公开(公告)号：US20230335367A1

公开(公告)日：2023-10-19

申请号：US18028771

申请日：2020-11-10

Applicant: Hitachi High-Tech Corporation

Inventor： Takashi OHSHIMA ,  Hideo MORISHITA ,  Tatsuro IDE ,  Hiroyasu SHICHI ,  Yoichi OSE ,  Junichi KATANE

IPC: H01J37/06 ,  H01J37/28 ,  H01J37/244

CPC classification number: H01J37/06 ,  H01J37/28 ,  H01J37/244 ,  H01J2237/24535 ,  C23C14/14

Abstract: An activation mechanism is provided in an activation region of an electron gun, and includes a light source device 3 configured to irradiate a photocathode with excitation light, a heat generating element, an oxygen generation unit configured to generate oxygen by heating the heat generating element, and an emission current meter configured to monitor an emission current generated by electron emission when the photocathode 1 is irradiated with the excitation light from the light source device. In a surface activation process, the photocathode is irradiated with the excitation light from the light source device, an emission current amount of the photocathode is monitored by the emission current meter, the heat generating element is heated to generate oxygen by the oxygen generation unit, and the heating of the heat generating element is stopped when the emission current amount of the photocathode satisfies a predetermined stop criterion.

公开(公告)号：US20220406558A1

公开(公告)日：2022-12-22

申请号：US17798092

申请日：2020-03-25

Applicant: Hitachi High-Tech Corporation

Inventor： Hideo MORISHITA ,  Takashi OHSHIMA ,  Tatsuro IDE ,  Naohiro KOHMU ,  Toshihide AGEMURA ,  Yoichi OSE ,  Junichi KATANE

IPC: H01J37/073 ,  H01J1/34

Abstract: The electron gun is provided with a first anode electrode and a second anode electrode to generate an acceleration and deceleration electric field. A lens electric field makes it possible to irradiate a sample with an electron beam emitted from a part outside an optical axis of the photoelectric film without being blocked by a differential exhaust diaphragm. A wide range of electron beams off-optical axis can be used even in a high-brightness photocathode that requires high vacuum. As a result, the photoelectric film and the electron gun can be extended in life, can be stabilized, and can be increased in brightness. Further, it is possible to facilitate a control of emitting electron beams from a plurality of positions on the photoelectric film, a timing control of emitting electron beams from a plurality of positions, a condition control of an electron beam in an electron microscope using electron beams.

公开(公告)号：US20240161997A1

公开(公告)日：2024-05-16

申请号：US18282906

申请日：2021-04-16

Applicant: Hitachi High-Tech Corporation

Inventor： Takashi OHSHIMA ,  Naohiro KOHMU ,  Hideo MORISHITA ,  Tatsuro IDE ,  Yoichi OSE ,  Junichi KATANE ,  Toshihide AGEMURA

IPC: H01J37/073 ,  H01J37/147 ,  H01J37/26

CPC classification number: H01J37/073 ,  H01J37/1471 ,  H01J37/265

Abstract: A light source that emits pulse excitation light includes a laser light source, an optical splitter that splits a pulse laser beam into a plurality of pulse laser beams, phase adjusters and optical amplifiers provided for the pulse laser beams, and an optical combiner that combines the plurality of pulse laser beams whose phases are adjusted and that are amplified, and outputs combined light as the pulse excitation light. An optical phase controller controls phase delay amounts of the phase adjusters, and an optical monitor detects an inclination of the pulse excitation light relative to an optical axis of a focusing lens. The optical phase controller stores phase delay amount data indicating phase delay amounts of the plurality of phase adjusters in which the inclination is a predetermined value, and sets the phase delay amounts of the plurality of phase adjusters based on the phase delay amount data.

公开(公告)号：US20240128049A1

公开(公告)日：2024-04-18

申请号：US18572544

申请日：2021-08-31

Applicant: HITACHI HIGH-TECH CORPORATION

Inventor： Katsura TAKAGUCHI ,  Takashi OHSHIMA ,  Hideo MORISHITA ,  Yoichi OSE ,  Junichi KATANE ,  Toshihide AGEMURA ,  Michio HATANO

IPC: H01J37/244 ,  H01J37/26 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/265 ,  H01J37/28

Abstract: An object of the invention is to provide an electron microscope capable of obtaining a sufficient energy resolution without forming a long drift space and capable of attaining high energy discrimination detection performance with approximately the same device size as in the related art. The electron microscope according to the invention includes a pulsed electron emission mechanism configured to emit an electron beam in a pulsed manner, and discriminates energy of signal electrons by discriminating the signal electrons, which are emitted from a sample by irradiating the sample with the electron beam, according to a time of flight (see FIG. 2).

公开(公告)号：US20230402246A1

公开(公告)日：2023-12-14

申请号：US18036217

申请日：2020-12-22

Applicant: Hitachi High-Tech Corporation

Inventor： Hideo MORISHITA ,  Takashi OHSHIMA ,  Yoichi OSE ,  Toshihide AGEMURA ,  Makoto KUWAHARA

IPC: H01J37/073 ,  H01J3/02

CPC classification number: H01J37/073 ,  H01J3/021 ,  H01J2237/06333

Abstract: The apparatus includes: a photocathode including a substrate and a photoelectric film formed on the substrate; a light source configured to emit a pulsed excitation light; a condenser lens facing the substrate of the photocathode and configured to condense the pulsed excitation light toward the photocathode; a first anode electrode and a second anode electrode facing the photoelectric film of the photocathode; a first power supply configured to apply a first control voltage between the first anode electrode and the second anode electrode; and a second power supply configured to apply an acceleration voltage between the photocathode and the second anode electrode. The first anode electrode is disposed between the photocathode and the second anode electrode. A surface of the first anode electrode facing the second anode electrode has a recessed shape, and a surface of the second anode electrode facing the first anode electrode has a protruding shape.