公开(公告)号：US5557215A

公开(公告)日：1996-09-17

申请号：US239982

申请日：1994-05-09

申请人： Hiroaki Saeki ,  Masaki Kondo

发明人： Hiroaki Saeki ,  Masaki Kondo

IPC分类号： G01R29/24 ,  H01J37/32 ,  H01L21/683 ,  G01R31/26

CPC分类号： H01J37/32935 ,  H01L21/6833 ,  G01R29/24

摘要： According to the present invention, there are provided a self-bias measurement method of measuring the self-bias voltage of an object when the object is subjected to a plasma process by using a plasma generated between a pair of electrodes, the object being held, by means of electrostatic chucking means having an electrostatic chucking electrode, on one of the pair of electrodes situated in a processing chamber, the method including the steps of detecting a leak current between the object and the electrostatic chucking electrode while varying the DC voltage applied to the electrostatic chucking electrode, and calculating the self-bias voltage of the object on the basis of the leak current detected, an apparatus for measuring the self-bias, and an electrostatic chucking apparatus having means capable of measuring the self-bias.

摘要翻译： 根据本发明，提供了一种自偏置测量方法，其通过使用在一对电极之间产生的等离子体处理对物体进行等离子体处理时，测量物体的自偏压，被保持物体， 通过具有静电夹持电极的静电吸附装置，位于处理室中的一对电极中的一个电极上，该方法包括以下步骤：检测物体和静电吸持电极之间的漏电流，同时改变施加到 静电吸附电极，并且基于检测到的泄漏电流来计算物体的自偏压，用于测量自偏压的装置，以及具有能够测量自偏压的装置的静电夹持装置。

公开(公告)号：US06522942B2

公开(公告)日：2003-02-18

申请号：US09860913

申请日：2001-05-21

申请人： Masaki Kondo ,  Hiroaki Saeki

发明人： Masaki Kondo ,  Hiroaki Saeki

IPC分类号： G06F700

CPC分类号： H01L21/67259 ,  H01L21/681 ,  Y10S414/136 ,  Y10S414/137 ,  Y10S414/139

摘要： A semiconductor processing system includes a transfer apparatus for transferring a wafer. The transfer apparatus has a pick arm member with wings. The reference distances between the wafer located at the normal position and the wings are stored in a memory of a CPU. Detection ranges of line sensors are set in a standby position in front of a process chamber in order to detect the distances between the wafer and the wings. In the CPU, the amount of positional shift of the wafer is detected based on the reference distances and the detected distances.

公开(公告)号：US5460684A

公开(公告)日：1995-10-24

申请号：US160842

申请日：1993-12-03

申请人： Hiroaki Saeki ,  Teruo Asakawa ,  Noboru Masuoka ,  Masaki Kondo

发明人： Hiroaki Saeki ,  Teruo Asakawa ,  Noboru Masuoka ,  Masaki Kondo

IPC分类号： C23C16/458 ,  H01L21/683 ,  C23F1/02 ,  C23C14/50 ,  C23C16/52

CPC分类号： H01L21/6831 ,  C23C16/4586 ,  H01L21/6833

摘要： The plasma etching apparatus for a semiconductor wafer includes a susceptor provided in the vacuum process chamber. An electrostatic chuck for attracting and holding the wafer is provided on the susceptor. The electrostatic chuck comprises a chuck electrode provided on the susceptor via an insulative layer. The chuck electrode is connected to the positive terminal of the DC power supply via a switch. The chuck electrode is coated with a resistive layer, and the wafer is placed directly on the resistive layer. The resistive layer exhibits an electric resistivity of 1.times.10.sup.10 .OMEGA..multidot.cm to 1.times.10.sup.12 .OMEGA..multidot.cm in a temperature range for etching. The resistive layer is formed to have such a surface roughness that a center line average hight falls within a range of 0.1 to 1.5 .mu.m. When the potential of the positive terminal of the DC power supply is applied to the chuck electrode, and the wafer is grounded via plasma, a contact potential difference is created between the surface of the resistive layer and the rear surface of the wafer, generating an electrostatic attractive force, so that the wafer is attracted and held by the resistive layer.

摘要翻译： 用于半导体晶片的等离子体蚀刻装置包括设置在真空处理室中的基座。 用于吸引和保持晶片的静电卡盘设置在基座上。 静电卡盘包括通过绝缘层设置在基座上的卡盘电极。 卡盘电极通过开关连接到直流电源的正极端子。 卡盘电极涂覆有电阻层，晶片直接放置在电阻层上。 在蚀刻的温度范围内，电阻层的电阻率为1×10 10欧米伽xcm至1×10 12欧米伽×厘米。 电阻层形成为具有中心线平均高度在0.1〜1.5μm的范围内的表面粗糙度。 当直流电源的正端子的电位施加到卡盘电极并且晶片通过等离子体接地时，在电阻层的表面和晶片的后表面之间产生接触电位差，从而产生 静电吸引力，使得晶片被电阻层吸引并保持。

公开(公告)号：US08786894B2

公开(公告)日：2014-07-22

申请号：US13051032

申请日：2011-03-18

申请人： Masaki Kondo

发明人： Masaki Kondo

IPC分类号： G06K15/02 ,  G06K15/00 ,  H04N1/60 ,  H04N1/40 ,  H04N1/405 ,  H04N1/04

CPC分类号： G06K15/1878 ,  G06K15/1871 ,  H04N1/58

摘要： An image processing apparatus causes a printing executing section to perform a printing process using color-materials, the image processing apparatus includes: a first processing unit that performs a first image-processing by processing original image data in order to generate first processed image data; and a supplying unit, wherein the first processing unit includes: a calculating unit that calculates an index value relating an edge-intensity about a target pixel in object image data; and a correcting unit that corrects a value of the target pixel based on the index value of the edge-intensity, wherein the correcting unit corrects the value of the target pixel such that print-density of the target pixel increase if the target pixel is a first pixel, and wherein the correcting unit corrects the value of the target pixel such that print-density of the target pixel decrease if the target pixel is a second pixel.

摘要翻译： 图像处理装置使打印执行部使用彩色材料进行打印处理，图像处理装置包括：第一处理单元，其通过处理原始图像数据进行第一图像处理，以生成第一处理图像数据; 以及供给单元，其中，所述第一处理单元包括：计算单元，计算与对象图像数据中的关于目标像素的边缘强度相关的指标值; 以及校正单元，其基于所述边缘强度的所述指标值来校正所述目标像素的值，其中，所述校正单元校正所述目标像素的值，使得所述目标像素的打印浓度增加，如果所述目标像素为 第一像素，并且其中，所述校正单元校正所述目标像素的值，使得如果所述目标像素是第二像素，则所述目标像素的打印浓度降低。

公开(公告)号：US08595944B2

公开(公告)日：2013-12-03

申请号：US13033956

申请日：2011-02-24

申请人： Masayoshi Okumi ,  Masaki Kondo ,  Tomonobu Nashimoto ,  Katsumi Tozawa

发明人： Masayoshi Okumi ,  Masaki Kondo ,  Tomonobu Nashimoto ,  Katsumi Tozawa

IPC分类号： B23D45/16 ,  B23Q11/06

摘要： A handheld engine-driven cutter is provided with a disk blade and an engine that drives the disk blade, a filter through which air provided to the four-stroke engine passes, a carburetor that mixes fuel and the air that passed through the filter, a casing that houses the filter and the carburetor, at least one operation member that is operated by a user and connected to the carburetor via a link, and a shaft that is connected to the casing and supports the operation member in a swingable manner. A shaft receiving groove that supports the shaft is formed in the casing.

公开(公告)号：US08549758B2

公开(公告)日：2013-10-08

申请号：US12813580

申请日：2010-06-11

申请人： Ryosuke Ito ,  Masaki Kondo ,  Katsumi Okouchi

发明人： Ryosuke Ito ,  Masaki Kondo ,  Katsumi Okouchi

IPC分类号： A01D34/68 ,  A01D75/20 ,  B26B29/00

CPC分类号： A01D75/20 ,  A01D34/90

摘要： A coupling member can releasably couple a blade protector to a tool body of a gardening tool. The coupling member is movably and non-removably coupled to one of the tool body and the protector.

摘要翻译： 联接构件可释放地将叶片保护器联接到园艺工具的工具主体。 联接构件可移动地且不可移除地联接到工具主体和保护器之一。

公开(公告)号：US08466929B2

公开(公告)日：2013-06-18

申请号：US12414343

申请日：2009-03-30

申请人： Tomohiko Hasegawa ,  Masaki Kondo

发明人： Tomohiko Hasegawa ,  Masaki Kondo

IPC分类号： G09G5/02 ,  G06F17/00 ,  G06F15/00

CPC分类号： H04N1/32117 ,  H04N2201/0051 ,  H04N2201/0094 ,  H04N2201/3214 ,  H04N2201/3215 ,  H04N2201/3226 ,  H04N2201/325 ,  H04N2201/3267 ,  H04N2201/3271

摘要： An image processor includes an extracting unit, an assigning unit, and an output unit. The extracting unit extracts at least one set of frame image data from the plurality of sets of frame image data included in one of the at least one set of moving image data. The assigning unit assigns a set of control data to each of the at least one set of frame image data extracted by the extracting unit. The output unit outputs an image list including a moving image index, the moving image index having an index frame image and information with respect to the set of control data, the index frame image being either one of a frame image corresponding to the at least one set of frame image data assigned with the set of control data and a resized frame image resized from the frame image.

摘要翻译： 图像处理器包括提取单元，分配单元和输出单元。 提取单元从包括在至少一组运动图像数据中的多组帧图像数据中提取至少一组帧图像数据。 分配单元将提取单元提取的至少一组帧图像数据中的每一个分配一组控制数据。 输出单元输出包括运动图像索引的图像列表，具有索引帧图像的运动图像索引和关于该组控制数据的信息，索引帧图像是与至少一个对应的帧图像中的一个 分配有该组控制数据的一组帧图像数据和从帧图像改变大小的调整大小的帧图像。

公开(公告)号：US08454752B2

公开(公告)日：2013-06-04

申请号：US12635107

申请日：2009-12-10

申请人： Masaki Kondo ,  Takehiro Shindou

发明人： Masaki Kondo ,  Takehiro Shindou

IPC分类号： B08B5/00

CPC分类号： H01L21/6708 ,  B08B7/0042 ,  B23K26/0006 ,  B23K26/0823 ,  B23K26/12 ,  B23K26/127 ,  B23K26/14 ,  B23K26/16 ,  B23K26/352 ,  B23K2101/40 ,  B23K2103/56 ,  H01L21/67115 ,  H01L21/67742 ,  H01L21/681

摘要： A foreign substance removing apparatus includes a mounting table for mounting and rotating a substrate; and a laser beam irradiation unit for removing foreign substances attached to a surface of the substrate by irradiating foreign substance cleaning laser beam onto the substrate mounted and rotated on the mounting table. In the foreign substance removing apparatus, the laser beam irradiation unit irradiates laser beam having an elongate shaped irradiation cross section onto the surface of the substrate.

摘要翻译： 异物除去装置具有安装基板的旋转安装台， 以及激光束照射单元，用于通过将外来物质清洁激光束照射到在安装台上安装和旋转的基板上去除附着到基板表面的异物。 在异物去除装置中，激光束照射单元将具有细长形状的照射截面的激光束照射到基板的表面上。

公开(公告)号：US08428351B2

公开(公告)日：2013-04-23

申请号：US12647182

申请日：2009-12-24

申请人： Masaki Kondo

发明人： Masaki Kondo

IPC分类号： G06K9/00 ,  G06K9/32 ,  G06F15/00

CPC分类号： G06T5/007 ,  H04N1/628

摘要： An image processing device may create corrected image data by correcting object image data by utilizing base image data. The image processing device may determine a first polar coordinate value which represents first pixels in the object image data, calculate a first orthogonal coordinate by executing an orthogonal transformation on the first polar coordinate value, determine a second polar coordinate value which represents second pixels in the base image data, calculate a second orthogonal coordinate value by executing an orthogonal transformation on the second polar coordinate value, and create the corrected image data by correcting the object image data such that a coordinate value of each particular pixel in the object image data approaches the second orthogonal coordinate value. The each particular pixel may be included in a surrounding area of the first orthogonal coordinate value.

摘要翻译： 图像处理装置可以通过利用基本图像数据来校正对象图像数据来创建校正图像数据。 图像处理装置可以确定表示对象图像数据中的第一像素的第一极坐标值，通过对第一极坐标值执行正交变换来计算第一正交坐标，确定表示第二极坐标值的第二极坐标值， 通过对第二极坐标值执行正交变换来计算第二正交坐标值，并且通过校正对象图像数据来创建校正图像数据，使得对象图像数据中的每个特定像素的坐标值接近 第二正交坐标值。 每个特定像素可以被包括在第一正交坐标值的周围区域中。

公开(公告)号：US08320717B2

公开(公告)日：2012-11-27

申请号：US12414318

申请日：2009-03-30

申请人： Tomohiko Hasegawa ,  Masaki Kondo

发明人： Tomohiko Hasegawa ,  Masaki Kondo

IPC分类号： G06K9/54 ,  G06K9/32 ,  G06K15/02

CPC分类号： H04N1/0035 ,  H04N1/00347 ,  H04N1/0044 ,  H04N1/32112 ,  H04N2201/001 ,  H04N2201/0087 ,  H04N2201/0094 ,  H04N2201/3226 ,  H04N2201/325 ,  H04N2201/3271 ,  H04N2201/3273

摘要： An image processor includes a storing unit, an image determining unit, and an output unit. The storing unit stores a selecting condition. The image determining unit determines whether the image corresponding to the set of the image data satisfies the selecting condition. The output unit outputs an image list including either one of the image that is determined to satisfy the selecting condition by the image determining unit and a resized image resized from the image that is determined to satisfy the selecting condition by the image determining unit.

摘要翻译： 图像处理器包括存储单元，图像确定单元和输出单元。 存储单元存储选择条件。 图像确定单元确定与图像数据的集合对应的图像是否满足选择条件。 输出单元输出包括由图像确定单元确定为满足选择条件的图像中的任一个的图像列表和由图像确定单元确定为满足选择条件的图像大小调整大小的图像。