公开(公告)号：US5334257A

公开(公告)日：1994-08-02

申请号：US66416

申请日：1993-05-25

申请人： Hironobu Nishi ,  Kazuo Terada

发明人： Hironobu Nishi ,  Kazuo Terada

IPC分类号： H01L21/22 ,  H01L21/673 ,  H01L21/677 ,  B05C13/02

CPC分类号： H01L21/67781 ,  Y10S269/903 ,  Y10S414/137 ,  Y10S414/138

摘要： A plurality of ring trays supporting loaded treatment objects are arranged in parallel at predetermined spacing in the vertical axis direction and are supported by rods at a minimum of three locations separated from the rod couplings. Cutouts are provided in each ring tray that do not extend to the ring tray center open area. Supporting teeth are provided on the arms driven by drive devices and are inserted via the cutouts. The supporting teeth straddle the ring tray and are shifted relatively on both sides of the vertical direction, and can exchange the wafers between the ring tray and the supporting teeth. By this, problems occurring with regard to various types of heat treatment of the treatment objects, such as treatment object slippage, can be prevented. In addition, a plurality of treatment objects can be exchanged at one time, thereby allowing the exchanging time to be shortened.

摘要翻译： 支撑负载的处理对象的多个环形托盘在垂直轴线方向上以预定的间隔平行布置，并且在与杆联接件分开的至少三个位置处被杆支撑。 每个环形托盘上都设有不延伸到环形托盘中心开放区域的切口。 支撑齿设置在由驱动装置驱动的臂上，并经由切口插入。 支撑齿跨越环形托盘并相对于垂直方向的两侧相对移动，并且可以在环形托盘和支撑齿之间交换晶片。 由此，可以防止对处理对象的各种热处理（例如处理对象滑动）产生的问题。 此外，可以一次交换多个处理对象，从而可以缩短交换时间。

公开(公告)号：US5131799A

公开(公告)日：1992-07-21

申请号：US617872

申请日：1990-11-26

申请人： Hironobu Nishi ,  Kenichi Yamaga ,  Takanobu Asano

发明人： Hironobu Nishi ,  Kenichi Yamaga ,  Takanobu Asano

IPC分类号： H01L21/00 ,  H01L21/205 ,  H01L21/22 ,  H01L21/673 ,  H01L21/677

CPC分类号： H01L21/67313 ,  H01L21/67294 ,  H01L21/67326 ,  H01L21/67781 ,  Y10S414/136 ,  Y10S414/138 ,  Y10S414/14

摘要： A wafer transferring method for transferring wafers between a cassette and a boat having grooves to hold the wafers, comprises the steps of providing an identification mechanism for positional alignment on the boat in advance, detecting the identification mechanism, and aligning the boat to a predetermined position based on a detection result and transferring the wafers from the cassette to the boat. A wafer transferring apparatus comprises a loading device for extracting wafers from a cassette and transferring the wafers onto a boat, a detection device for detecting an identification section provided on the boat in order to identify a wafer transferring position on the boat, a control device for acquiring the wafer transferring position on the boat based on a detection result attained from the detection device and controlling a mutual position between the boat and the cassette to come to a predetermined position.

公开(公告)号：US20120097075A1

公开(公告)日：2012-04-26

申请号：US13121846

申请日：2010-05-13

申请人： Toyoharu Nawa ,  Hironobu Nishi ,  Susumu Hashizume ,  Kazutoshi Toda ,  Jun Kakutou ,  Hiroshi Ohshima ,  Syou Suzuki

发明人： Toyoharu Nawa ,  Hironobu Nishi ,  Susumu Hashizume ,  Kazutoshi Toda ,  Jun Kakutou ,  Hiroshi Ohshima ,  Syou Suzuki

IPC分类号： C04B24/02 ,  C07C15/00 ,  C07C13/00 ,  C07C9/00 ,  C07C11/00

CPC分类号： C04B40/0039 ,  C04B24/00 ,  C04B24/36 ,  C04B28/02 ,  C04B2111/29 ,  C04B2111/34 ,  C04B24/32

摘要： It is an object of the present invention to provide a durability improving agent for a cement composition that improves the freezing-thawing resistance of the cement composition and also exhibits a sufficient shrinkage reducing performance as well, and a cement composition including such a durability improving agent. Specifically, the present invention provides a durability improving agent for a cement composition, characterized by comprising a hydrocarbon-based compound having an average molecular weight of 150 to 600 and a pour point of 20° C. or less as an active ingredient, and a cement composition including such durability improving agent.

摘要翻译： 本发明的目的是提供一种提高水泥组合物的抗冻融性的水泥组合物用耐久性改善剂，并且还具有充分的收缩性降低性能，以及含有耐久性改善剂 。 具体地说，本发明提供一种水泥组合物用耐久性改善剂，其特征在于，含有作为有效成分的平均分子量为150〜600，倾点为20℃以下的烃类化合物， 水泥组合物，包括这种耐久性改进剂。

公开(公告)号：US06827814B2

公开(公告)日：2004-12-07

申请号：US09849880

申请日：2001-05-04

申请人： Hiroki Taniyama ,  Shigenori Kitahara ,  Takanori Miyazaki ,  Hironobu Nishi ,  Yoshinori Kato

发明人： Hiroki Taniyama ,  Shigenori Kitahara ,  Takanori Miyazaki ,  Hironobu Nishi ,  Yoshinori Kato

IPC分类号： H01L21027

CPC分类号： H01L21/6708 ,  H01L21/67051

摘要： An edge remover is provided in the vicinity of an edge portion of a wafer subjected to copper plating. An aqueous hydrogen peroxide is supplied to the edge portion of the wafer from a first nozzle provided at an inner side for a radial direction of the wafer. Next, diluted hydrofluoric acid is supplied to the edge portion of the wafer from a second nozzle provided at an outer side for the radial direction thereof.

摘要翻译： 在经过镀铜的晶片的边缘部分附近设置边缘去除器。 从设置在晶片的径向内侧的第一喷嘴向晶片的边缘部分供给过氧化氢水溶液。 接下来，稀释的氢氟酸从设置在其径向外侧的第二喷嘴供给到晶片的边缘部分。

公开(公告)号：US5178639A

公开(公告)日：1993-01-12

申请号：US723382

申请日：1991-06-28

申请人： Hironobu Nishi

发明人： Hironobu Nishi

IPC分类号： H01L21/00 ,  H01L21/677

CPC分类号： H01L21/67757 ,  H01L21/67109 ,  H01L21/67173 ,  Y10S414/138 ,  Y10S414/14 ,  Y10T29/413

摘要： A vertical heat-treating apparatus which is effective for preventing dust or fine particles from being attached to a wafer during the loading/unloading or transport of the wafer thereby to manufacture a high-quality wafers. This apparatus comprises a carrier stocker storing a plurality of wafer carriers, a loading/unloading mechanism for transferring the wafers between the wafer carriers and a heat-treating vessel, a plurality of heat-treating furnaces for heat-treating the wafers, a transport mechanism for transporting the heat-treating vessel to and from the vertical heat-treating furnace, and gas supply means for forming a clear gas stream passing exclusively through the loading/unloading mechanism and/or the transport mechanism.

摘要翻译： 一种垂直热处理装置，其有效地防止在晶片的加载/卸载或输送期间灰尘或细颗粒附着于晶片，从而制造高质量的晶片。 该装置包括存储多个晶片载体的载体储料器，用于在晶片载体和热处理容器之间传送晶片的装载/卸载机构，用于热处理晶片的多个热处理炉，输送机构 用于将热处理容器运送到垂直热处理炉和从垂直热处理炉运送热气处理容器;以及气体供应装置，用于形成仅通过装载/卸载机构和/或运输机构的澄清气流。

公开(公告)号：US08674058B2

公开(公告)日：2014-03-18

申请号：US13121846

申请日：2010-05-13

申请人： Toyoharu Nawa ,  Hironobu Nishi ,  Susumu Hashizume ,  Kazutoshi Toda ,  Jun Kakutou ,  Hiroshi Ohshima ,  Syou Suzuki

发明人： Toyoharu Nawa ,  Hironobu Nishi ,  Susumu Hashizume ,  Kazutoshi Toda ,  Jun Kakutou ,  Hiroshi Ohshima ,  Syou Suzuki

IPC分类号： C08G61/02 ,  C08G61/04 ,  C08G61/00 ,  C08G65/34

CPC分类号： C04B40/0039 ,  C04B24/00 ,  C04B24/36 ,  C04B28/02 ,  C04B2111/29 ,  C04B2111/34 ,  C04B24/32

摘要： It is an object of the present invention to provide a durability improving agent for a cement composition that improves the freezing-thawing resistance of the cement composition and also exhibits a sufficient shrinkage reducing performance as well, and a cement composition including such a durability improving agent. Specifically, the present invention provides a durability improving agent for a cement composition, characterized by comprising a hydrocarbon-based compound having an average molecular weight of 150 to 600 and a pour point of 20° C. or less as an active ingredient, and a cement composition including such durability improving agent.

摘要翻译： 本发明的目的是提供一种提高水泥组合物的抗冻融性的水泥组合物用耐久性改善剂，并且还具有充分的收缩性降低性能，以及含有耐久性改善剂 。 具体地说，本发明提供一种水泥组合物用耐久性改善剂，其特征在于，含有作为有效成分的平均分子量为150〜600，倾点为20℃以下的烃类化合物， 水泥组合物，包括这种耐久性改进剂。

公开(公告)号：US5482558A

公开(公告)日：1996-01-09

申请号：US430478

申请日：1995-04-28

申请人： Shingo Watanabe ,  Mitsuo Mizukami ,  Hironobu Nishi

发明人： Shingo Watanabe ,  Mitsuo Mizukami ,  Hironobu Nishi

IPC分类号： C30B25/12 ,  C30B31/14 ,  H01L21/205 ,  H01L21/22 ,  H01L21/31 ,  H01L21/324 ,  H01L21/673 ,  C23C16/00 ,  F27B1/10

CPC分类号： C30B31/14 ,  H01L21/67303 ,  H01L21/67309

摘要： A heat treatment boat for mounting a number of disc-shaped objects to be treated at a vertical interval for heat treatment thereof in a vertical heat treatment furnace comprises arcuate or ring-shaped support members provided on support rods at a vertical interval for supporting the objects to be treated in surface contact with the undersides of peripheral parts of the objects to be treated. The heat treatment boat is disposed on a ring-shaped intermediate member of high radiant heat absorption disposed on a heat insulating cylinder. The heat treatment boat comprises support rods which are planted on an annular support member circumferentially in accordance with a contour of the objects to be treated and whose upper ends are secured to an annular fixation member. The heat treatment boat of such constitution can reduce occurrences of slips in the disc-shaped objects when heat treated.

摘要翻译： 在垂直热处理炉中用于安装待处理的多个圆盘形物体进行热处理的热处理船包括以垂直间隔设置在支撑杆上的弓形或环形支撑构件，用于支撑物体 被处理与待处理物体的周边部分的下侧面接触。 热处理舟配置在隔热筒上设置的高辐射吸热性环状中间构件。 热处理舟包括根据待处理物体的轮廓周向地种植在环形支撑构件上的支撑杆，其上端固定在环形固定构件上。 这种结构的热处理舟可以在热处理时减少圆盘形物体中滑动的发生。

公开(公告)号：US5356261A

公开(公告)日：1994-10-18

申请号：US103666

申请日：1993-08-10

申请人： Hironobu Nishi

发明人： Hironobu Nishi

IPC分类号： B65G49/07 ,  H01L21/22 ,  H01L21/677 ,  H01L21/68 ,  B65G69/00

CPC分类号： H01L21/68 ,  Y10S414/138 ,  Y10S414/14

摘要： A wafer boat rotating apparatus is disclosed, which includes a boat holding portion for holding both ends of the wafer boat, a vertical rotation drive mechanism for rotating the boat holding portion on a vertical plane, and a horizontal rotation drive mechanism for rotating the boat holding portion on a horizontal plane. A wafer holding member is disposed on the boat holding portion and adapted to keep the wafers held in the wafer boat apart from a bottom portion of the wafer boat by a small distance. Thus, compensation for the difference of coefficients of thermal expansion between the wafers and wafer boat during heat treatment can be made easily.

摘要翻译： 公开了一种晶片舟旋转装置，其包括用于保持晶片舟皿的两端的船只保持部分，用于使船只保持部分在垂直平面上旋转的垂直旋转驱动机构，以及用于使船体保持部分旋转的水平旋转驱动机构 部分在水平面上。 晶片保持构件设置在舟状物保持部分上并且适于将保持在晶片舟皿中的晶片与晶片舟皿的底部隔开一小段距离。 因此，可以容易地对热处理期间的晶片和晶片舟皿之间的热膨胀系数的差异进行补偿。

公开(公告)号：US5030057A

公开(公告)日：1991-07-09

申请号：US266651

申请日：1988-11-03

申请人： Hironobu Nishi ,  Kenichi Yamaga ,  Takanobu Asano ,  Kazutoshi Sawado ,  Masashi Fumoto ,  Shozo Ito ,  Yoshinori Mochizuki

发明人： Hironobu Nishi ,  Kenichi Yamaga ,  Takanobu Asano ,  Kazutoshi Sawado ,  Masashi Fumoto ,  Shozo Ito ,  Yoshinori Mochizuki

IPC分类号： H01L21/00 ,  H01L21/205 ,  H01L21/22 ,  H01L21/673 ,  H01L21/677

CPC分类号： H01L21/67313 ,  H01L21/67294 ,  H01L21/67326 ,  H01L21/67781 ,  Y10S414/136 ,  Y10S414/138 ,  Y10S414/14

摘要： A wafer transferring method for transferring wafers between a cassette and a boat having grooves to hold the wafers, comprises the steps of providing an identification mechanism for positional alignment on the boat in advance, detecting the identification mechanism, and aligning the boat to a predetermined position based on a detection result and transferring the wafers from the cassette to the boat. A wafer transferring apparatus comprises a loading device for extracting wafers from a cassette and transferring the wafers onto a boat, a detection device for detecting an identification section provided on the boat in order to identify a wafer transferring position on the boat, and a control device for acquiring the wafer transferring position on the boat based on a detection result attained from the detection device and controlling a mutual position between the boat and the cassette to come to a predetermined position.

摘要翻译： 一种晶片转印方法，用于在具有用于保持晶片的槽的盒和舟皿之间转移晶片，包括以下步骤：提供用于在船上进行位置对准的识别机构，检测识别机构，以及将船对准到预定位置 基于检测结果并将晶片从盒转移到船。 晶片转印装置包括用于从盒中提取晶片并将晶片转移到船上的装载装置，用于检测设置在船上的识别部分以识别船上的晶片转移位置的检测装置，以及控制装置 用于基于从检测装置获得的检测结果获取船上的晶片转移位置，并控制船和盒之间的相互位置到达预定位置。

公开(公告)号：US4947784A

公开(公告)日：1990-08-14

申请号：US281026

申请日：1988-12-07

申请人： Hironobu Nishi

发明人： Hironobu Nishi

IPC分类号： H01L21/00 ,  B65G49/07 ,  H01L21/677

CPC分类号： H01L21/67781

摘要： An apparatus for transferring wafers comprises a turntable for orienting a plurality of wafers which are loaded in a cassette, a lifting mechanism for lifting the wafers away from the cassette, a plurality of opening/closing chuck mechanisms, and a slide movement mechanism for conveying the wafers which are held by the opening/closing mechanism onto a boat. The cassette on the turntable is turned selectively through an angle of 180.degree. and wafers are lifted by the link mechanism all at a time and selectively held by the opening/closing chuck mechanism. The wafers thus held are conveyed to a location of a boat where they are loaded onto the boat in a face-to-face relation.

摘要翻译： 用于转移晶片的设备包括用于定向装载在盒中的多个晶片的转台，用于将晶片远离盒子的提升机构，多个打开/关闭卡盘机构，以及用于传送 由开/关机构保持在船上的晶片。 转台上的磁带盒选择性地转动180°的角度，并且晶片被连杆机构一次提升并且被打开/关闭卡盘机构选择性地保持。 将如此保持的晶片传送到船的位置，在那里它们以面对面的关系装载到船上。