公开(公告)号：US06913373B2

公开(公告)日：2005-07-05

申请号：US10445022

申请日：2003-05-27

申请人： Hirohisa Tanaka ,  Osamu Tanitsu ,  Mitsunori Toyoda

发明人： Hirohisa Tanaka ,  Osamu Tanitsu ,  Mitsunori Toyoda

IPC分类号： G02B19/00 ,  G02B3/00 ,  G02B3/06 ,  G03F7/20 ,  H01L21/027 ,  G02B27/10 ,  F21V5/00

CPC分类号： G03F7/70075 ,  G03F7/70158

摘要： The present invention provides an optical illumination device that permits an increase in the fill of a multiplicity of light sources that constitute a secondary source formed on an illuminated pupil plane. A fly's eye lens that forms a multiplicity of light sources from a light beam emitted by an optical integrator is disposed in the optical path between the optical integrator and an irradiation surface. The fly's eye lens comprises, in order from the light-source side, a first fly's eye member and a second fly's eye member. A cylindrical lens group arranged in a first direction is formed on each of the light source-side surface of a first fly's eye member and the light source-side surface of a second fly's eye member, and a cylindrical lens is group arranged in a second direction orthogonal to the first direction is formed on each of the irradiation surface side surface of the first fly's eye member and the irradiation surface side surface of the second fly's eye member.

摘要翻译： 本发明提供了一种光学照明装置，其允许增加构成在照明瞳孔平面上形成的次级光源的多个光源的填充。 从光学积分器发射的光束形成多个光源的飞眼镜片设置在光学积分器和照射表面之间的光路中。 蝇眼透镜从光源侧依次包括第一蝇眼部件和第二蝇眼部件。 在第一飞眼构件的光源侧表面和第二蝇眼构件的光源侧表面的每一个上形成沿第一方向布置的柱面透镜组，并且在第二方向上布置有圆柱形透镜 在第一蝇眼部件的照射面侧面和第二蝇眼部件的照射面侧面的每一个上形成与第一方向正交的方向。

公开(公告)号：US20060181690A1

公开(公告)日：2006-08-17

申请号：US11403922

申请日：2006-04-14

申请人： Hisashi Nishinaga ,  Ikuo Hikima ,  Mitsunori Toyoda ,  Masahiro Nakagawa ,  Tsuneyuki Hagiwara ,  Yasushi Mizuno ,  Naonori Kita ,  Osamu Tanitsu ,  Nozomu Emura

发明人： Hisashi Nishinaga ,  Ikuo Hikima ,  Mitsunori Toyoda ,  Masahiro Nakagawa ,  Tsuneyuki Hagiwara ,  Yasushi Mizuno ,  Naonori Kita ,  Osamu Tanitsu ,  Nozomu Emura

IPC分类号： G03B27/42

CPC分类号： G03F7/7015 ,  G03F7/70058 ,  G03F7/70341 ,  G03F7/706 ,  G03F7/7085

摘要： A part of exposure beam through a liquid via a projection optical system enters a light-transmitting section, enters an optical member without passing through gas, and is focused. The exposure apparatus receives the exposure light from the projection optical system to perform various measurements even if the numerical aperture of the projection optical system increases.

公开(公告)号：US20080042068A1

公开(公告)日：2008-02-21

申请号：US11896447

申请日：2007-08-31

申请人： Hisashi Nishinaga ,  Ikuo Hikima ,  Mitsunori Toyoda ,  Masahiro Nakagawa ,  Tsuneyuki Hagiwara ,  Yasushi Mizuno ,  Naonori Kita ,  Osamu Tanitsu ,  Nozomu Emura

发明人： Hisashi Nishinaga ,  Ikuo Hikima ,  Mitsunori Toyoda ,  Masahiro Nakagawa ,  Tsuneyuki Hagiwara ,  Yasushi Mizuno ,  Naonori Kita ,  Osamu Tanitsu ,  Nozomu Emura

IPC分类号： G01T1/24

CPC分类号： G03F7/7015 ,  G03F7/70058 ,  G03F7/70341 ,  G03F7/706 ,  G03F7/7085

摘要： A sensor is used at a substrate level in a lithographic projection apparatus having a projection system with a numeric aperture that is greater than 1 and is configured to project a patterned radiation beam onto a target portion of a substrate The sensor includes a radiation-detector; a transmissive plate having a front surface and a back surface, the transmissive plate being positioned such that radiation projected by the projection system passes into the front surface of the transmissive plate and out of the back surface thereof to the radiation detector; and a luminescent layer provided on the back surface of the transmissive plate, the luminescent layer absorbing the radiation and emitting luminescent radiation of a different wavelength, wherein the back surface is rough.

摘要翻译： 在具有数值孔径大于1的投影系统的光刻投影设备中使用传感器，并且被配置为将图案化的辐射束投影到基板的目标部分上。传感器包括辐射检测器; 具有前表面和后表面的透射板，所述透射板被定位成使得由所述投影系统投影的辐射进入所述透射板的前表面并且从其背表面延伸到所述辐射探测器; 以及设置在所述透射板的背面上的发光层，所述发光层吸收所述辐射并发射不同波长的发光辐射，其中所述背面粗糙。

公开(公告)号：US07095560B2

公开(公告)日：2006-08-22

申请号：US10860161

申请日：2004-06-04

申请人： Mitsunori Toyoda ,  Osamu Tanitsu

发明人： Mitsunori Toyoda ,  Osamu Tanitsu

IPC分类号： G02B5/18 ,  G02B27/10 ,  G03B27/54

CPC分类号： G03F7/701 ,  G03F7/70108 ,  G03F7/70158

摘要： An illumination optical system having a more simplified structure forms various quadrupole-shaped secondary light sources with two-time rotational symmetry with respect to an optical axis. The apparatus can provide illumination conditions that differ in two perpendicular directions on a radiation-receiving plane. In order to form a secondary light source with a quadrupole-shaped light intensity distribution on an illumination pupil plane, a diffractive optical device is provided in which an entrance light beam is converted into four light beams, and a light beam having a shape of four points centered about the optical axis is formed in a far field. The diffractive optical device is provided with a first diffractive optical member that is rotatable about a first axis parallel to the optical axis, and a second diffractive optical member that is rotatable about a second axis parallel to the optical axis, and that is arranged adjacent to the first diffractive optical member. A refractive optical device having first and second refractive optical members accomplishes similar results.

摘要翻译： 具有更简化的结构的照明光学系统形成相对于光轴具有两次旋转对称性的各种四极形二次光源。 该装置可以提供在辐射接收平面上在两个垂直方向上不同的照明条件。 为了在照明光瞳平面上形成具有四极形光强度分布的二次光源，提供了一种衍射光学器件，其中入射光束被转换为四个光束，并且具有四个形状的光束 以远轴为中心的点形成在远场中。 衍射光学装置设置有可围绕平行于光轴的第一轴线旋转的第一衍射光学构件和可绕平行于光轴的第二轴线旋转的第二衍射光学构件，并且其被布置为 第一衍射光学构件。 具有第一和第二折射光学构件的折射光学装置也实现了类似的结果。

公开(公告)号：US08139198B2

公开(公告)日：2012-03-20

申请号：US11403922

申请日：2006-04-14

申请人： Hisashi Nishinaga ,  Ikuo Hikima ,  Mitsunori Toyoda ,  Masahiro Nakagawa ,  Tsuneyuki Hagiwara ,  Yasushi Mizuno ,  Naonori Kita ,  Osamu Tanitsu ,  Nozomu Emura

发明人： Hisashi Nishinaga ,  Ikuo Hikima ,  Mitsunori Toyoda ,  Masahiro Nakagawa ,  Tsuneyuki Hagiwara ,  Yasushi Mizuno ,  Naonori Kita ,  Osamu Tanitsu ,  Nozomu Emura

IPC分类号： G03B27/42 ,  G03B27/58

CPC分类号： G03F7/7015 ,  G03F7/70058 ,  G03F7/70341 ,  G03F7/706 ,  G03F7/7085

摘要： A part of exposure beam through a liquid via a projection optical system enters a light-transmitting section, enters an optical member without passing through gas, and is focused. The exposure apparatus receives the exposure light from the projection optical system to perform various measurements even if the numerical aperture of the projection optical system increases.

摘要翻译： 通过投影光学系统通过液体的曝光束的一部分进入透光部分，而不通过气体进入光学部件并被聚焦。 即使投影光学系统的数值孔径增加，曝光装置接收来自投影光学系统的曝光光也进行各种测量。

公开(公告)号：US20060170891A1

公开(公告)日：2006-08-03

申请号：US11390178

申请日：2006-03-28

申请人： Hisashi Nishinaga ,  Ikuo Hikima ,  Mitsunori Toyoda ,  Masahiro Nakagawa ,  Tsuneyuki Hagiwara ,  Yasushi Mizuno ,  Naonori Kita ,  Osamu Tanitsu ,  Nozomu Emura

发明人： Hisashi Nishinaga ,  Ikuo Hikima ,  Mitsunori Toyoda ,  Masahiro Nakagawa ,  Tsuneyuki Hagiwara ,  Yasushi Mizuno ,  Naonori Kita ,  Osamu Tanitsu ,  Nozomu Emura

IPC分类号： G03B27/42

CPC分类号： G03F7/7015 ,  G03F7/70058 ,  G03F7/70341 ,  G03F7/706 ,  G03F7/7085

摘要： A part of exposure beam through a liquid via a projection optical system enters a light-transmitting section, enters an optical member without passing through gas, and is focused. The exposure apparatus receives the exposure light from the projection optical system to perform various measurements even if the numerical aperture of the projection optical system increases.

摘要翻译： 通过投影光学系统通过液体的曝光束的一部分进入透光部分，而不通过气体进入光学部件并被聚焦。 即使投影光学系统的数值孔径增加，曝光装置接收来自投影光学系统的曝光光也进行各种测量。

公开(公告)号：US06741394B1

公开(公告)日：2004-05-25

申请号：US09703727

申请日：2000-11-02

申请人： Osamu Tanitsu ,  Yuji Kudo ,  Mitsunori Toyoda ,  Masato Shibuya

发明人： Osamu Tanitsu ,  Yuji Kudo ,  Mitsunori Toyoda ,  Masato Shibuya

IPC分类号： G02B2710

CPC分类号： G03G7/0046 ,  B41M5/5272 ,  G02B3/0056 ,  G02B3/0062 ,  G02B3/0068 ,  G02B21/082 ,  G03F7/70075 ,  G03F7/70091 ,  G03G7/0006

摘要： The present invention is aimed at providing a wavefront dividing type optical integrator which can yield a uniform illuminance distribution substantially over the whole illumination field formed thereby even when the size of each micro lens constituting the optical integrator is made smaller so as to set a large number of wavefront divisions. The optical integrator in accordance with the present invention is a wavefront dividing type optical integrator, having a number of micro lenses arranged two-dimensionally, for forming a number of light sources by dividing a wavefront of an incident beam; each micro lens having a rectangular entrance surface and a rectangular exit surface, and satisfying at least one of the following conditions: (d1/2)(D1/2)/(&lgr;·f)≧3.05 (d2/2)(D2/2)/(&lgr;·f)≧3.05 where f is the focal length of each micro lens, d1 is the length of one side of the entrance surface of each micro lens, d2 is the length of the other side of the entrance surface of each micro lens, D1 is the length of the side of exit surface in each micro lens corresponding to the one side of entrance surface, D2 is the length of the side of exit surface in each micro lens corresponding to the other side of entrance surface, and &lgr; is the wavelength of the incident beam.

摘要翻译： 本发明的目的在于提供一种波前分割型光学积分器，即使构成光积分器的每个微透镜的尺寸更小，从而可以大大地在由此形成的整个照明场上产生均匀的照度分布，从而设定大量 的波前部门。 根据本发明的光学积分器是波面分割型光学积分器，其具有二维布置的多个微透镜，用于通过分割入射光束的波前来形成多个光源; 每个微透镜具有矩形入射面和矩形出射面，并且满足以下条件中的至少一个：其中f是每个微透镜的焦距，d1是每个微透镜的入射面的一侧的长度 ，d2是每个微透镜的入射面的另一侧的长度，D1是每个微透镜的出射表面的与入射面一侧对应的一侧的长度，D2是出口侧的长度 每个微透镜中的表面对应于入射表面的另一侧，λ是入射光束的波长。

公开(公告)号：US09684175B2

公开(公告)日：2017-06-20

申请号：US13137002

申请日：2011-07-14

申请人： Mitsunori Toyoda

发明人： Mitsunori Toyoda

IPC分类号： G03B27/72 ,  G02B27/09 ,  G02B27/28 ,  G02B27/42 ,  G03F7/20 ,  G02B5/30

摘要： An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, and a polarization member made of optical material with optical rotatory power, which is arranged in the optical path on an incidence side of the optical integrator, and which changes a polarization state of the illumination light. The illumination light from the polarization member is irradiated onto the pattern through a pupil plane of the illumination optical apparatus.

公开(公告)号：US09170356B2

公开(公告)日：2015-10-27

申请号：US13137002

申请日：2011-07-14

申请人： Mitsunori Toyoda

发明人： Mitsunori Toyoda

IPC分类号： G03B27/72 ,  G02B5/30 ,  G02B27/28 ,  G02B27/42 ,  G03F7/20

摘要： An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, and a polarization member made of optical material with optical rotatory power, which is arranged in the optical path on an incidence side of the optical integrator, and which changes a polarization state of the illumination light. The illumination light from the polarization member is irradiated onto the pattern through a pupil plane of the illumination optical apparatus.

公开(公告)号：US20110299055A1

公开(公告)日：2011-12-08

申请号：US13137342

申请日：2011-08-08

申请人： Mitsunori Toyoda

发明人： Mitsunori Toyoda

IPC分类号： G03B27/54 ,  G02B27/42 ,  G02B5/30

CPC分类号： G02B5/3025 ,  G02B27/0927 ,  G02B27/0944 ,  G02B27/28 ,  G02B27/4233 ,  G02B27/4261 ,  G03F7/70158 ,  G03F7/70566

摘要： A beam transforming element for forming a predetermined light intensity distribution on a predetermined surface on the basis of an incident beam includes a first basic element made of an optical material with optical activity, for forming a first region distribution of the predetermined light intensity distribution on the basis of the incident beam; and a second basic element made of an optical material with optical activity, for forming a second region distribution of the predetermined light intensity distribution on the basis of the incident beam, wherein the first basic element and the second basic element have their respective thicknesses different from each other along a direction of transmission of light.

摘要翻译： 用于基于入射光束在预定表面上形成预定光强度分布的光束变换元件包括由具有光学活性的光学材料制成的第一基本元件，用于在预定的光强度分布上形成第一区域分布 入射光束的基础; 以及由具有光学活性的光学材料制成的第二基本元件，用于基于所述入射光束形成所述预定光强度分布的第二区域分布，其中所述第一基本元件和所述第二基本元件的各自厚度不同于 彼此沿着光的传播方向。