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    Cleaning apparatus
    1.
    发明申请
    Cleaning apparatus 审中-公开
    清洁装置

    公开(公告)号：US20080035181A1

    公开(公告)日：2008-02-14

    申请号：US11888689

    申请日：2007-08-02

    申请人： Hirohiko Takahashi ,  Takashi Fujita

    发明人： Hirohiko Takahashi ,  Takashi Fujita

    IPC分类号： B08B3/10

    CPC分类号： H01L21/67219 ,  H01L21/67173 ,  H01L21/67178 ,  H01L21/6719

    摘要： It is an object of the invention to provide a cleaning apparatus which can subject wafers that have undergone polishing to various cleaning processes while reducing the usage amount of pure water, increase the processing speed of wafers per unit floor area and significantly improve the operating rate, enable change or rearrangement of a plurality of cleaning processing chambers to more optimum arrangement in accordance with the cleaning treatment processes and the like, prevent generation of defects in wafers that are in process of, for example, pre-treatment, and simplify the configuration of the apparatus.In order to achieve the above described object, the present invention provides a cleaning apparatus comprising cleaning lines 2A and 2B comprised of lower and upper two levels, each of the levels comprising a plurality of cleaning processing chambers 2a to 2d or 2e to 2h; a center transporting means 6 comprising a function of transporting a wafer to be processed into or a function of transporting the processed wafer from each of the cleaning processing chambers 2a to 2h in the lower-layer and upper-layer cleaning lines 2A and 2B; an inter-chamber transporting means 16 for sequentially transporting the wafer to the adjacent cleaning processing chamber in each of the lower-layer and upper-layer cleaning lines 2A and 2B; and an introducing means for introducing pure water used in the cleaning processing chamber, which carries out precision cleaning in the upper-layer cleaning line 2B, into the cleaning processing chamber, which carries out rough cleaning in the lower-layer cleaning line 2A, as washing water for the rough cleaning.

    摘要翻译： 本发明的目的是提供一种可以将经过抛光的晶片进行各种清洗处理的清洗装置，同时减少纯水的使用量，增加每单位面积的晶片的处理速度并显着地提高工作速率， 能够根据清洁处理过程等使多个清洁处理室的更改或重新布置成更优化的布置，防止在例如预处理过程中生成晶片中的缺陷，并且简化 该装置。 为了实现上述目的，本发明提供了一种清洁装置，其包括由下部和上部两个层构成的清洁线2A和2B，每个层包括多个清洁处理室2a至2d或2 e至2小时; 中央传送装置6，其包括将待处理的晶片输送到或者从下一层清洁线路2A中的每个清洁处理室2a至2h输送经处理的晶片的功能;以及 2 B; 用于将晶片顺序地输送到下层和上层清洁线路2A和2B中的每一层中的相邻清洁处理室的腔室间传送装置16; 以及引入装置，用于将在上层清洁管线B中执行精密清洁的清洁处理室中使用的纯水引入到在下层清洁管线2A中进行粗略清洁的清洁处理室 ，作为洗涤水进行粗洗。

    Image processing apparatus and image processing method
    5.
    发明授权
    Image processing apparatus and image processing method 有权
    图像处理装置和图像处理方法

    公开(公告)号：US08610955B2

    公开(公告)日：2013-12-17

    申请号：US12955344

    申请日：2010-11-29

    申请人： Fumitaka Goto ,  Akitoshi Yamada ,  Mitsuhiro Ono ,  Rie Kajihara ,  Okinori Tsuchiya ,  Ayumi Sano ,  Tomokazu Ishikawa ,  Takashi Fujita ,  Fumihiro Goto ,  Shigeyasu Nagoshi ,  Akihiko Nakatani

    发明人： Fumitaka Goto ,  Akitoshi Yamada ,  Mitsuhiro Ono ,  Rie Kajihara ,  Okinori Tsuchiya ,  Ayumi Sano ,  Tomokazu Ishikawa ,  Takashi Fujita ,  Fumihiro Goto ,  Shigeyasu Nagoshi ,  Akihiko Nakatani

    IPC分类号： H04N1/40 ,  G06F15/00

    CPC分类号： H04N1/52 ,  G06K15/107

    摘要： In image processing, it is possible to suitably reduce density unevenness and graininess according to the ink used in printing. More specifically, when dividing multi-valued data and generating data for 2-pass multi-pass printing, in addition to divided multi-valued data for each of the two passes, divided multi-valued data that is common to the two passes is also generated. Moreover, quantized data of that common multi-valued data is reflected on the quantized data for each of the passes. Furthermore, when generating the quantized data, the division ratios used when generating the common data using the aforementioned multi-valued data division are set according to the colors of ink used in printing. By doing so, it becomes possible to suitably reduce density unevenness and graininess according to the colors used in printing.

    摘要翻译： 在图像处理中，可以根据印刷中使用的油墨适当地减小浓度不均匀性和颗粒性。 更具体地说，当分割多值数据并产生用于2遍多遍打印的数据时，除了两次通过中的每一个的分割多值数据之外，还可以将两次通过的共同的分割多值数据 生成。 此外，该通用多值数据的量化数据反映在每个通过的量化数据上。 此外，当生成量化数据时，根据在打印中使用的墨的颜色来设定使用上述多值数据分割生成公共数据时使用的分割比。 通过这样做，可以根据印刷中使用的颜色适当地减小浓度不均匀性和颗粒性。

    Image processing apparatus and image processing method
    7.
    发明授权
    Image processing apparatus and image processing method 有权
    图像处理装置和图像处理方法

    公开(公告)号：US08405876B2

    公开(公告)日：2013-03-26

    申请号：US12813837

    申请日：2010-06-11

    申请人： Akihiko Nakatani ,  Fumihiro Goto ,  Akitoshi Yamada ,  Mitsuhiro Ono ,  Okinori Tsuchiya ,  Fumitaka Goto ,  Takashi Fujita ,  Rie Kajihara ,  Ayumi Sano ,  Tomokazu Ishikawa

    发明人： Akihiko Nakatani ,  Fumihiro Goto ,  Akitoshi Yamada ,  Mitsuhiro Ono ,  Okinori Tsuchiya ,  Fumitaka Goto ,  Takashi Fujita ,  Rie Kajihara ,  Ayumi Sano ,  Tomokazu Ishikawa

    IPC分类号： G06K15/10 ,  G06K15/00 ,  H04N1/40

    CPC分类号： G06K15/107

    摘要： When multi-pass printing is performed, the dot overlap rate (ratio of the number of dots that overlap and are to be printed in the same pixel area by the plurality of relative movements with respect to the total number of dots to be printed in a pixel area by the plurality of relative movements) in pixel areas having medium-density where density unevenness caused by density fluctuation easily stands out is made higher than the dot overlap rate in pixel areas having low-density and pixel areas having high-density. By doing so density unevenness caused by density fluctuation is suppressed. In addition, the dot overlap rate in pixel areas having low-density and pixel areas having high-density is low, so it is possible to reduce graininess in low-density areas and suppress a decrease in density in high-density areas.

    摘要翻译： 当进行多遍打印时，点重叠率（通过多个相对移动相对于要印刷的总点数在同一像素区域中重叠并且要打印的点数的比率 在具有中密度的像素区域中，由密度波动引起的浓度不均匀性容易突出的像素区域的像素区域高于具有高密度的低密度像素区域和像素区域的像素区域中的点重叠率。 通过这样做，抑制了由密度波动引起的密度不均匀。 此外，具有低密度的像素区域和具有高密度的像素区域的点重叠率低，因此可以降低低密度区域的颗粒度并抑制高密度区域的密度降低。

    Article Transfer Device and Stacker Crane Having Same
    8.
    发明申请
    Article Transfer Device and Stacker Crane Having Same 有权
    文具传送装置和堆垛机起重机相同

    公开(公告)号：US20120201642A1

    公开(公告)日：2012-08-09

    申请号：US13390607

    申请日：2010-07-15

    申请人： Takashi Fujita

    发明人： Takashi Fujita

    IPC分类号： B65G1/04

    CPC分类号： B65G1/0407 ,  B65G1/0435

    摘要： An article transfer device includes a placement support portion that is provided to a base platform and includes a pair of divided placement support portions for separately receiving and supporting both side portions, in the article lateral direction, of the bottom surface of an article, and a pair of clamp portions that can be projected and retracted along an article transfer direction with respect to the placement support portion and can be moved toward and away from each other by a clamp actuator between gripping positions and releasing positions that are spaced apart wider. The pair of divided placement support portions can be moved toward and away from each other within a movable range defined in the article lateral direction by a placement support portion actuator and to face each other in close proximity when located in approach limit positions of the movable range.

    摘要翻译： 一种物品传送装置，包括：设置在基座平台上的放置支撑部，其具有一对分割放置支撑部，用于分别容纳和支撑物品的底面的物品横向方向的两侧部， 一对夹持部分可以沿物品传送方向相对于放置支撑部分伸出和缩回，并且可以通过夹持致动器之间的夹紧致动器彼此移动并远离彼此间隔开较宽的释放位置。 一对分开的放置支撑部分可以在通过放置支撑部分致动器在物品横向方向上限定的可移动范围内彼此移动并远离彼此并且当位于可移动范围的接近极限位置时彼此面对 。