Optimum value search apparatus and method, recording medium, and computer program product
    2.
    发明授权
    Optimum value search apparatus and method, recording medium, and computer program product 有权
    最优值搜索装置和方法,记录介质和计算机程序产品

    公开(公告)号:US08195433B2

    公开(公告)日:2012-06-05

    申请号:US11624230

    申请日:2007-01-18

    IPC分类号: G06F7/60 G06F17/10

    摘要: This invention provides an optimum value search apparatus, method, recording medium, and computer program product used in designing, analyzing, or testing a device having a plurality of factors that have effects on a characteristic. In this method, an orthogonal array is generated by setting level values obtained from the initial values of the factors to the coordinates of a two-dimensional table including a matrix of the characteristics and the factors. From the characteristics on the orthogonal array, characteristic values obtained on the basis of combinations of the level values of the factors of a single characteristic are grasped. A combination having a most excellent characteristic value is selected. The level values of the factors in the characteristic corresponding to the selected combination are reset in the orthogonal array. After resetting, processes are repeatedly executed to search for an optimum value as a most excellent one of the characteristic values.

    摘要翻译: 本发明提供了一种用于设计,分析或测试具有影响特性的多个因素的装置的最佳值搜索装置,方法,记录介质和计算机程序产品。 在该方法中,通过将从因子的初始值获得的等级值设置为包括特征矩阵和因子的二维表的坐标来生成正交阵列。 根据正交阵列的特性,掌握基于单个特征的因子的电平值的组合而获得的特征值。 选择具有最优异特征值的组合。 对应于所选组合的特性中的因子的电平值在正交阵列中被复位。 在复位之后,重复执行处理以搜索最佳值作为特征值中最优秀的值。

    Steam valve
    3.
    发明授权
    Steam valve 有权
    蒸汽阀

    公开(公告)号:US07604021B2

    公开(公告)日:2009-10-20

    申请号:US10533396

    申请日:2003-10-29

    IPC分类号: F01D17/10 F16K31/06

    摘要: A steam valve in accordance with the present invention is the steam valve that houses a first valve device 21 composed of a valve seat, a valve body, a valve rod, and a driving device, and a second valve device 22 composed of the valve seat, the valve body, the valve rod, and the driving device, combined with each other in the valve casing 23, and a closing portion 41 to block a part of a main steam flow flowing from outside to inside of a strainer is formed in the strainer 27 that is housed in the valve casing 23 and that surrounds the valve body 29 of the first valve device. According to the above described configuration, the steam valve that is aimed to further decrease a pressure loss can be provided by effectively controlling the steam flow in the strainer housed in the valve casing.

    摘要翻译: 根据本发明的蒸汽阀是容纳由阀座,阀体,阀杆和驱动装置构成的第一阀装置21的蒸汽阀,以及由阀座构成的第二阀装置22 ,阀体,阀杆和驱动装置,在阀壳体23中彼此结合,并且封闭部分41阻挡从过滤器的外部流入内部的主蒸汽流的一部分,形成在 过滤器27,其容纳在阀壳体23中并且围绕第一阀装置的阀体29。 根据上述结构,可以通过有效地控制容纳在阀壳体中的过滤器中的蒸汽流量来提供旨在进一步降低压力损失的蒸汽阀。

    Steam valve
    4.
    发明申请
    Steam valve 有权
    蒸汽阀

    公开(公告)号:US20050268973A1

    公开(公告)日:2005-12-08

    申请号:US10533396

    申请日:2003-10-29

    IPC分类号: F01D17/14 F16K47/08 F01D17/10

    摘要: A steam valve in accordance with the present invention is the steam valve that houses a first valve device 21 composed of a valve seat, a valve body, a valve rod, and a driving device, and a second valve device 22 composed of the valve seat, the valve body, the valve rod, and the driving device, combined with each other in the valve casing 23, and a closing portion 41 to block a part of a main steam flow flowing from outside to inside of a strainer is formed in the strainer 27 that is housed in the valve casing 23 and that surrounds the valve body 29 of the first valve device. According to the above described configuration, the steam valve that is aimed to further decrease a pressure loss can be provided by effectively controlling the steam flow in the strainer housed in the valve casing.

    摘要翻译: 根据本发明的蒸汽阀是容纳由阀座,阀体,阀杆和驱动装置构成的第一阀装置21的蒸汽阀,以及由阀座构成的第二阀装置22 ,阀体,阀杆和驱动装置,在阀壳体23中彼此结合,并且封闭部分41阻挡从过滤器的外部流入内部的主蒸汽流的一部分,形成在 过滤器27,其容纳在阀壳体23中并且围绕第一阀装置的阀体29。 根据上述结构,可以通过有效地控制容纳在阀壳体中的过滤器中的蒸汽流量来提供旨在进一步降低压力损失的蒸汽阀。

    INTERFERENCE MICROSCOPE AND MEASURING APPARATUS
    5.
    发明申请
    INTERFERENCE MICROSCOPE AND MEASURING APPARATUS 审中-公开
    干涉显微镜和测量装置

    公开(公告)号:US20120120485A1

    公开(公告)日:2012-05-17

    申请号:US13322851

    申请日:2009-09-11

    IPC分类号: G02B21/06 G01B11/02

    摘要: In an interference microscope and a measuring device for observing and inspecting the surface and inside of a specimen such as a wafer by applying laser light to the specimen and using an interferometer, a reference optical path for conducting light is provided between a beam splitter and a reference mirror, and a measurement optical path for conducting light is provided between the beam splitter and the specimen, thereby providing an optical path difference between the reference optical path and the measurement optical path. Further, the reference mirror is tilted slightly, thereby forming interference fringes on detection means. It is possible to measure the surface shape of the specimen (measurement object) such as a wafer only by slightly tilting the reference mirror with a simple configuration and locate the accurate coordinate positions of foreign particles and pole pieces.

    摘要翻译: 在干涉显微镜和测量装置中,通过向样本施加激光并使用干涉仪来观察和检查诸如晶片的样品的表面和内部的测量装置,在分束器和光束分离器之间提供用于导光的参考光路 在分束器和样本之间设置参考反射镜和用于导光的测量光路,从而在参考光路和测量光路之间提供光程差。 此外,参考镜稍微倾斜,从而在检测装置上形成干涉条纹。 可以通过简单的结构轻微地倾斜参考反射镜来测量诸如晶片的样品(测量对象)的表面形状,并且定位异物和极片的精确坐标位置。

    Operator guiding system
    6.
    发明授权
    Operator guiding system 有权
    操作员指导系统

    公开(公告)号:US07222021B2

    公开(公告)日:2007-05-22

    申请号:US10232839

    申请日:2002-09-03

    IPC分类号: G01V3/38

    CPC分类号: G01C15/00

    摘要: A base station is installed in a predetermined area where a large number of target points are studded around the station. When the operator moves a mobile station around the base station, display means is provided for both or either of the base station that guides the operator and the mobile station, and a display screen of the display means displays 2 kinds of a Forward (foreground) mode and a Back (background) mode. In the Forward (foreground) mode, the display screen of the display means displays a landscape in a forward direction (opposite direction to the mobile station by 180° when seen from the base station) of the operator (mobile station) when the operator sees the base station from the current position of the mobile station, or from the next target point if the operator reaches the next target point. In the Back (backward) mode, the display screen of the display means displays the landscape in a backward direction (direction of the operator and the mobile station when seen from the base station) of the operator (mobile station) when the operator sees the base station from the current position of the mobile station, or from the next target point if the operator reaches the next target point. The relationship between the mobile station and the next target point is displayed on an imaginary landscape in an imaginary manner so that the operator can see the direction and distance for movement.

    摘要翻译: 基站安装在站周围大量目标点的预定区域中。 当操作者在基站周围移动移动台时,为指导操作员和移动台的基站中的任一个或任一个提供显示装置,并且显示装置的显示屏幕显示2种前进(前景) 模式和后退(背景)模式。 在前进(前进)模式中,当操作者看见时,显示装置的显示屏幕在操作者(移动台)看到时,向前方向(与移动站相反方向(与基站相反方向)显示180度) 基站从移动站的当前位置,或者从下一个目标点到达下一个目标点。 在后退(倒退)模式下,当操作者看到操作者(移动台)时,显示装置的显示画面向后方(从操作者和移动台的方向观察)显示横向 基站从移动站的当前位置,或者如果操作者到达下一个目标点,则从下一个目标点开始。 移动台和下一个目标点之间的关系以假想的方式显示在想象的风景中,使得操作者可以看到移动的方向和距离。