公开(公告)号：US10538429B2

公开(公告)日：2020-01-21

申请号：US16030256

申请日：2018-07-09

Applicant: Hitachi, Ltd.

Inventor： Misuzu Sagawa ,  Atsushi Isobe

IPC: B81C99/00

Abstract: In a calculator in a MEMS manufacturing system, a stage control unit inclines a stage based on a stage angle 1 setting a stage inclination angle and a stage angle 2 of the inclination angle different from the stage angle 1. A stage-angle calculation unit calculates the stage inclination angles from first and second images acquired by a SEM apparatus when the stage control unit sets the stage at the stage angles 1 and 2. A 3D-data creation unit creates three-dimensional device data from a third image that is a device image acquired when the stage is set at the stage angle 1 and a fourth image that is a device image acquired when the stage is set at the stage angle 2. When the three-dimensional device data is created, a correction value calculated from the stage angles 1 and 2 and the first and second images is used.

公开(公告)号：US10527642B2

公开(公告)日：2020-01-07

申请号：US15511444

申请日：2014-11-11

Applicant: HITACHI, LTD.

Inventor： Atsushi Isobe ,  Noriyuki Sakuma ,  Chisaki Takubo ,  Yuudai Kamada ,  Takashi Shiota

IPC: G01P15/12 ,  G01P15/125

Abstract: An acceleration sensor (1) includes a fixed portion (33), a movable portion (31) connected to the fixed portion (33), a lower electrode (11) that is disposed to face a lower surface of the movable portion (31), and an upper electrode (21) that is disposed to face an upper surface of the movable portion (31). A distance in an x-axis direction between an end portion (41) of the lower electrode (11) and the fixed portion (33) is shorter than a distance in the x-axis direction between an end portion (51) of the upper electrode (21) and the fixed portion (33). Further, a distance in the x-axis direction between an end portion (42) of the lower electrode (11) and the fixed portion (33) is shorter than a distance in the x-axis direction between an end portion (52) of the upper electrode (21) and the fixed portion (33).

公开(公告)号：US10160644B1

公开(公告)日：2018-12-25

申请号：US15918502

申请日：2018-03-12

Applicant: Hitachi, Ltd.

Inventor： Masaharu Kinoshita ,  Atsushi Isobe ,  Kazuo Ono ,  Noriyuki Sakuma ,  Tomonori Sekiguchi ,  Keiji Watanabe

IPC: B81C1/00 ,  B81B3/00 ,  G01N29/24 ,  B06B1/02

Abstract: A manufacturing method of a MEMS sensor includes a step of, by irradiating a first hole formed in a second layer on a semiconductor substrate with a focused ion beam for a first predetermined time, forming a first sealing film, which seals the first hole, on the first hole, and a step of, by irradiating a second hole formed in the second layer with a focused ion beam for a second predetermined time, forming a second sealing film, which seals the second hole, on the second hole. At this time, each of the first predetermined time and the second predetermined time is a time in which thermal equilibrium of the second layer is maintainable, and the step of forming the first sealing film and the step of forming the second sealing film are performed repeatedly.

公开(公告)号：US20180238929A1

公开(公告)日：2018-08-23

申请号：US15932213

申请日：2018-02-16

Applicant: Hitachi, Ltd.

Inventor： Atsushi Isobe ,  Yuudai Kamada ,  Chisaki Takubo ,  Noriyuki Sakuma ,  Tomonori Sekiguchi

IPC: G01P15/125 ,  G01P15/097

Abstract: A membrane (mass body) included in an acceleration sensor includes a moving portion, a moving portion electrically separated from the moving portion, and a mechanical junction portion that mechanically connects the moving portion and the moving portion in a y-axis direction. The mechanical junction portion includes a first portion extending in a direction having a first angle with respect to the y-axis direction and a second portion extending in a direction having a second angle different from the first angle with respect to the y-axis direction in an xy plane, and is formed to have a non-linear shape in an x-axis direction.

公开(公告)号：US09958472B2

公开(公告)日：2018-05-01

申请号：US14822419

申请日：2015-08-10

Applicant: HITACHI, LTD.

Inventor： Yuudai Kamada ,  Atsushi Isobe ,  Noriyuki Sakuma ,  Takashi Oshima ,  Yuki Furubayashi

IPC: G01P15/125 ,  G01P15/08

CPC classification number: G01P15/125 ,  B81B3/0086 ,  B81B2201/0235 ,  B81B2203/0109 ,  G01P2015/0831 ,  G01P2015/0837

Abstract: A low-noise and high-sensitivity inertial sensor is provided.On the assumption that a movable portion VU1 and a movable portion VU2 are formed in the same SOI layer, the movable portion VU1 and the movable portion VU2 are mechanically connected to each other by a mechanical coupling portion MCU even while these movable portions are electrically isolated from each other. Thereby, according to a sensor element SE in the invention, it is possible to further suppress a shift between the capacitance of a MEMS capacitor 1 and the capacitance of a MEMS capacitor 2.

公开(公告)号：US10989733B2

公开(公告)日：2021-04-27

申请号：US15756279

申请日：2016-11-08

Applicant: HITACHI, LTD.

Inventor： Yuudai Kamada ,  Atsushi Isobe ,  Noriyuki Sakuma ,  Takashi Shiota ,  Chisaki Takubo

IPC: G01P15/125 ,  G01P15/13 ,  G01V1/28 ,  G01V1/00 ,  G01R19/00 ,  G01V1/18 ,  G01V1/30 ,  G01P15/08

Abstract: Provided are acceleration sensor, geophone and seismic prospecting system with high sensitivity and low power consumption. The acceleration sensor includes a mass body displaceable with respect to a rotation shaft. The acceleration sensor includes a first AC servo control facing a first symmetrical region of the first movable portion, a second AC servo control electrode facing a second symmetrical region of the second movable portion, and a DC servo control electrode facing an asymmetrical region of the second movable portion. A first AC servo capacitive element is formed by the first movable portion and the first AC servo control electrode, a second AC servo capacitive element is formed by the second movable portion and the second AC servo control electrode, and a DC servo capacitive element is formed by the second movable portion and the DC servo control electrode.

公开(公告)号：US10527643B2

公开(公告)日：2020-01-07

申请号：US15742550

申请日：2015-07-10

Applicant: Hitachi, Ltd.

Inventor： Atsushi Isobe ,  Yuki Furubayashi ,  Takashi Oshima ,  Yuudai Kamada ,  Takashi Shiota ,  Chisaki Takubo ,  Noriyuki Sakuma

IPC: G01P15/125 ,  G01P15/08 ,  G01P15/13 ,  G01P15/18

Abstract: There is provided an inertia sensor with low noise and high sensitivity. The inertia sensor captures a physical quantity as a change of electrostatic capacitance and detects the physical quantity based on a servo voltage generating electrostatic force that cancels the change of the electrostatic capacitance. The inertia sensor includes a detection capacitor unit that captures the physical quantity as the change of the electrostatic capacitance and a servo capacitor unit to which the servo voltage is applied. Here, the detection capacitor unit and the servo capacitor unit are connected mechanically through an insulation material.

公开(公告)号：US10935566B2

公开(公告)日：2021-03-02

申请号：US15671340

申请日：2017-08-08

Applicant: HITACHI, LTD.

Inventor： Yuudai Kamada ,  Atsushi Isobe ,  Noriyuki Sakuma ,  Chisaki Takubo ,  Tomonori Sekiguchi

IPC: G01P15/08 ,  G01P15/125 ,  B81B3/00 ,  G01P15/18 ,  H01H1/00 ,  H01H36/00

Abstract: Provided is an acceleration sensor having a large mass in a movable portion, and realizing high impact resistance. An acceleration sensor element 10a includes an upper substrate 20, a lower substrate 21 spaced apart from the upper substrate 20, and an intermediate substrate 19 provided between the upper substrate 20 and the lower substrate 21. Each of a first movable portion 16, a second movable portion 17, a frame portion 12, a fixed portion 13, and a spring portion 14 constituting the intermediate substrate 19 is configured with two layers of an upper layer and a lower layer, and a stopper portion 18 is provided at one end of the frame portion 12. A distance 31 between an end portion of the first movable portion 16 or the second movable portion 17 and an end portion of the stopper portion 18 in the upper layer and a distance 32 between an end portion of the first movable portion 16 or the second movable portion 17 and an end portion of the stopper portion 18 in the lower layer are different from each other.

公开(公告)号：US10802041B2

公开(公告)日：2020-10-13

申请号：US16127268

申请日：2018-09-11

Applicant: Hitachi, Ltd.

Inventor： Atsushi Isobe ,  Yuudai Kamada ,  Chisaki Takubo ,  Noriyuki Sakuma ,  Tomonori Sekiguchi

IPC: G01P15/125 ,  G01P15/08 ,  G01P15/18 ,  G01H11/06

Abstract: In an acceleration sensor detecting a vibration acceleration by using torsion of a beam joining a fixed portion and a membrane, a spring constant of the beam is decreased while an increase in a chip size due to extension of the beam is prevented, so that an acceleration sensor that is highly sensitive and small in a size is provided with a low price. A sensor of a capacitance detecting type includes a membrane having a stacking structure formed of two or more layers and a plurality of beams capable of twisting so that the membrane is movable in a detecting direction, a first beam of the plurality of beams is formed of the same layer as either an upper or a lower layer of the membrane, and a second beam thereof is formed of the same layer as either an upper or a lower layer of the movable portion.

公开(公告)号：US10802040B2

公开(公告)日：2020-10-13

申请号：US16064562

申请日：2016-04-18

Applicant: HITACHI, LTD.

Inventor： Atsushi Isobe ,  Takashi Shiota ,  Yuudai Kamada ,  Chisaki Takubo ,  Noriyuki Sakuma

IPC: G01P15/125 ,  G01P15/08

Abstract: An acceleration sensor has high sensitivity, low power consumption and high linearity of output to the applied acceleration under gravity. To solve the above problem, the acceleration sensor is provided with a movable section placed between a base substrate and a cap substrate and rotating about a rotation axis. A top left electrode included in the cap substrate and a left movable electrode included in the movable section form a left capacitor, and a top right electrode included in the cap substrate and a right movable electrode included in the movable section form a right capacitor. Then, a lateral width of a first detection region in which capacitance is detected between the top left electrode and the left movable electrode, and a lateral width of a second detection region in which capacitance is detected between the top right electrode and the right movable electrode are different from each other.