发明人： Hideo Todokoro ,  Tohru Ishitani ,  Yasutsugu Usami ,  Shunroku Taya ,  Hiroyuki Shinada ,  Taku Ninomiya ,  Tsuyoshi Ohnishi

    IPC分类号： H01J4944

    CPC分类号： H01J37/28 ,  H01J37/05

    摘要： An irradiation electron beam emitted from an electron gun is deflected by an energy filter, and passes through a first projective lens and an objective lens, and then irradiated onto a sample to produce secondary electrons. The secondary electron beam accelerated by a negative voltage applied to the sample passes through the objective lens and the first projective lens, and deflected by the energy filter to be energy dispersed. Only the secondary electrons having a specified energy pass through energy selecting aperture, and further pass through a second projective lens to form a projected image of the secondary electrons on an imager. Such an electron-optical system may be used for dimension evaluation or inspection of semiconductor substrates.

    摘要翻译： 从电子枪发射的照射电子束被能量过滤器偏转，并通过第一投射透镜和物镜，然后照射到样品上以产生二次电子。 施加到样品的负电压加速的二次电子束通过物镜和第一投射透镜，并被能量过滤器偏转以进行能量分散。 只有具有指定能量的二次电子通过能量选择孔，并且进一步通过第二投影透镜以在成像器上形成二次电子的投影图像。 这样的电子 - 光学系统可以用于半导体衬底的尺寸评估或检查。

    Image evaluation method and microscope
    9.
    发明授权
    Image evaluation method and microscope 失效
    图像评估方法和显微镜

    公开(公告)号：US07236651B2

    公开(公告)日：2007-06-26

    申请号：US10219765

    申请日：2002-08-16

    申请人： Tohru Ishitani ,  Mitsugu Sato ,  Hideo Todokoro ,  Tadashi Otaka ,  Takashi Iizumi ,  Atsushi Takane

    发明人： Tohru Ishitani ,  Mitsugu Sato ,  Hideo Todokoro ,  Tadashi Otaka ,  Takashi Iizumi ,  Atsushi Takane

    IPC分类号： G06K9/32 ,  G21K7/00 ,  G09G5/02

    CPC分类号： H01J37/28 ,  H01J37/222 ,  H01J37/263 ,  H01J2237/2823

    摘要： Image evaluation method capable of objectively evaluating the image resolution of a microscope image. An image resolution method is characterized in that resolution in partial regions of an image is obtained over an entire area of the image or a portion of the image, averaging is performed over the entire area of the image or the portion of the image, and the averaged value is established as the resolution evaluation value of the entire area of the image or the portion of the image. This method eliminates the subjective impressions of the evaluator from evaluation of microscope image resolution, so image resolution evaluation values of high accuracy and good repeatability can be obtained.

    摘要翻译： 能够客观评价显微镜图像的图像分辨率的图像评价方法。 图像分辨方法的特征在于，在图像的整个区域或图像的一部分上获得图像的部分区域中的分辨率，在图像的整个区域或图像的整个区域上进行平均化， 建立平均值作为图像的整个区域或图像的部分的分辨率评估值。 该方法消除了评估者对显微镜图像分辨率评估的主观印象，因此可以获得高精度和良好重复性的图像分辨率评估值。

    Ion source
    10.
    发明授权
    Ion source 失效
    离子源

    公开(公告)号：US4900974A

    公开(公告)日：1990-02-13

    申请号：US668932

    申请日：1984-11-07

    申请人： Tohru Ishitani ,  Hideo Todokoro ,  Hifumi Tamura

    发明人： Tohru Ishitani ,  Hideo Todokoro ,  Hifumi Tamura

    IPC分类号： H01J37/08 ,  H01J27/02 ,  H01J27/26 ,  H01L21/027 ,  H01L21/265

    CPC分类号： H01J27/26

    摘要： An EHD ion source includes an extractor and a control electrode with extractor being disposed below a tip of an electrode, and functioning to apply an electric field to a substance to-be-ionized wetting a pointed end of the tip, so as to derive ions from the pointed tip end. The control electrode is disposed in the vicinity of the pointed end of the tip, and it functions to apply an electric field to the substance to-be-ionized in its molten state so as to supply the pointed tip end with the substance to-be-ionized in a suitable amount. As a result, a great ion current which is substantially proportional to an extracting voltage can be derived from the pointed tip end.

    摘要翻译： EHD离子源包括提取器和控制电极，其中提取器设置在电极的尖端下方，并且能够对待离子化的物质施加电场以润湿尖端的尖端，从而导出离子 从尖尖端。 控制电极设置在尖端的尖端附近，其功能是在其熔融状态下对要被离子化的物质施加电场，以将尖端提供物质待 以合适的量除去。 结果，可以从尖尖端导出与提取电压基本成比例的大离子电流。