Angular velocity sensor
    3.
    发明申请
    Angular velocity sensor 审中-公开
    角速度传感器

    公开(公告)号:US20070256496A1

    公开(公告)日:2007-11-08

    申请号:US11785457

    申请日:2007-04-18

    IPC分类号: G01P15/08

    CPC分类号: G01C19/5628

    摘要: An angular velocity sensor includes: first and second tuning-fork vibrators, each of which respectively includes a base portion and multiple arm portions extending from the base portion; and a mounting portion mounting the first and second tuning-fork vibrators, and an end of an arm portion of the first tuning-fork vibrator opposes a side face of the second tuning-fork vibrator; and a first wire connecting the first tuning-fork vibrator and the mounting portion extends in a width direction of the first tuning-fork vibrator.

    摘要翻译: 角速度传感器包括:第一和第二音叉振动器,其分别包括基部和从基部延伸的多个臂部; 以及安装所述第一和第二音叉振动器的安装部分,并且所述第一音叉振子的臂部的一端与所述第二音叉振动器的侧面相对; 连接第一音叉振子和安装部的第一线在第一音叉振子的宽度方向上延伸。

    Angular velocity sensor
    4.
    发明申请
    Angular velocity sensor 审中-公开
    角速度传感器

    公开(公告)号:US20070022827A1

    公开(公告)日:2007-02-01

    申请号:US11492090

    申请日:2006-07-25

    IPC分类号: G01L3/18

    CPC分类号: G01C19/5719

    摘要: An angular velocity sensor includes a first gimbal portion, a second gimbal portion connected to the first gimbal portion by first torsion bars provided at opposing sides of the first gimbal portion, a frame portion connected to the second gimbal portion by second torsion bars provided at the opposing sides of the second gimbal portion, first electrostatic coupling portions provided at the opposing sides of the first gimbal portion to electrostatically couple the first gimbal portion and the second gimbal portion, and second electrostatic coupling portions provided at the opposing sides of the second gimbal portion to electrostatically couple the second gimbal portion and the frame portion. In the first gimbal portion, a maximum width of sides of a direction of the first torsion bars is greater than that of the sides where the first torsion bars are provided.

    摘要翻译: 角速度传感器包括第一万向架部分,第一万向架部分,通过设置在第一万向架部分的相对侧的第一扭杆连接到第一万向节部分;框架部分,通过设置在第一万向节部件上的第二扭杆连接到第二万向节部分 第二万向节部分的相对侧,设置在第一万向架部分相对侧的第一静电耦合部分,以静电耦合第一万向节部分和第二万向节部分;以及设置在第二万向节部分的相对侧的第二静电耦合部分 以静电耦合第二万向节部分和框架部分。 在第一万向节部分中,第一扭杆的方向的最大宽度的宽度大于设置第一扭杆的侧面的最大宽度。

    Angular velocity sensor
    5.
    发明申请
    Angular velocity sensor 审中-公开
    角速度传感器

    公开(公告)号:US20080210007A1

    公开(公告)日:2008-09-04

    申请号:US12010249

    申请日:2008-01-23

    IPC分类号: G01P9/04

    CPC分类号: G01C19/5712 G01C19/5628

    摘要: An angular velocity sensor includes: a first tuning-fork vibrator having a first base and first aims extending from the first base in a first direction; a second tuning-fork vibrator having a second bass and second arms extending from the second base in a second direction; and a double gimbal portion mat has a drive gimbal portion vibrating about an axis extending in a fourth direction, and a sense gimbal portion vibrating about an axis extending in a fifth direction and senses an angular velocity about an axis extending in a third direction.

    摘要翻译: 角速度传感器包括:第一音叉振子,具有第一基座和第一目标,从第一基座沿第一方向延伸; 具有第二低音和第二臂的第二音叉振子,所述第二音叉和第二臂在第二方向上从所述第二基座延伸; 并且双云母部分垫具有绕围绕第四方向延伸的轴线振动的驱动万向节部分和围绕沿第五方向延伸的轴线振动的感测万向节部分,并感测围绕在第三方向延伸的轴线的角速度。

    Packaged micro movable device and method for making the same
    9.
    发明申请
    Packaged micro movable device and method for making the same 审中-公开
    包装微动移动装置及其制造方法

    公开(公告)号:US20090139328A1

    公开(公告)日:2009-06-04

    申请号:US12071862

    申请日:2008-02-27

    摘要: A method is provided for making packaged micro-devices each including a micro movable element, a first packaging member formed with a recess, and a second packaging member formed with another recess. The micro movable element has a movable part. In accordance with the method, a device wafer is prepared for forming a plurality of micromovable elements. A first packaging wafer, formed with a plurality of recesses corresponding in position to the movable parts of the respective movable elements, is bonded to one surface of the device wafer. A second packaging wafer, formed with a plurality of recesses, is bonded to the other surface of the device wafer. The resulting laminate assembly is cut into separate products.

    摘要翻译: 提供一种用于制造包括微型可移动元件,形成有凹部的第一包装构件和形成有另一凹部的第二包装构件的包装微型装置的方法。 微动元件具有可动部。 根据该方法,制备用于形成多个微型可移动元件的器件晶片。 形成有与相应可移动元件的可移动部分相对应的多个凹部的第一封装晶片被结合到器件晶片的一个表面。 形成有多个凹部的第二封装晶片被接合到器件晶片的另一个表面。 将所得的层压组件切割成单独的产品。

    Vibration sensor
    10.
    发明申请
    Vibration sensor 审中-公开
    振动传感器

    公开(公告)号:US20070277614A1

    公开(公告)日:2007-12-06

    申请号:US11808138

    申请日:2007-06-06

    IPC分类号: G01H11/06 G01P9/04 G01P1/04

    CPC分类号: G01H11/08

    摘要: A vibration sensor includes a vibration body, a drive circuit that vibrates the vibration body, a sense circuit that refers to a reference signal associated with a drive signal for the drive circuit and detects a physical state of the vibration body on the basis of a sense signal related to vibration of the vibration body, and a capacitor provided between the drive circuit and ground. The capacitor has a temperature characteristic of a capacitance value defined so as to compensate for at least a part of the temperature characteristic of a sensitivity of the sense signal to the vibration of the vibration body.

    摘要翻译: 振动传感器包括:振动体,使振动体振动的驱动电路;感测电路,其参考与驱动电路的驱动信号相关联的参考信号,并根据感觉检测振动体的物理状态 与振动体的振动有关的信号,以及设置在驱动电路和地之间的电容器。 电容器具有电容值的温度特性,其定义为补偿感测信号对振动体的振动的灵敏度的温度特性的至少一部分。