公开(公告)号：US5272347A

公开(公告)日：1993-12-21

申请号：US968144

申请日：1992-10-29

申请人： Yoshihisa Oae ,  Akio Yamada ,  Hiroshi Yasuda

发明人： Yoshihisa Oae ,  Akio Yamada ,  Hiroshi Yasuda

IPC分类号： H01J37/141 ,  H01J37/21 ,  H01J37/305 ,  H01J37/317

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/1413 ,  H01J37/21 ,  H01J37/3174

摘要： An electron beam projection apparatus providing a magnetic refocusing lens for adjusting a focal position of an electron beam on an object. An axis of an auxiliary magnetic field produced by the magnetic refocusing lens is required equivalently to agree to that of a convergent magnetic field produced by a magnetic object lens. An inclination adjustment apparatus of the magnetic refocusing lens provides a rolling mechanism being independently rotatable on two axes being perpendicular to each other and also perpendicular to a direction of an axis of a convergent magnetic field. With this inclination adjustment apparatus, adjustment operation is improved.

摘要翻译： 一种提供用于调节物体上的电子束的焦点位置的磁性重聚焦透镜的电子束投影装置。 由磁性重聚焦透镜产生的辅助磁场的轴等同于与由磁性物镜产生的会聚磁场的轴相一致。 磁性重聚焦透镜的倾斜调节装置提供滚动机构，该滚动机构可以在彼此垂直并垂直于会聚磁场的轴的方向的两个轴上独立地旋转。 通过该倾斜调节装置，可以提高调整动作。

公开(公告)号：US09478389B2

公开(公告)日：2016-10-25

申请号：US14422374

申请日：2013-07-01

申请人： Hitachi High-Technologies Corporation

发明人： Tsunenori Nomaguchi ,  Toshihide Agemura

IPC分类号： H01J37/10 ,  H01J37/28 ,  H01J37/147 ,  H01J37/22 ,  H01J37/305 ,  H01J37/317 ,  H01J37/26 ,  H01J37/141 ,  H01J37/16 ,  H01J37/30

CPC分类号： H01J37/10 ,  H01J37/1413 ,  H01J37/1471 ,  H01J37/16 ,  H01J37/222 ,  H01J37/261 ,  H01J37/265 ,  H01J37/28 ,  H01J37/3005 ,  H01J37/305 ,  H01J37/3056 ,  H01J37/3178 ,  H01J2237/0245 ,  H01J2237/032 ,  H01J2237/12 ,  H01J2237/31745

摘要： The present invention provides a composite charged particle beam device which is provided with two or more charged particle beam columns and enables high-resolution observation while a sample is placed at the position of a cross point. The present invention has the following configuration. A composite charged particle beam device is provided with a plurality of charged particle beam columns (101a, 102a), and is characterized in that a sample (103) is disposed at the position of an intersection point (171) where the optical axes of the plurality of columns intersect, a component (408a, 408b) that forms the tip of an objective lens of the charged particle beam column (102a) is detachable, and by replacing the component (408a, 408b), the distance between the intersection point (171) and the tip of the charge particle beam column can be changed.

摘要翻译： 本发明提供了一种复合带电粒子束装置，其具有两个或更多个带电粒子束柱，并且当将样品放置在交叉点的位置时能够进行高分辨率观察。 本发明具有以下结构。 复合带电粒子束装置设置有多个带电粒子束柱（101a，102a），其特征在于，样品（103）设置在交叉点（171）的位置， 多个列相交，形成带电粒子束列（102a）的物镜的尖端的部件（408a，408b）是可拆卸的，并且通过更换部件（408a，408b），交点 171），并且可以改变电荷粒子束柱的尖端。

公开(公告)号：US20160042911A1

公开(公告)日：2016-02-11

申请号：US14534815

申请日：2014-11-06

申请人： NATIONAL TSING HUA UNIVERSITY

发明人： WEI-YU CHANG ,  FU-RONG CHEN ,  TE-HUI LEE ,  TSU-WEI HUANG

IPC分类号： H01J37/141 ,  H01J37/26

CPC分类号： H01J37/153 ,  H01J37/14 ,  H01J37/141 ,  H01J37/1413 ,  H01J37/145 ,  H01J37/26 ,  H01J2237/141 ,  H01J2237/1415

摘要： A combined round-multipole magnetic lens comprises a coil bracket, a first pole piece and a second pole piece. At least a first pole shoe of the first pole piece on the coil support and at least a second pole shoe of the second pole piece under the coil support respectively extend towards the central axis. The first pole shoe and the second pole shoe are symmetric according to the central axis, or the first pole shoes and the second pole shoes are respectively symmetrically arranged, and the angle difference between the first pole shoe and the adjacent second pole shoes is 360/2N degrees. A magnetic circuit gap is formed between the first pole shoe and the adjacent second pole shoe, for generating a magnetic field distribution of multi-poles and reducing the volume and the number of power supplies.

摘要翻译： 组合的圆形多极磁性透镜包括线圈支架，第一极靴和第二极靴。 线圈支撑件上的第一极靴的至少第一极靴和线圈支撑件下方的第二极靴的至少第二极靴分别朝向中心轴线延伸。 第一极靴和第二极靴根据中心轴对称，或第一极靴和第二极靴分别对称布置，第一极靴和相邻的第二极靴之间的角度差为360 / 2N度。 在第一极靴和相邻的第二极靴之间形成磁路间隙，用于产生多极的磁场分布并减小电源的体积和数量。

公开(公告)号：US20180269030A1

公开(公告)日：2018-09-20

申请号：US15926501

申请日：2018-03-20

申请人： TESCAN Brno s.r.o. ,  TESCAN TEMPE, LLC.

发明人： Petras Stanislav ,  Lencova Bohumila ,  Benner Gerd Ludwig

IPC分类号： H01J37/26 ,  H01J37/141 ,  H01J37/244 ,  G01N23/20058 ,  G01N23/2251

CPC分类号： H01J37/268 ,  G01N23/20058 ,  G01N23/2251 ,  H01J37/1413 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0492 ,  H01J2237/141 ,  H01J2237/2445 ,  H01J2237/2802

摘要： The object of the present invention provides a scanning transmission electron microscope with the ability to formed at least one diffraction pattern. The scanning electron microscope comprises an electron source, which is configured to provide primary electron beam, a condenser lens system, an objective electromagnetic system, a projection lens system and a detection system, in addition, the objective electromagnetic lens consists of an upper pole piece and a lower pole piece, wherein each pole piece comprises a pole piece face, which is a flat surface oriented towards a sample plane. A salient feature of the present invention is to form at least one diffraction pattern located in the distance from the lower pole piece face outside the pole piece gap, wherein the pole piece gap is the space between the upper pole piece face and the lower pole piece face.

公开(公告)号：US09343261B2

公开(公告)日：2016-05-17

申请号：US14534815

申请日：2014-11-06

申请人： NATIONAL TSING HUA UNIVERSITY

发明人： Wei-Yu Chang ,  Fu-Rong Chen ,  Te-Hui Lee ,  Tsu-Wei Huang

IPC分类号： H01J37/153 ,  H01J37/141 ,  H01J37/26 ,  H01J37/14 ,  H01J37/145

CPC分类号： H01J37/153 ,  H01J37/14 ,  H01J37/141 ,  H01J37/1413 ,  H01J37/145 ,  H01J37/26 ,  H01J2237/141 ,  H01J2237/1415

摘要： A combined round-multipole magnetic lens comprises a coil bracket, a first pole piece and a second pole piece. At least a first pole shoe of the first pole piece on the coil support and at least a second pole shoe of the second pole piece under the coil support respectively extend towards the central axis. The first pole shoe and the second pole shoe are symmetric according to the central axis, or the first pole shoes and the second pole shoes are respectively symmetrically arranged, and the angle difference between the first pole shoe and the adjacent second pole shoes is 360/2N degrees. A magnetic circuit gap is formed between the first pole shoe and the adjacent second pole shoe, for generating a magnetic field distribution of multi-poles and reducing the volume and the number of power supplies.

摘要翻译： 组合的圆形多极磁性透镜包括线圈支架，第一极靴和第二极靴。 线圈支撑件上的第一极靴的至少第一极靴和线圈支撑件下方的第二极靴的至少第二极靴分别朝向中心轴线延伸。 第一极靴和第二极靴根据中心轴对称，或第一极靴和第二极靴分别对称布置，第一极靴和相邻的第二极靴之间的角度差为360 / 2N度。 在第一极靴和相邻的第二极靴之间形成磁路间隙，用于产生多极的磁场分布并减小电源的体积和数量。

公开(公告)号：US20070023673A1

公开(公告)日：2007-02-01

申请号：US11483804

申请日：2006-07-10

申请人： Carlo Salvesen ,  Ralf Degenhardt

发明人： Carlo Salvesen ,  Ralf Degenhardt

IPC分类号： H01J1/50

CPC分类号： H01J37/153 ,  H01J37/1413 ,  H01J37/145 ,  H01J2237/10 ,  H01J2237/1508 ,  Y10T29/4902

摘要： An electric-magnetic field-generating element and a multipole element comprising a plurality of these field-generating elements providing for a stable charged particle beam are described. For some embodiments, the electric-magnetic field-generating element includes a pole piece, a yoke to which the pole piece is attached, at least one coil, a vacuum-tight container accommodating the coil(s), and a holder adapted to hold the vacuum-tight container such that the vacuum-tight container is spaced from the pole piece and the yoke.

摘要翻译： 描述了包括提供稳定的带电粒子束的多个这些场产生元件的电磁场产生元件和多极元件。 对于一些实施例，电磁场产生元件包括极片，连接有极片的磁轭，至少一个线圈，容纳线圈的真空密封容器和适于保持 真空密封容器使得真空密封容器与极靴和轭架间隔开。

公开(公告)号：US11769650B2

公开(公告)日：2023-09-26

申请号：US17297581

申请日：2019-12-23

申请人： Hitachi High-Tech Corporation

发明人： Hideto Dohi ,  Yoshinobu Ootaka ,  Masashi Inada ,  Hideyuki Kazumi ,  Hideo Kashima

IPC分类号： H01J37/28 ,  H01J37/141 ,  H01J37/147 ,  H01J37/153

CPC分类号： H01J37/28 ,  H01J37/1413 ,  H01J37/1474 ,  H01J37/153 ,  H01J2237/032 ,  H01J2237/1534

摘要： Provided are a multistage-connected multipole and a charged particle beam device that can be produced with precision in machining without requiring precision in brazing between a pole and an insulation material. This multi-stage connected multipole 100 comprises: a plurality of poles Q1-Q4 that are arranged along the optical-axis direction of a charged particle beam, and that have cutouts Non surfaces facing each other; and braces P1-P3 that are arranged between the plurality of poles Q1-Q4 and are made of an insulator. The poles Q1-Q4 and the braces P1-P3 are joined by fitting the braces P1-P3 into the cutouts N and applying brazing so as to be interposed by a bonding material.

公开(公告)号：US11769649B2

公开(公告)日：2023-09-26

申请号：US17576156

申请日：2022-01-14

申请人： Hitachi High-Tech Corporation

发明人： Masanori Mita ,  Yoshinobu Ootaka ,  Hideto Dohi ,  Zhaohui Cheng

IPC分类号： H01J37/153 ,  H01J37/141 ,  H01J37/147

CPC分类号： H01J37/153 ,  H01J37/1413 ,  H01J37/1474 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/1534

摘要： An object is to provide a multipole unit capable of achieving both high positional accuracy and ease of assembling and preventing a decrease in the transmission rate of the magnetic flux. A multipole unit 109a includes a pole 1 that is made of a soft magnetic metal material, a shaft 2 that is made of a soft magnetic metal material and is magnetically connected to the pole, and a coil 3 that is wound around the shaft 2. The pole 1 is provided with a first fitting portion JP1 that forms a first recessed portion or a first protruding portion. The shaft 2 is provided with a second fitting portion JP2 that forms a second protruding portion or a second recessed portion. The first fitting portion JP1 and the second fitting portion JP2 are fitted with each other such that the pole 1 and the shaft 2 are physically separated from each other.

公开(公告)号：US08829470B2

公开(公告)日：2014-09-09

申请号：US14060170

申请日：2013-10-22

申请人： FEI Company

发明人： Lubomir T{dot over (u)}ma ,  Josef {hacek over (S)}esták

IPC分类号： G21K5/08 ,  H01J37/26 ,  H01J37/141 ,  H01J37/20

CPC分类号： G21K5/08 ,  H01J37/1413 ,  H01J37/20 ,  H01J37/265 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/2802 ,  H01J2237/2813

摘要： The invention relates to a charged-particle apparatus having a charged particle source with an optical axis; a magnetic immersion lens comprising a first lens pole and a configurable magnetic circuit; and a first sample stage movable with respect to the optical axis. The apparatus has a first configuration to position the sample, mounted on the first stage, with respect to the optical axis and a second configuration, having a second lens pole mounted on the first stage and intersecting the optical axis, equipped with a second sample stage to position the sample between the two lens poles and is movable with respect to the optical axis, causing the optical properties of the magnetic immersion lens to differ in the two configurations, and can, in the second configuration, be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit.

摘要翻译： 本发明涉及具有光轴的带电粒子源的带电粒子装置; 一种包含第一透镜柱和可配置磁路的磁浸透镜; 以及可相对于光轴移动的第一样品台。 该装置具有第一配置，用于相对于光轴定位安装在第一台上的样品，并且具有第二配置，其具有安装在第一台上并与光轴相交的第二透镜杆，该第二透镜杆装备有第二样品台 将样品定位在两个透镜杆之间并且可相对于光轴移动，导致两种结构中的浸没透镜的光学特性不同，并且可以在第二构造中通过将第二透镜 使用第一级，从而改变磁路。

公开(公告)号：US06906335B2

公开(公告)日：2005-06-14

申请号：US10275203

申请日：2001-05-02

申请人： Anjam Khursheed

发明人： Anjam Khursheed

IPC分类号： G01N23/225 ,  G21K7/00 ,  H01J37/141 ,  H01J37/18

CPC分类号： H01J37/141 ,  G01N23/2251 ,  H01J37/1413 ,  H01J2237/1035 ,  H01J2237/28

摘要： A lens (15) for a scanning electron microscope is adapted to be removably mounted on a specimen stage (1). The lens (15) includes a magnetic circuit (2, 3, 4, 7) having a first magnetic pole piece (7) and a second magnetic pole piece (4), and a specimen holder (5). The specimen holder (5) is located between the first and second magnetic pole pieces (4, 7). The magnetic circuit (2, 3, 4, 7) also includes a lens bore (18) to permit an electron beam (9) to strike a surface of a specimen mounted on the specimen holder (5), in use. The lens bore (18) has a width of greater than 1 mm.

摘要翻译： 用于扫描电子显微镜的透镜（15）适于可拆卸地安装在样品台（1）上。 透镜（15）包括具有第一磁极片（7）和第二磁极片（4）的磁路（2,3,4,7）和样本保持器（5）。 样品架（5）位于第一和第二磁极片（4,7）之间。 在使用中，磁路（2,3,4,7）还包括透镜孔（18），以允许电子束（9）撞击安装在样本架（5）上的试样的表面。 透镜孔（18）具有大于1mm的宽度。