公开(公告)号：US20240161997A1

公开(公告)日：2024-05-16

申请号：US18282906

申请日：2021-04-16

Applicant: Hitachi High-Tech Corporation

Inventor： Takashi OHSHIMA ,  Naohiro KOHMU ,  Hideo MORISHITA ,  Tatsuro IDE ,  Yoichi OSE ,  Junichi KATANE ,  Toshihide AGEMURA

IPC: H01J37/073 ,  H01J37/147 ,  H01J37/26

CPC classification number: H01J37/073 ,  H01J37/1471 ,  H01J37/265

Abstract: A light source that emits pulse excitation light includes a laser light source, an optical splitter that splits a pulse laser beam into a plurality of pulse laser beams, phase adjusters and optical amplifiers provided for the pulse laser beams, and an optical combiner that combines the plurality of pulse laser beams whose phases are adjusted and that are amplified, and outputs combined light as the pulse excitation light. An optical phase controller controls phase delay amounts of the phase adjusters, and an optical monitor detects an inclination of the pulse excitation light relative to an optical axis of a focusing lens. The optical phase controller stores phase delay amount data indicating phase delay amounts of the plurality of phase adjusters in which the inclination is a predetermined value, and sets the phase delay amounts of the plurality of phase adjusters based on the phase delay amount data.

公开(公告)号：US20230335367A1

公开(公告)日：2023-10-19

申请号：US18028771

申请日：2020-11-10

Applicant: Hitachi High-Tech Corporation

Inventor： Takashi OHSHIMA ,  Hideo MORISHITA ,  Tatsuro IDE ,  Hiroyasu SHICHI ,  Yoichi OSE ,  Junichi KATANE

IPC: H01J37/06 ,  H01J37/28 ,  H01J37/244

CPC classification number: H01J37/06 ,  H01J37/28 ,  H01J37/244 ,  H01J2237/24535 ,  C23C14/14

Abstract: An activation mechanism is provided in an activation region of an electron gun, and includes a light source device 3 configured to irradiate a photocathode with excitation light, a heat generating element, an oxygen generation unit configured to generate oxygen by heating the heat generating element, and an emission current meter configured to monitor an emission current generated by electron emission when the photocathode 1 is irradiated with the excitation light from the light source device. In a surface activation process, the photocathode is irradiated with the excitation light from the light source device, an emission current amount of the photocathode is monitored by the emission current meter, the heat generating element is heated to generate oxygen by the oxygen generation unit, and the heating of the heat generating element is stopped when the emission current amount of the photocathode satisfies a predetermined stop criterion.

公开(公告)号：US20230274907A1

公开(公告)日：2023-08-31

申请号：US18016104

申请日：2020-09-28

Applicant: Hitachi High-Tech Corporation

Inventor： Teruo KOHASHI ,  Hideo MORISHITA ,  Tatsuro IDE ,  Junichi KATANE

IPC: H01J37/26

CPC classification number: H01J37/268 ,  H01J37/265 ,  H01J2237/24557 ,  H01J2237/30416

Abstract: To implement a charged particle beam device including an iron thin film spin detector. The charged particle beam device includes: a charged particle column 201 configured to perform scanning on a sample 203 with a charged particle beam 202; a spin detector including an iron thin film 207, a plurality of coils 208 configured to magnetize the iron thin film, a conveying lens 206 configured to focus, on the iron thin film, secondary electrons 204 emitted from the sample due to irradiation of the charged particle beam, and an electron detector 210 configured to detect backscattered electrons 209 emitted due to the iron thin film being irradiated with the secondary electrons; and a control unit 217 configured to control switching of a magnetization direction of the iron thin film in synchronization with scanning of one line with the charged particle beam from the charged particle column.

公开(公告)号：US20220406558A1

公开(公告)日：2022-12-22

申请号：US17798092

申请日：2020-03-25

Applicant: Hitachi High-Tech Corporation

Inventor： Hideo MORISHITA ,  Takashi OHSHIMA ,  Tatsuro IDE ,  Naohiro KOHMU ,  Toshihide AGEMURA ,  Yoichi OSE ,  Junichi KATANE

IPC: H01J37/073 ,  H01J1/34

Abstract: The electron gun is provided with a first anode electrode and a second anode electrode to generate an acceleration and deceleration electric field. A lens electric field makes it possible to irradiate a sample with an electron beam emitted from a part outside an optical axis of the photoelectric film without being blocked by a differential exhaust diaphragm. A wide range of electron beams off-optical axis can be used even in a high-brightness photocathode that requires high vacuum. As a result, the photoelectric film and the electron gun can be extended in life, can be stabilized, and can be increased in brightness. Further, it is possible to facilitate a control of emitting electron beams from a plurality of positions on the photoelectric film, a timing control of emitting electron beams from a plurality of positions, a condition control of an electron beam in an electron microscope using electron beams.