公开(公告)号：US10074506B2

公开(公告)日：2018-09-11

申请号：US14434824

申请日：2012-10-12

Applicant: Hitachi High-Techonologies Corporation

Inventor： Takashi Ichimura ,  Hisao Nitta ,  Nobuyuki Sonobe ,  Boklae Cho ,  Hisaya Murakoshi

IPC: H01J37/065 ,  H01J1/16 ,  H01J1/30 ,  H01J9/02 ,  H01J9/04 ,  C25F3/26 ,  H01J1/304 ,  H01J37/073 ,  H01J37/06 ,  H01J37/285

CPC classification number: H01J37/065 ,  C25F3/26 ,  H01J1/16 ,  H01J1/3044 ,  H01J9/025 ,  H01J9/042 ,  H01J37/06 ,  H01J37/073 ,  H01J37/285 ,  H01J2237/063 ,  H01J2237/06316 ,  H01J2237/06341

Abstract: A conventional method to process a tip fails to designate the dimension of the shape of the end of the tip, and so fails to obtain a tip having any desired diameter. Impurities may be attached to the tip. Based on a correlation between the voltage applied or the time during processing of the end of the tip and the diameter of the tip end, the applied voltage is controlled so as to obtain a desired diameter of the tip end for processing of the tip. This allows a sharpened tip made of a tungsten monocrystal thin wire to be manufactured to have any desired diameter in the range of 0.1 μm or more and 2.0 μm or less.