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公开(公告)号：US5551966A
公开(公告)日：1996-09-03
申请号：US181126
申请日：1994-01-13
申请人： Chisai Hirose , Hiroo Kanamori , Akira Urano , Shinji Ishikawa , Haruhiko Aikawa , Masahide Saito
发明人： Chisai Hirose , Hiroo Kanamori , Akira Urano , Shinji Ishikawa , Haruhiko Aikawa , Masahide Saito
CPC分类号： G02B6/136 , C03C13/045 , G02B6/132
摘要： In the method for forming an optical waveguide according to this invention, an optical waveguide comprising a core of quartz as a main component, and a cladding layers surrounding the core is formed by deposition of glass fine particles by flame hydrolysis deposition and vitrifying the glass fine particle layers. This method includes a step of transiently increasing a feed amount of phosphorus to a flame burner in forming glass fine particle layers to be the cladding layers. Feeding phosphorus in this step for the first time after a glass fine particle layer is deposited without feeding phosphorus to the flame burner, whereby generation of foreign objects near the core dan be suppressed. The method for fabricating an optical waveguide according to this invention is for fabricating a core 132a or cladding layers 122 142 surrounding the core 132a by flame hydrolysis deposition and is characterized in that the glass fine particle layers are vitrified after the deposition of the phosphorus-content glass fine particle layer, whereby glass films 122a, 122b with a thickness of below 10 .mu.m are formed. This glass film forming step is repeated twice or more times to form the core or the glass layers to be the cladding layers surrounding the core. This invention can suppress inhomogeneous vitrified films and especially can make phosphorus concentrations in the cladding layers uniform. As a result, prapagation losses can be made small.
摘要翻译： 在本发明的光波导形成方法中，以石英为核心的光波导和围绕芯的包层形成，通过火焰水解沉积玻璃微粒并使玻璃微细化 颗粒层。 该方法包括在形成作为包覆层的玻璃微粒子层时，向火焰燃烧器短暂地增加磷的供给量的步骤。 在玻璃微粒层沉积后，在该步骤中首先进料磷，而不向磷火焰炉供给磷，从而抑制在核心附近产生异物。 根据本发明的制造光波导的方法是通过火焰水解沉积来制造围绕芯132a的芯132a或包层122 142，其特征在于在沉积磷含量之后玻璃微粒层被玻璃化 玻璃微粒层，由此形成厚度低于10μm的玻璃膜122a，122b。 将该玻璃成膜工序重复两次以上，形成作为芯周围的包层的芯或玻璃层。 本发明可以抑制不均匀的玻璃化膜，特别是可以使包层中的磷浓度均匀。 因此，可以减少预算损失。
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公开(公告)号：US5556442A
公开(公告)日：1996-09-17
申请号：US264301
申请日：1994-06-23
申请人： Hiroo Kanamori , Akira Urano , Haruhiko Aikawa , Shinji Ishikawa , Chisai Hirose , Masahide Saito
发明人： Hiroo Kanamori , Akira Urano , Haruhiko Aikawa , Shinji Ishikawa , Chisai Hirose , Masahide Saito
CPC分类号： C03B19/1453 , C03B19/14 , C03C17/02 , G02B6/13 , G02B2006/12038
摘要： A process for forming film structure using Flame Hydrolysis Deposition (FHD) in which (1) glass soot is deposited on a substrate via FHD to form a first porous vitreous layer having a first bulk density, (2) a second porous vitreous layer having a second bulk density that is larger than the first bulk density is formed from a portion of the first porous vitreous layer, and (3) a third porous vitreous layer having a third bulk density is formed by depositing glass soot containing a refractive index increasing dopant on the second porous vitreous layer by FHD. The first, second and third porous vitreous layers are then heated to form an undercladding layer and a core layer, the undercladding layer being formed from the first and second porous vitreous layers and the core layer being formed from the third porous vitreous layer.
摘要翻译： 使用火焰水解沉积（FHD）形成膜结构的方法，其中（1）玻璃烟炱通过FHD沉积在基底上，以形成具有第一堆积密度的第一多孔玻璃质层，（2）第二多孔玻璃质层，其具有 大于第一堆积密度的第二堆积密度由第一多孔玻璃质层的一部分形成，并且（3）通过将含有折射率增加掺杂剂的玻璃烟灰沉积在第三堆积密度上而形成第三多孔玻璃质层 FHD第二个多孔玻璃质层。 然后将第一，第二和第三多孔玻璃质层加热以形成下包层和芯层，底层由第一和第二多孔玻璃质层形成，芯层由第三多孔玻璃质层形成。
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公开(公告)号：US5385594A
公开(公告)日：1995-01-31
申请号：US986001
申请日：1992-12-04
申请人： Hiroo Kanamori , Akira Urano , Haruhiko Aikawa , Shinji Ishikawa , Chisai Hirose , Masahide Saito
发明人： Hiroo Kanamori , Akira Urano , Haruhiko Aikawa , Shinji Ishikawa , Chisai Hirose , Masahide Saito
CPC分类号： C03B19/1453 , C03B19/14 , C03C17/02 , G02B6/13 , G02B2006/12038
摘要： In the first step, a fuel and raw material gases are fed to burner while flames from the burner scan a Si substrate. Synthesized fine glass particles are deposited on the substrate to form a first porous vitreous layer to be an under cladding layer. In the second step, the first porous vitreous layer is heated by the flames. A bulk density of an upper part of the first porous vitreous layer is raised to 0.3 g/cm.sup.3. Having a raised bulk density, this upper part functions as a shield layer against GeO.sub.2. In the third step, a second porous vitreous layer, to be a core layer, is deposited uniformly on the first porous vitreous layer. In the fourth step, the first and the second porous vitreous layers are sintered. In this case, the shield layer with a higher bulk density hinders the GeO.sub.2 component which has evaporated from the second porous vitreous layer from diffusing into the first porous vitreous layer.
摘要翻译： 在第一步中，燃料和原料气体被送入燃烧器，而来自燃烧器的火焰扫描Si衬底。 合成的细微玻璃颗粒沉积在基底上以形成第一多孔玻璃质层作为下敷层。 在第二步骤中，第一多孔玻璃质层被火焰加热。 将第一多孔玻璃质层的上部的体积密度提高到0.3g / cm 3。 具有凸起的堆积密度，该上部用作抵抗GeO 2的屏蔽层。 在第三步骤中，将作为芯层的第二多孔玻璃质层均匀地沉积在第一多孔玻璃质层上。 在第四步骤中，第一和第二多孔玻璃质层被烧结。 在这种情况下，具有较高堆积密度的屏蔽层阻碍从第二多孔玻璃质层蒸发的GeO 2组分扩散到第一多孔玻璃质层中。
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公开(公告)号：US5660611A
公开(公告)日：1997-08-26
申请号：US463866
申请日：1995-06-05
申请人： Shinji Ishikawa , Akira Urano , Haruhiko Aikawa , Chizai Hirose , Hiroo Kanamori , Masahide Saitoh
发明人： Shinji Ishikawa , Akira Urano , Haruhiko Aikawa , Chizai Hirose , Hiroo Kanamori , Masahide Saitoh
IPC分类号： C03B19/14 , C03C17/00 , C03C17/02 , C23C14/10 , C23C16/44 , C23C16/453 , C03B37/07 , C03C25/02
CPC分类号： C03B19/1453 , C03B19/14 , C03B19/1415 , C03C17/001 , C03C17/02 , C23C14/10 , C23C16/44 , C23C16/453 , C03B2207/90
摘要： A method for producing an oxide glass thin film is provided, in which volatilization of additives in a porous film from which the thin film is formed is effectively suppressed, and which the oxide glass film has a desired arrangement of refractive index with a low optical loss. According to this method, glass fine particles mainly containing SiO.sub.2 with a first additive are deposited on a substrate to form a porous thin film. A gas containing a second additive is supplied to a first chamber and heated to a first predetermined temperature profile to provide a heated gas containing an oxide. After disposing the substrate in a second chamber communicated with the first chamber, the substrate is heated to make the deposited porous glass into transparent glass while controlling a temperature in the second chamber according to a second temperature profile. A carrier gas is flowed from the first chamber to the second chamber to transfer the heated gas and oxide from the first chamber to the second chamber during heating. The temperature of the first predetermined temperature profile is maintained higher than the temperature of the second predetermined temperature profile at the same time. In addition, the heated gas contains a component that is also present in the first additive.
摘要翻译： 提供了一种制造氧化物玻璃薄膜的方法，其中有效地抑制了形成薄膜的多孔膜中的添加剂的挥发，并且氧化物玻璃薄膜具有期望的折射率排列，光损耗低 。 根据该方法，将主要含有SiO 2的第一添加剂的玻璃微粒子沉积在基板上，形成多孔薄膜。 将含有第二添加剂的气体供应到第一室并加热至第一预定温度分布，以提供含有氧化物的加热气体。 在将基板设置在与第一室连通的第二室中之后，基板被加热以使沉积的多孔玻璃成为透明玻璃，同时根据第二温度曲线控制第二室中的温度。 载气从第一室流到第二室，以在加热期间将加热的气体和氧化物从第一室转移到第二室。 第一预定温度曲线的温度同时保持高于第二预定温度曲线的温度。 此外，加热气体含有也存在于第一添加剂中的成分。
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5.发明授权Method for producing a glass thin film with controlloing an oxide vapor of an additive 失效用添加剂的氧化物蒸气调制玻璃薄膜的方法
公开(公告)号：US5503650A
公开(公告)日：1996-04-02
申请号：US330602
申请日：1994-10-28
申请人： Shinji Ishikawa , Akira Urano , Haruhiko Aikawa , Chizai Hirose , Hiroo Kanamori , Masahide Saitoh
发明人： Shinji Ishikawa , Akira Urano , Haruhiko Aikawa , Chizai Hirose , Hiroo Kanamori , Masahide Saitoh
IPC分类号： C03B19/14 , C03C17/00 , C03C17/02 , C23C14/10 , C23C16/44 , C23C16/453 , C03B37/018
CPC分类号： C03B19/1453 , C03B19/14 , C03B19/1415 , C03C17/001 , C03C17/02 , C23C14/10 , C23C16/44 , C23C16/453 , C03B2207/90
摘要： A method of producing an oxide glass thin film includes a process to obtain a transparent glass film, in which volatilization of additives in a porous film deposited is effectively suppressed and which can provide an oxide glass thin film having a desired arrangement of refractive index with a low optical loss. The method is for producing an oxide glass thin film, in which glass fine particles mainly containing SiO.sub.2 with additives are deposited on a substrate to form a porous thin film and then heated to form a transparent glass film. In the method, vapor of oxides of additive components is mixed in an atmosphere in which the porous thin film is heated to form the transparent glass film, whereby stopping the volatilization of the additives in the porous film deposited, preventing diffusion of the additives added to a core layer, and preventing the volatilization of glass transition temperature lowering components of additives (P.sub.2 O.sub.5, B.sub.2 O.sub.3, GeO.sub.2, etc.). By these, a desired arrangement of refractive index may be obtained, and an oxide glass thin film may be obtained while lowering the optical loss such as the optical scattering, which could be caused by bubbles in an unsintered portion.
摘要翻译： 制造氧化物玻璃薄膜的方法包括获得透明玻璃膜的方法，其中有效地抑制了沉积的多孔膜中的添加剂的挥发，并且可以提供具有期望的折射率布置的氧化物玻璃薄膜 光损耗低。 该方法用于生产氧化物玻璃薄膜，其中主要含有SiO 2的玻璃微粒子添加剂沉积在基底上以形成多孔薄膜，然后加热形成透明玻璃膜。 在该方法中，添加成分的氧化物蒸气在多孔薄膜被加热的气氛中混合，形成透明玻璃膜，由此停止多孔膜中的添加剂的挥发，防止添加添加剂的扩散 核心层，并且防止添加剂（P 2 O 5，B 2 O 3，GeO 2等）的玻璃化转变温度降低成分的挥发。 通过这些，可以获得期望的折射率布置，并且可以在降低可能由未烧结部分中的气泡引起的光学散射等光损耗的同时获得氧化物玻璃薄膜。
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公开(公告)号：US5193137A
公开(公告)日：1993-03-09
申请号：US765243
申请日：1991-09-25
申请人： Sumio Hoshino , Hiroo Kanamori , Masumi Ito , Shinji Ishikawa , Haruhiko Aikawa
发明人： Sumio Hoshino , Hiroo Kanamori , Masumi Ito , Shinji Ishikawa , Haruhiko Aikawa
IPC分类号： G02B6/122 , G02B6/13 , G02B6/132 , G02F1/35 , G02F1/355 , G02F1/361 , G02F1/365 , H01S3/06 , H01S3/063 , H01S3/07 , H01S3/108
摘要： A quartz optical waveguide comprising a support, a quartz glass core part formed on said support and a part which surrounds said core part and has a lower refractive index than that of said core part, wherein said core part and/or a part of said lower refractive index part through which light is guided have a functional material waveguide film containing a functional material, which has a function such as laser amplification or a linear optical effect.
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公开(公告)号：US5243677A
公开(公告)日：1993-09-07
申请号：US911744
申请日：1992-07-10
申请人： Hiroo Kanamori , Masumi Ito , Shinji Ishikawa , Haruhiko Aikawa , Sumio Hoshino
发明人： Hiroo Kanamori , Masumi Ito , Shinji Ishikawa , Haruhiko Aikawa , Sumio Hoshino
CPC分类号： G02B6/1342 , G02B6/122
摘要： A quartz optical waveguide comprising a substrate, a ridge-form core part formed on said substrate and a part which surrounds said core part and has a lower refractive index than that of said core part, wherein a refractive index changes continuously at an interface between said core part and said part having the lower refractive index, which has a decreased transmission loss and a connection loss when connected with an optical fiber.
摘要翻译： 一种石英光波导，包括基板，形成在所述基板上的脊形芯部分和围绕所述芯部的折射率低于所述芯部折射率的部分，其中折射率在所述芯部的界面处连续变化 芯部分和具有较低折射率的所述部分，当与光纤连接时具有降低的传输损耗和连接损耗。
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公开(公告)号：US5179614A
公开(公告)日：1993-01-12
申请号：US762306
申请日：1991-09-20
申请人： Hiroo Kanamori , Masumi Ito , Shinji Ishikawa , Haruhiko Aikawa , Sumio Hoshino
发明人： Hiroo Kanamori , Masumi Ito , Shinji Ishikawa , Haruhiko Aikawa , Sumio Hoshino
CPC分类号： G02B6/1342 , G02B6/122
摘要： A quartz optical waveguide comprising a substrate, a ridge-form core part formed on said substrate and a part which surrounds said core part and has a lower refractive index than that of said core part, wherein a refractive index changes continuously at an interface between said core part and said part having the lower refractive index, which has a decreased transmission loss and a connection loss when connected with an optical fiber.
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公开(公告)号：US5673345A
公开(公告)日：1997-09-30
申请号：US634257
申请日：1996-04-18
申请人： Masahide Saito , Shigeru Semura , Shinji Ishikawa , Dai Yui , Hiroo Kanamori
发明人： Masahide Saito , Shigeru Semura , Shinji Ishikawa , Dai Yui , Hiroo Kanamori
CPC分类号： G02B6/4248 , G02B6/30
摘要： The present invention relates to a package in which an optical waveguide module is mounted, at least having such structure as to reduce influence of expansion or contraction (thermal stress) of a metal housing, caused with a temperature change of the external environment and applied on junction parts between an optical waveguide substrate and members for fixedly supporting tip portions of input and output optical fibers. This package comprises a cavity for housing the whole of the optical waveguide module as covered with a buffer protection material, and a metal housing having through holes for leading the above optical fibers to the outside. Particularly, the optical fibers and the through holes are bonded and secured with a filler having higher airtightness than the buffer protection material and having a lower tensile modulus than a metal material forming the housing.
摘要翻译： 本发明涉及一种其中安装光波导模块的封装，其至少具有减少金属外壳的膨胀或收缩（热应力）对外部环境的温度变化引起的影响的结构，并应用于 光波导基板与用于固定地支撑输入和输出光纤的尖端部分的部件之间的接合部分。 该封装包括一个用缓冲保护材料覆盖的整个光波导模块的空腔，以及具有用于将上述光纤引导到外部的通孔的金属外壳。 特别地，光纤和通孔用比缓冲保护材料高的气密性的填料粘结固定，并且具有比形成外壳的金属材料低的拉伸模量。
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公开(公告)号：US5446820A
公开(公告)日：1995-08-29
申请号：US98908
申请日：1993-07-29
CPC分类号： G02B6/2552
摘要： An object of this invention is to provide a mode field diameter conversion optical fiber which can be processed in a short period of time to have a reduced mode field diameter at a desired portion thereof. The optical fiber according to this invention comprises a core of silica glass having a residual tensile stress, and a cladding surrounding the core and having a lower refractive index than that of the core. The desired portion is heated to relax the residual tensile stress in the core, whereby the optical fiber has a reduced mode field diameter at the desired portion.
摘要翻译： 本发明的目的是提供一种可以在短时间内处理以在其期望部分具有减小的模场直径的模场直径转换光纤。 根据本发明的光纤包括具有残余拉伸应力的石英玻璃芯和围绕芯的包层，并且折射率低于芯的折射率。 加热所需部分以松弛芯中的残余拉伸应力，由此光纤在期望部分具有减小的模场直径。
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