-
1.发明申请Cleaning method by electrolytic sulfuric acid and manufacturing method of semiconductor device 有权电解硫酸的清洗方法及半导体装置的制造方法公开(公告)号：US20090325390A1
公开(公告)日：2009-12-31
申请号：US12459133
申请日：2009-06-26
申请人： Hiroki Domon , Yusuke Ogawa , Masaaki Kato , Takamichi Kishi , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
发明人： Hiroki Domon , Yusuke Ogawa , Masaaki Kato , Takamichi Kishi , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
CPC分类号： C11D11/007 , C11D7/08 , C11D11/0047 , C25B1/285 , G03F7/423 , H01L21/31133
摘要： The cleaning method by electrolytic sulfuric acid and the manufacturing method of semiconductor device comprising: the process in which the first sulfuric acid solution is supplied from outside to the sulfuric acid electrolytic cell to form the first electrolytic sulfuric acid containing oxidizing agent in the sulfuric acid electrolytic cell; the process in which the second sulfuric acid solution, which is higher in concentration than said the first sulfuric acid solution previously supplied, is supplied from outside to said sulfuric acid electrolytic cell; said the second sulfuric acid solution and the first electrolytic sulfuric acid are mixed in said sulfuric acid electrolytic cell; and electrolysis is performed to form the cleaning solution comprising the second electrolytic sulfuric acid containing sulfuric acid and oxidation agent in said sulfuric acid electrolytic cell and the process in which cleaning treatment is performed for the cleaning object with said cleaning solution.
摘要翻译： 电解硫酸的清洗方法以及半导体装置的制造方法，其特征在于，包括：从硫酸电解槽向外部供给第一硫酸溶液，在硫酸电解液中形成含有第一电解硫酸的氧化剂的工序 细胞; 其中比所述先前供应的所述第一硫酸溶液浓度高的第二硫酸溶液从外部供应到所述硫酸电解池的过程; 所述第二硫酸溶液和所述第一电解硫酸在所述硫酸电解池中混合; 并且进行电解以在所述硫酸电解池中形成包含含有硫酸和氧化剂的第二电解硫酸的清洗溶液，以及对所述清洁溶液进行清洁对象的清洁处理的处理。
-
2.发明授权Cleaning method by electrolytic sulfuric acid and manufacturing method of semiconductor device 有权电解硫酸的清洗方法及半导体装置的制造方法公开(公告)号：US08187449B2
公开(公告)日：2012-05-29
申请号：US12459133
申请日：2009-06-26
申请人： Hiroki Domon , Yusuke Ogawa , Masaaki Kato , Takamichi Kishi , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
发明人： Hiroki Domon , Yusuke Ogawa , Masaaki Kato , Takamichi Kishi , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
IPC分类号： C25B1/28
CPC分类号： C11D11/007 , C11D7/08 , C11D11/0047 , C25B1/285 , G03F7/423 , H01L21/31133
摘要： The cleaning method by electrolytic sulfuric acid and the manufacturing method of semiconductor device comprising: the process in which the first sulfuric acid solution is supplied from outside to the sulfuric acid electrolytic cell to form the first electrolytic sulfuric acid containing oxidizing agent in the sulfuric acid electrolytic cell; the process in which the second sulfuric acid solution, which is higher in concentration than said the first sulfuric acid solution previously supplied, is supplied from outside to said sulfuric acid electrolytic cell; said the second sulfuric acid solution and the first electrolytic sulfuric acid are mixed in said sulfuric acid electrolytic cell; and electrolysis is performed to form the cleaning solution comprising the second electrolytic sulfuric acid containing sulfuric acid and oxidation agent in said sulfuric acid electrolytic cell and the process in which cleaning treatment is performed for the cleaning object with said cleaning solution.
摘要翻译： 电解硫酸的清洗方法以及半导体装置的制造方法，其特征在于，包括：从硫酸电解槽向外部供给第一硫酸溶液，在硫酸电解液中形成含有第一电解硫酸的氧化剂的工序 细胞; 其中比所述先前供应的所述第一硫酸溶液浓度高的第二硫酸溶液从外部供应到所述硫酸电解池的过程; 所述第二硫酸溶液和所述第一电解硫酸在所述硫酸电解池中混合; 并且进行电解以在所述硫酸电解池中形成包含含有硫酸和氧化剂的第二电解硫酸的清洗溶液，以及对所述清洁溶液进行清洁对象的清洁处理的处理。
-
公开(公告)号：US08815064B2
公开(公告)日：2014-08-26
申请号：US13393484
申请日：2010-11-26
申请人： Masaaki Kato , Rie Kawaguchi , Takamichi Kishi
发明人： Masaaki Kato , Rie Kawaguchi , Takamichi Kishi
IPC分类号： C25B1/13 , C25B13/02 , C25B13/08 , C25B11/12 , C25B9/08 , C01B13/11 , C02F1/461 , C25B11/04 , C02F103/02
CPC分类号： C25B13/02 , C01B13/11 , C01B2201/24 , C01B2201/34 , C02F1/4618 , C02F2001/46138 , C02F2103/02 , C02F2201/46115 , C25B1/13 , C25B9/08 , C25B11/0478 , C25B13/08 , Y02E60/366
摘要： The present invention provides an ozone generator comprising an anode and a cathode provided on each side of a fluororesin type cation exchange membrane, the anode being a conductive diamond electrode having conductive diamond on the surface, wherein water is supplied to an anode compartment, DC current is supplied between the anode and the cathode to electrolyze water to evolve ozone from the anode compartment and hydrogen from a cathode compartment, the conductive diamond electrode comprising a substrate having a plurality of convexo-concave and a conductive diamond film coated on the surface of the substrate is applied as the conductive diamond electrode, and a close packed layer of ion exchange resin particles or the fluororesin type cation exchange membrane with notch is closely adhered to the surface of the anode side of the fluororesin type cation exchange membrane.
摘要翻译： 本发明提供了一种臭氧发生器，其包括在氟树脂型阳离子交换膜的每一侧上设置的阳极和阴极，所述阳极是在表面上具有导电金刚石的导电金刚石电极，其中水被供应到阳极室，DC电流 被供应在阳极和阴极之间以电解水以从阳极室释放臭氧并从阴极室释放氢，导电金刚石电极包括具有多个凸凹和导电金刚石薄膜的基底，该基底涂覆在 衬底被用作导电金刚石电极，并且紧密填充层的离子交换树脂颗粒或具有凹口的氟树脂型阳离子交换膜紧密附着在氟树脂型阳离子交换膜的阳极侧的表面上。
-
公开(公告)号：US20120168302A1
公开(公告)日：2012-07-05
申请号：US13393484
申请日：2010-11-26
申请人： Masaaki Kato , Rie Kawaguchi , Takamichi Kishi
发明人： Masaaki Kato , Rie Kawaguchi , Takamichi Kishi
IPC分类号： C25B9/10
CPC分类号： C25B13/02 , C01B13/11 , C01B2201/24 , C01B2201/34 , C02F1/4618 , C02F2001/46138 , C02F2103/02 , C02F2201/46115 , C25B1/13 , C25B9/08 , C25B11/0478 , C25B13/08 , Y02E60/366
摘要： The present invention provides an ozone generator comprising an anode and a cathode provided on each side of a fluororesin type cation exchange membrane, the anode being a conductive diamond electrode having conductive diamond on the surface, wherein water is supplied to an anode compartment, DC current is supplied between the anode and the cathode to electrolyze water to evolve ozone from the anode compartment and hydrogen from a cathode compartment, the conductive diamond electrode comprising a substrate having a plurality of convexo-concave and a conductive diamond film coated on the surface of the substrate is applied as the conductive diamond electrode, and a close packed layer of ion exchange resin particles or the fluororesin type cation exchange membrane with notch is closely adhered to the surface of the anode side of the fluororesin type cation exchange membrane.
摘要翻译： 本发明提供了一种臭氧发生器，其包括在氟树脂型阳离子交换膜的每一侧上设置的阳极和阴极，所述阳极是在表面上具有导电金刚石的导电金刚石电极，其中水被供应到阳极室，DC电流 被供应在阳极和阴极之间以电解水以从阳极室释放臭氧并从阴极室释放氢，导电金刚石电极包括具有多个凸凹和导电金刚石薄膜的基底，该基底涂覆在 衬底被用作导电金刚石电极，并且紧密填充层的离子交换树脂颗粒或具有凹口的氟树脂型阳离子交换膜紧密附着在氟树脂型阳离子交换膜的阳极侧的表面上。
-
公开(公告)号：US06238544B1
公开(公告)日：2001-05-29
申请号：US09374505
申请日：1999-08-16
申请人： Chisako Oohara , Terumi Matsuoka , Takamichi Kishi , Takako Okuno
发明人： Chisako Oohara , Terumi Matsuoka , Takamichi Kishi , Takako Okuno
IPC分类号： C25B134
摘要： In a method of removing impurities, especially iodine and/or silica ions, from a salt solution to be used for electrolysis, the salt solution and zirconium hydroxide are brought into contact with each other under acidic conditions, and the zirconium hydroxide adsorbs the impurities. Thereafter, the zirconium hydroxide containing the adsorbed impurities is brought into contact with an aqueous solution at a higher pH value to desorb the impurities from the zirconium hydroxide, thereby enabling the zirconium hydroxide to be recycled.
摘要翻译： 在从用于电解的盐溶液中除去杂质，特别是碘和/或二氧化硅离子的方法中，在酸性条件下使盐溶液和氢氧化锆相互接触，氢氧化锆吸附杂质。 此后，将含有吸附杂质的氢氧化锆与较高pH值的水溶液接触以从氢氧化锆中除去杂质，从而使氢氧化锆能够再循环。
-
公开(公告)号：US5954928A
公开(公告)日：1999-09-21
申请号：US634355
申请日：1996-04-18
申请人： Takamichi Kishi , Osamu Arimoto
发明人： Takamichi Kishi , Osamu Arimoto
CPC分类号： C23C28/345 , C23C28/021 , C23C28/023 , C23C28/321 , C23C28/322 , C25B11/0478
摘要： In an activated cathode and a method for manufacturing the activated cathode, a first layer which contains nickel or cobalt as a main component is formed on a metal substrate, and a second layer which contains platinum or ruthenium as a main component is formed on the first layer. It is preferable that the first layer is formed of Raney nickel and the second layer has a large cathode working area, or it is also preferable that the first layer is formed of nickel oxide or cobalt oxide, and the second layer is formed of fine platinum or ruthenium particles and has a large cathode working area.
摘要翻译： 在活性阴极和活性阴极的制造方法中，在金属基板上形成以镍或钴为主要成分的第一层，在第一层上形成含有铂或钌作为主要成分的第二层 层。 优选的是，第一层由阮内镍制成，第二层具有大的阴极工作面积，或者也优选第一层由氧化镍或氧化钴形成，第二层由细铂 或钌颗粒，并具有大的阴极工作面积。
-
7.发明授权
公开(公告)号：US4539083A
公开(公告)日：1985-09-03
申请号：US634523
申请日：1984-07-26
申请人： Yasushi Samejima , Minoru Shiga , Toshiji Kano , Takamichi Kishi
发明人： Yasushi Samejima , Minoru Shiga , Toshiji Kano , Takamichi Kishi
摘要： Disclosed is a method for preventing a low hydrogen overvoltage cathode from degradation in activity characterized by adding a reducing agent to a cathode compartment of an electrolytic cell which electrolysis an aqueous alkali metal halide solution. According to the invention, no degradation takes place even after repeated shutdown of operation.
摘要翻译： 公开了一种防止低氢过电压阴极的活性降低的方法，其特征在于向电解池中的碱金属卤化物水溶液电解电解槽的阴极室添加还原剂。 根据本发明，即使在重复关闭操作之后也不会发生劣化。
-
公开(公告)号：US09145642B2
公开(公告)日：2015-09-29
申请号：US13322729
申请日：2010-05-18
申请人： Kazuhiro Kurosu , Keigo Watanabe , Takamichi Kishi
发明人： Kazuhiro Kurosu , Keigo Watanabe , Takamichi Kishi
摘要： A continuous cooking process making use of a digester, which includes therein, from a top toward a bottom of the digester, a top zone, an upper cooking zone, a lower cooking zone and a cooking/washing zone and also includes strainers provided at the bottom of the respective zones and wherein a cooking black liquor extracted from at least one of the strainers is discharged to outside a digestion system, a process for cooking a lignocellulose characterized by feeding, upstream of the top of the digester, a first cooking liquor containing an alkaline cooking liquor having a specified composition, feeding a second cooking liquor of an alkaline cooking liquor made mainly of sodium hydroxide to the upper cooking zone, and feeding a third cooking liquor of an alkaline cooking liquor similar to the second cooking liquor to the cooking/washing zone.
摘要翻译： 使用包括其中的消化器从蒸煮器的顶部到底部的蒸煮器的连续烹饪过程，顶部区域，上部烹饪区域，下部烹饪区域和烹饪/洗涤区域，并且还包括设置在蒸煮器 底部，并且其中从至少一个过滤器提取的烹饪黑液排出到消化系统的外部，用于烹饪木质纤维素的方法，其特征在于，在蒸煮器顶部的上游供给含有 将具有特定组成的碱性蒸煮液，将主要由氢氧化钠制成的碱性蒸煮液的第二蒸煮液供给到上部烹饪区域，并将与第二烹饪液类似的碱性蒸煮液的第三蒸煮液送入烹饪 /洗涤区。
-
公开(公告)号：US07776204B2
公开(公告)日：2010-08-17
申请号：US11156593
申请日：2005-06-21
申请人： Terumi Hashimoto , Takamichi Kishi
发明人： Terumi Hashimoto , Takamichi Kishi
CPC分类号： C25B1/46
摘要： The invention provides an ion exchange membrane electrolytic process unlikely to undergo any current density drop even when brine having a concentration lower than usual. Electrolysis occurs while the concentration of an aqueous solution of an alkaline metal chloride in an anode chamber partitioned by a cation exchange membrane is set at 2.7 mol/l to 3.3 mol/l, and a gap is provided between the cation exchange membrane and the anode.
摘要翻译： 本发明提供即使当浓度低于通常浓度的盐水时，也不会发生任何电流密度下降的离子交换膜电解过程。 在由阳离子交换膜分隔的阳极室中的碱金属氯化物水溶液的浓度设定为2.7mol / l〜3.3mol / l时发生电解，并且在阳离子交换膜与阳极之间设置间隙 。
-
公开(公告)号：US20050279644A1
公开(公告)日：2005-12-22
申请号：US11156593
申请日：2005-06-21
申请人： Terumi Hashimoto , Takamichi Kishi
发明人： Terumi Hashimoto , Takamichi Kishi
CPC分类号： C25B1/46
摘要： The invention provides an ion exchange membrane electrolytic process unlikely to undergo any current density drop even when brine having a concentration lower than usual. Electrolysis occurs while the concentration of an aqueous solution of an alkaline metal chloride in an anode chamber partitioned by a cation exchange membrane is set at 2.7 mol/l to 3.3 mol/l, and a gap is provided between the cation exchange membrane and the anode.
摘要翻译： 本发明提供即使当浓度低于通常浓度的盐水时，也不会发生任何电流密度下降的离子交换膜电解过程。 在由阳离子交换膜分隔的阳极室中的碱金属氯化物水溶液的浓度设定为2.7mol / l〜3.3mol / l时发生电解，并且在阳离子交换膜与阳极之间设置间隙 。
-
-
-
-
-
-
-
-
-
搜索结果
16 条记录 (耗时 0.033 秒)
