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公开(公告)号：US20230335367A1
公开(公告)日：2023-10-19
申请号：US18028771
申请日：2020-11-10
发明人： Takashi OHSHIMA , Hideo MORISHITA , Tatsuro IDE , Hiroyasu SHICHI , Yoichi OSE , Junichi KATANE
IPC分类号： H01J37/06 , H01J37/28 , H01J37/244
CPC分类号： H01J37/06 , H01J37/28 , H01J37/244 , H01J2237/24535 , C23C14/14
摘要： An activation mechanism is provided in an activation region of an electron gun, and includes a light source device 3 configured to irradiate a photocathode with excitation light, a heat generating element, an oxygen generation unit configured to generate oxygen by heating the heat generating element, and an emission current meter configured to monitor an emission current generated by electron emission when the photocathode 1 is irradiated with the excitation light from the light source device. In a surface activation process, the photocathode is irradiated with the excitation light from the light source device, an emission current amount of the photocathode is monitored by the emission current meter, the heat generating element is heated to generate oxygen by the oxygen generation unit, and the heating of the heat generating element is stopped when the emission current amount of the photocathode satisfies a predetermined stop criterion.
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公开(公告)号：US20240249911A1
公开(公告)日：2024-07-25
申请号：US18290321
申请日：2021-07-30
申请人： Hitachi High-Tech Corporation , (NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM)
IPC分类号： H01J37/285 , G01N23/2251 , H01J37/26 , H01J37/28
CPC分类号： H01J37/285 , G01N23/2251 , H01J37/265 , H01J37/28 , G01N2223/3301 , G01N2223/612 , H01J2237/06383 , H01J2237/0653 , H01J2237/24557 , H01J2237/2812
摘要： Provided is a spin-polarized scanning electron microscope capable of improving an SNR of a detected signal. The spin-polarized scanning electron microscope includes: a spin-polarized electron source configured to irradiate a sample with a spin-polarized electron beam that is an electron beam whose spin is deflected in a specific direction; a scanning unit configured to scan the sample by deflecting the spin-polarized electron beam; a spin detector configured to detect a spin direction of an emitted electron that is an electron emitted from the sample scanned with the spin-polarized electron beam; and a control unit configured to control the spin direction to be detected by the spin detector based on the spin direction of the spin-polarized electron beam.
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公开(公告)号：US20220406558A1
公开(公告)日：2022-12-22
申请号：US17798092
申请日：2020-03-25
发明人： Hideo MORISHITA , Takashi OHSHIMA , Tatsuro IDE , Naohiro KOHMU , Toshihide AGEMURA , Yoichi OSE , Junichi KATANE
IPC分类号： H01J37/073 , H01J1/34
摘要： The electron gun is provided with a first anode electrode and a second anode electrode to generate an acceleration and deceleration electric field. A lens electric field makes it possible to irradiate a sample with an electron beam emitted from a part outside an optical axis of the photoelectric film without being blocked by a differential exhaust diaphragm. A wide range of electron beams off-optical axis can be used even in a high-brightness photocathode that requires high vacuum. As a result, the photoelectric film and the electron gun can be extended in life, can be stabilized, and can be increased in brightness. Further, it is possible to facilitate a control of emitting electron beams from a plurality of positions on the photoelectric film, a timing control of emitting electron beams from a plurality of positions, a condition control of an electron beam in an electron microscope using electron beams.
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公开(公告)号：US20240161997A1
公开(公告)日：2024-05-16
申请号：US18282906
申请日：2021-04-16
发明人： Takashi OHSHIMA , Naohiro KOHMU , Hideo MORISHITA , Tatsuro IDE , Yoichi OSE , Junichi KATANE , Toshihide AGEMURA
IPC分类号： H01J37/073 , H01J37/147 , H01J37/26
CPC分类号： H01J37/073 , H01J37/1471 , H01J37/265
摘要： A light source that emits pulse excitation light includes a laser light source, an optical splitter that splits a pulse laser beam into a plurality of pulse laser beams, phase adjusters and optical amplifiers provided for the pulse laser beams, and an optical combiner that combines the plurality of pulse laser beams whose phases are adjusted and that are amplified, and outputs combined light as the pulse excitation light. An optical phase controller controls phase delay amounts of the phase adjusters, and an optical monitor detects an inclination of the pulse excitation light relative to an optical axis of a focusing lens. The optical phase controller stores phase delay amount data indicating phase delay amounts of the plurality of phase adjusters in which the inclination is a predetermined value, and sets the phase delay amounts of the plurality of phase adjusters based on the phase delay amount data.
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公开(公告)号：US20240128049A1
公开(公告)日：2024-04-18
申请号：US18572544
申请日：2021-08-31
发明人： Katsura TAKAGUCHI , Takashi OHSHIMA , Hideo MORISHITA , Yoichi OSE , Junichi KATANE , Toshihide AGEMURA , Michio HATANO
IPC分类号： H01J37/244 , H01J37/26 , H01J37/28
CPC分类号： H01J37/244 , H01J37/265 , H01J37/28
摘要： An object of the invention is to provide an electron microscope capable of obtaining a sufficient energy resolution without forming a long drift space and capable of attaining high energy discrimination detection performance with approximately the same device size as in the related art. The electron microscope according to the invention includes a pulsed electron emission mechanism configured to emit an electron beam in a pulsed manner, and discriminates energy of signal electrons by discriminating the signal electrons, which are emitted from a sample by irradiating the sample with the electron beam, according to a time of flight (see FIG. 2).
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公开(公告)号：US20230402246A1
公开(公告)日：2023-12-14
申请号：US18036217
申请日：2020-12-22
IPC分类号： H01J37/073 , H01J3/02
CPC分类号： H01J37/073 , H01J3/021 , H01J2237/06333
摘要： The apparatus includes: a photocathode including a substrate and a photoelectric film formed on the substrate; a light source configured to emit a pulsed excitation light; a condenser lens facing the substrate of the photocathode and configured to condense the pulsed excitation light toward the photocathode; a first anode electrode and a second anode electrode facing the photoelectric film of the photocathode; a first power supply configured to apply a first control voltage between the first anode electrode and the second anode electrode; and a second power supply configured to apply an acceleration voltage between the photocathode and the second anode electrode. The first anode electrode is disposed between the photocathode and the second anode electrode. A surface of the first anode electrode facing the second anode electrode has a recessed shape, and a surface of the second anode electrode facing the first anode electrode has a protruding shape.
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7.发明申请公开(公告)号：US20210327674A1
公开(公告)日：2021-10-21
申请号：US17260612
申请日：2018-08-27
发明人： Toshiaki KUSUNOKI , Tomihiro HASHIZUME , Keigo KASUYA , Noriaki ARAI , Hiromitsu SEINO , Minoru KANEDA , Takashi OHSHIMA , Soichiro MATSUNAGA
IPC分类号： H01J37/065 , H01J37/10 , H01J37/147 , H01J37/244 , H01J37/28
摘要： The invention provides an electron source including a columnar chip of a hexaboride single crystal, a metal pipe that holds the columnar chip of the hexaboride single crystal, and a filament connected to the metal pipe at a central portion. The columnar chip of the hexaboride single crystal is formed into a cone shape at a portion closer to a tip than a portion held in the metal pipe, and a tip end portion having the cone shape has a (310) crystal face. Schottky electrons are emitted from the (310) crystal face. According to the invention, it is possible to provide a novel electron source having monochromaticity, long-term stability of an emitter current, and high current density.
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