摘要:
A linear pulse motor including: a stator; a movable member, the stator and the movable member each having a face to oppose to each other; a supporting mechanism for supporting the movable member, the supporting mechanism having a plurality of rolling members rotatably mounted thereon, said rolling members being placed between the stator and the movable member to be in rolling contact with the stator and the movable member so that a gap is formed between said opposing faces of the stator and the movable member to thereby enable the movable member to move parallel to the opposing face of the stator along a line of travel thereof, the supporting mechanism being movable on the stator along said line of travel; and a positive motion transferring mechanism for positively transferring movement of the movable member to the supporting mechanism so that the supporting mechanism is in displacement a half of the movable member, whereby the movable member is moved by generating a magnetic flux between said gap when the linear pulse motor is energized.
摘要:
A stepping motor includes a primary side magnetic flux generator unit having a plurality of magnetic poles and a secondary side magnetic member provided rotatably in the primary side magnetic flux generator, characterized in the primary side magnetic flux generator unit generating a magnetic flux passing through a magnetic flux path formed by at least two of the magnetic poles and the secondary side magnetic member to produce an attraction force between the magnetic poles and the secondary side magnetic members for thereby moving one of the primary side magnetic flux generator unit and the secondary side magnetic member, the magnetic poles having coils respectively provided therebetween and having a semihard magnetic member provided over tip ends thereof forming a magnetic flux path among a plurality of the magnetic poles, the semihard magnetic member being magnetized by a magnetic flux produced in the magnetic flux path every time the magnetic flux is produced, the semihard magnetic member producing a magnetic flux directed in the opposite direction to that of a residual magnetic flux formed between each of the magnetic poles and a secondary side magnetic member when the primary side magnetic flux generator means stops the generation of the magnetic flux, thereby cancelling the residual magnetic flux.
摘要:
A linear pulse motor which includes: a primary magnetic flux generating unit composed of a pair of cores each having a coil wound therearound and a plurality of magnetic poles provided at end portions thereof; and a scale having a row of first teeth formed therein along a direction of relative travel thereof with respect to the magnetic flux generating unit, the scale and the flux generating unit being disposed so that the scale relatively moves with respect to the primary magnetic flux generating unit by generating magnetic flux between gaps formed between the magnetic poles and the teeth facing to the magnetic poles. The magnetic flux generating unit includes a spacer through which the cores are jointed in a parallel manner. Each core has a pair of arms and a substantially U shape, the core being provided on each end of the arms thereof with the magnetic pole. The magnetic flux generating unit is disposed with respect to the scale so that the cores are placed in one of both a direction parallel to and a direction perpendicular to the row of teeth.
摘要:
A supporting mechanism for a movable member of a linear pulse motor in which a magnetic flux is generated in a gap defined between opposing faces of a stator and a movable member so that the movable member is movable parallel to the opposing face of the stator along a linear passage. The supporting mechanism includes a pair of holding members disposed above the stator; a plurality of first rolling members, rotatably held in the holding members to be in rolling contact with the movable member and the stator and to form the gap, for movably supporting the movable member; a pair of guide members, opposingly disposed on the stator across the linear passage, for defining opposite sides of the linear passage; and a plurality of second rolling members, rotatably held in the holding member to be in rolling contact with the guide members and opposite lateral edges of the movable member.
摘要:
An object of the present invention is to provide a linear actuator in which reliability is improved, and performance is also easily improved. The present invention provides a linear actuator including a stator, a movable element having an iron member, and being reciprocatable with respect to the stator, a permanent magnet fixed to the stator so as to be opposed to the iron member, and a coil fixed to the stator. Because both the coil and the permanent magnet are fixed to the stator, electrical current does not have to be supplied to the movable element, and the feeder lines connected to the coil will not be broken due to the movement of the movable element. In addition, the weight of the movable element will not be increased even when the weigh of the permanent magnet is increased in order to obtain high magnetic flux density for improvement in performance. Moreover, because the movable element does not include a magnet, a magnetizing operation does not have to be applied to the movable element. The permanent magnets may be a pair in which the directions the magnetic poles thereof differ from each other, and two pairs of permanent magnets may be provided. The number of magnetic fluxes that run through the magnetic pole elements and the iron member can be increased by providing a magnetic reluctance section around the permanent magnets.
摘要:
An object of the present invention is to provide a linear actuator in which reliability is improved, and performance is also easily improved. The present invention provides a linear actuator including a stator, a movable element having an iron member, and being reciprocatable with respect to the stator, a permanent magnet fixed to the stator so as to be opposed to the iron member, and a coil fixed to the stator. Because both the coil and the permanent magnet are fixed to the stator, electrical current does not have to be supplied to the movable element, and the feeder lines connected to the coil will not be broken due to the movement of the movable element. In addition, the weight of the movable element will not be increased even when the weigh of the permanent magnet is increased in order to obtain high magnetic flux density for improvement in performance. Moreover, because the movable element does not include a magnet, a magnetizing operation does not have to be applied to the movable element. The permanent magnets may be a pair in which the directions the magnetic poles thereof differ from each other, and two pairs of permanent magnets may be provided. The number of magnetic fluxes that run through the magnetic pole elements and the iron member can be increased by providing a magnetic reluctance section around the permanent magnets.
摘要:
An object of the present invention is to provide a linear actuator in which reliability is improved, and performance is also easily improved. The present invention provides a linear actuator including a stator, a movable element having an iron member, and being reciprocatable with respect to the stator, a permanent magnet fixed to the stator so as to be opposed to the iron member, and a coil fixed to the stator. Because both the coil and the permanent magnet are fixed to the stator, electrical current does not have to be supplied to the movable element, and the feeder lines connected to the coil will not be broken due to the movement of the movable element. In addition, the weight of the movable element will not be increased even when the weigh of the permanent magnet is increased in order to obtain high magnetic flux density for improvement in performance. Moreover, because the movable element does not include a magnet, a magnetizing operation does not have to be applied to the movable element. The permanent magnets may be a pair in which the directions the magnetic poles thereof differ from each other, and two pairs of permanent magnets may be provided. The number of magnetic fluxes that run through the magnetic pole elements and the iron member can be increased by providing a magnetic reluctance section around the permanent magnets.
摘要:
A strong magnetic thrust force type actuator includes a first type of actuator, the permanent magnets of which are inserted between plate members of the primary magnetic member. When a coil disposed upon the primary magnetic member is energized magnetic flux flows from a facing portion formed with a secondary magnetic member to one of the plate members, and then, to an adjacent plate member through one of the permanent magnets. Within this adjacent plate member, additional magnetic flux flows therein from another adjacent plate member through another permanent magnet. In a second type of actuator, the permanent magnets of which are inserted between side surfaces of facing portions formed with the secondary magnetic member, a magnetic flux flows from a facing portion formed with the primary magnetic member to a facing portion of the secondary magnetic member, and then, to an adjacent facing portion through of the secondary magnetic member through means of a permanent magnet, and within this adjacent facing portion, additional magnetic flux flows from another adjacent facing portion through means of another permanent magnet. Thus, as long as the pulse current flows within the coils wound around the primary magnetic member, all facing portions of the primary magnetic member contribute to the production of the magnetic thrust.
摘要:
A vacuum processing apparatus includes a vacuum chamber capable of keeping a first pressure lower than an atmospheric pressure, a driving source disposed in the vacuum chamber, an electric power supply mechanism including a primary side mechanism disposed outside the vacuum chamber for supplying electric power to the driving source and a secondary side mechanism disposed in the vacuum chamber for receiving the electric power from the primary side mechanism in a contactless relationship, and a vessel capable of accommodating airtightly the secondary side mechanism under a second pressure higher than the first pressure.
摘要:
A motor driving apparatus has first, second, and third positive-side driving transistors having drains which are supplied with a power supply voltage, first, second, and third negative-side driving transistors having sources which are grounded and drains which are connected to sources of the first, second, and third positive-side driving transistors, respectively, a power supply monitoring circuit which monitors the power supply voltage and outputs a driving mode switching signal which has a first value if the power supply voltage is not less than a predetermined value and has a second value if the power supply voltage is less than the predetermined value, and an output PWM control section which switches a mode of driving from synchronous rectification PWM driving to one-way PWM driving on the basis of a change of the driving mode switching signal from the second value to the first value.