公开(公告)号：US20110155062A1

公开(公告)日：2011-06-30

申请号：US12965955

申请日：2010-12-13

申请人： Hitoshi KATO ,  Yasushi TAKEUCHI

发明人： Hitoshi KATO ,  Yasushi TAKEUCHI

IPC分类号： C23C16/00

CPC分类号： H01L21/68771 ,  C23C16/45519 ,  C23C16/45551 ,  C23C16/45578 ,  C23C16/4584 ,  H01L21/68764

摘要： A film deposition apparatus includes a turntable including a substrate placement region at its surface; first and second reaction gas supply parts disposed in first and second supply regions in a chamber and supplying first and second reaction gases onto the surface, respectively; a separation region disposed between the first and second supply regions, the separation region including a separation gas supply part ejecting a separation gas separating the first and second reaction gases and a ceiling surface forming a separation space to supply the separation gas to the first and second supply regions; and first and second evacuation ports provided for the first and second supply regions. At least one of the first and second evacuation ports is disposed so as to guide the separation gas, supplied to the corresponding supply region, toward and along a direction in which the corresponding reaction gas supply part extends.

摘要翻译： 一种成膜装置，包括在其表面包括基板放置区域的转盘; 第一和第二反应气体供应部分设置在室中的第一和第二供应区域中，并分别将第一和第二反应气体供应到表面上; 分离区域，设置在第一和第二供应区域之间，分离区域包括喷射分离第一和第二反应气体的分离气体的分离气体供给部分和形成分离空​​间的顶面，以将分离气体供应到第一和第二 供应地区; 以及为第一和第二供应区域提供的第一和第二排气口。 所述第一和第二排气口中的至少一个设置成朝向并沿着相应的反应气体供应部分延伸的方向引导供应到相应供应区域的分离气体。

公开(公告)号：US20110155056A1

公开(公告)日：2011-06-30

申请号：US12969699

申请日：2010-12-16

申请人： Hitoshi KATO ,  Manabu HONMA ,  Yasushi TAKEUCHI

发明人： Hitoshi KATO ,  Manabu HONMA ,  Yasushi TAKEUCHI

IPC分类号： C23C16/458

CPC分类号： H01L21/68764 ,  C23C16/45538 ,  C23C16/45551 ,  H01L21/68771

摘要： A film deposition apparatus has a vacuum chamber in which a turntable placing plural substrates is rotated, the plural substrates come into contact with plural reaction gases supplied to plural process areas and thin films are deposited on surfaces of the plural substrates, and has plural reaction gas supplying portions for supplying the plural processing gases, a separation gas supplying portion for supplying a separation gas and an evacuation mechanism for ejecting the plural processing gases and the separation gas, wherein the plural process areas includes a first process area for causing a first reaction gas to adsorb on the surfaces of the plural substrates, and a second process area, having an area larger than the first process area, for causing the first reaction gas having adsorbed the surfaces of the plural substrates and a second reaction gas to react, and depositing the films on the surfaces of the plural substrates.

摘要翻译： 一种成膜装置具有：真空室，其中放置多个基板的转台旋转，多个基板与多个处理区域供应的多个反应气体接触，薄膜沉积在多个基板的表面上，并且具有多个反应气体 用于供给多种处理气体的供给部分，用于供给分离气体的分离气体供给部分和用于喷射多种处理气体和分离气体的排出机构，其中多个处理区域包括：第一处理区域，用于使第一反应气体 吸附在多个基板的表面上，以及具有比第一处理区域大的面积的第二处理区域，用于使吸附有多个基板的表面的第一反应气体和第二反应气体反应， 在多个基板的表面上的膜。

公开(公告)号：US20100074645A1

公开(公告)日：2010-03-25

申请号：US12629321

申请日：2009-12-02

申请人： Yuichi YAMAMOTO ,  Eiichi MOTOYAMA ,  Yoshihito OSARI ,  Kuniyasu KIMURA ,  Hiroaki TOMIYASU ,  Takahiko YAMAOKA ,  Jun TOMINE ,  Yuichi IKEDA ,  Yasushi TAKEUCHI

发明人： Yuichi YAMAMOTO ,  Eiichi MOTOYAMA ,  Yoshihito OSARI ,  Kuniyasu KIMURA ,  Hiroaki TOMIYASU ,  Takahiko YAMAOKA ,  Jun TOMINE ,  Yuichi IKEDA ,  Yasushi TAKEUCHI

IPC分类号： G03G15/00

CPC分类号： G03G15/5033 ,  G03G15/0131 ,  G03G15/161 ,  G03G15/5058 ,  G03G21/0005 ,  G03G2215/00042 ,  G03G2215/00059 ,  G03G2215/00063 ,  G03G2221/0005

摘要： An image forming apparatus includes an image bearing member; toner image formation means for forming a toner image on the image bearing member; removing means for removing deposited matter deposited on the image bearing member; detecting means for detecting a toner image to be detected, formed on the toner image formation means; control means for controlling a toner image forming condition of the toner image forming means in accordance with a result of detection of the toner image to be detected by the detecting means; the apparatus being operable in a mode in which the removing means operates to remove the deposition, and the detecting means operates to detect the toner image to be detected, executing means for executing an operation in the mode; and an operating portion for manually starting execution of the operation in the mode by the executing means.

摘要翻译： 图像形成装置包括：图像承载部件; 调色剂图像形成装置，用于在图像承载部件上形成调色剂图像; 用于去除沉积在图像承载部件上的沉积物的去除装置; 用于检测形成在调色剂图像形成装置上的要检测的调色剂图像的检测装置; 控制装置，用于根据由检测装置检测的调色剂图像的检测结果来控制调色剂图像形成装置的调色剂图像形成条件; 该装置可以以除去装置操作以移除沉积物的方式操作，并且检测装置操作以检测待检测的调色剂图像;执行装置，用于执行该模式的操作; 以及用于通过执行装置以该模式手动开始执行操作的操作部分。

公开(公告)号：US20120329291A1

公开(公告)日：2012-12-27

申请号：US13533206

申请日：2012-06-26

申请人： Hisashi INOUE ,  Shunichi MATSUMOTO ,  Yasushi TAKEUCHI

发明人： Hisashi INOUE ,  Shunichi MATSUMOTO ,  Yasushi TAKEUCHI

IPC分类号： H01L21/324

CPC分类号： H01L21/67309 ,  C21D9/0068 ,  C23C16/56 ,  H01L21/67109

摘要： A substrate holder has two holder constituting bodies, each having a plurality of columns arranged on an imaginary circle, and substrate holding sections that hold circumferential portions of respective substrates. The holder constituting bodies hold the substrates so that either their front surfaces or their back surfaces face upward with a substrate having an upward facing front and a substrate having an upward facing rear being alternately arranged in a vertical direction. At least one of the holder constituting bodies moves in the vertical direction to change the positions of the holder constituting bodies relative to each other. A distance between a first pair of vertically adjacent substrates with their respective front surfaces facing each other is set to ensure treatment uniformity, and to be larger than a distance between a second pair of vertically adjacent substrates with their respective back surfaces facing each other.

摘要翻译： 衬底保持器具有两个保持器构成体，每个保持器构造体具有布置在假想圆上的多个列，以及保持各个衬底周向部分的衬底保持部。 保持器构成体保持基板，使得它们的前表面或其背面朝向上方具有面向上的基板和具有面向上的后部的基板沿垂直方向交替布置。 保持构造体中的至少一个沿垂直方向移动，以改变保持器构成体相对于彼此的位置。 设置第一对垂直相邻的基板与它们各自的前表面彼此面对的距离，以确保处理均匀性，并且大于第二对垂直相邻基板之间的距离，并且其相应的后表面彼此面对。

公开(公告)号：US20120283879A1

公开(公告)日：2012-11-08

申请号：US13406787

申请日：2012-02-28

申请人： Yasushi TAKEUCHI ,  Takahiro Haraguchi

发明人： Yasushi TAKEUCHI ,  Takahiro Haraguchi

IPC分类号： G05B19/19

CPC分类号： G05B19/4155 ,  G05B2219/35172

摘要： A next command reference value close to a “the value L serving as a reference” is read from its own path table, and if there is the read command reference value in its own path table, then it is determined whether or not the “the value L serving as a reference” reaches the command reference value. When the “the value L serving as a reference” reaches the command reference value, if there is a waiting command of waiting for other path table, counting of the “the value L serving as a reference” is stopped. When waiting for the other path table is completed, the stop of counting of the “the value L serving as a reference” is released, the command is executed, and processing is continued.

摘要翻译： 从其自己的路径表中读取接近作为参考的值L的下一个命令参考值，并且如果在其自己的路径表中存在读取命令参考值，则确定值L的服务 作为参考达到命令参考值。 当作为参考的值L达到指令参考值时，如果存在等待其他路径表的等待命令，则停止作为参考的值L的计数。 当等待其他路径表完成时，释放作为参考的值L的停止计数，执行命令，并继续处理。

公开(公告)号：US20070183801A1

公开(公告)日：2007-08-09

申请号：US11735759

申请日：2007-04-16

申请人： Yasushi TAKEUCHI ,  Juichi Ikeda ,  Jun Tomine

发明人： Yasushi TAKEUCHI ,  Juichi Ikeda ,  Jun Tomine

IPC分类号： G03G15/00

CPC分类号： G03G15/168 ,  G03G15/166 ,  G03G15/5041 ,  G03G15/5058 ,  G03G2221/0026

摘要： An image forming apparatus includes a movable image bearing member; a toner image forming unit which repeatedly forms plural toner images in the image bearing member; a detection toner image forming unit which forms a detection toner image in an inter-image area between the toner image and the toner image on the image bearing member; a transfer member which is in contact with an area in the image bearing member through intervention of a recording material, the toner image being formed in the area, the transfer member being in contact with the inter-image area with no recording material, the transfer member electrostatically transferring the toner image formed in the image bearing member to the recording material; a detecting unit which detects the detection toner image on the image bearing member; a controlling unit which variably controls a toner image forming condition of the toner image forming unit based on the detection result; and a toner removing unit which forms a cleaning electric field to remove toner adhering to the transfer member, the cleaning electric field electrostatically moving the toner adhering to the transfer member to the image bearing member while the transfer member is in contact with the inter-image area, wherein, letting a time when the toner removing unit forms the cleaning electric field be T1 in the case where the detection toner image is formed prior to the formation of the cleaning electric field in the inter-image area with which the transfer member is in contact, and letting a time when the toner removing unit forms the cleaning electric field be T2 in the case where the detection toner image is not formed in the inter-image area with which the transfer member is in contact, T1 is longer than T2.

摘要翻译： 图像形成装置包括可动图像承载部件; 调色剂图像形成单元，其在图像承载部件中重复形成多个调色剂图像; 检测调色剂图像形成单元，其在所述图像承载部件上的调色剂图像和调色剂图像之间的图像间区域中形成检测调色剂图像; 转印构件，其通过记录材料的介入与图像承载构件中的区域接触，调色剂图像形成在该区域中，转印构件与没有记录材料的图像间区域接触，转印 构件将形成在图像承载构件中的调色剂图像静电转印到记录材料上; 检测单元，其检测图像承载部件上的检测调色剂图像; 控制单元，其基于检测结果可变地控制调色剂图像形成单元的调色剂图像形成条件; 以及调色剂除去单元，其形成清洁电场以去除粘附到转印部件上的调色剂，所述清洁电场将粘附到转印部件的调色剂静电移动到图像承载部件，同时转印部件与图像间接触 区域，其中，在调色剂除去单元形成清洁电场的时间为T 1时，在形成清洁电场之前形成检测调色剂图像的情况下，转印构件 在与传送部件接触的图像间区域中未形成检测调色剂图像的情况下，使调色剂除去单元形成清洁电场的时间为T 2，T 1为 比T 2长。

公开(公告)号：US20120315114A1

公开(公告)日：2012-12-13

申请号：US13488713

申请日：2012-06-05

申请人： Katsuhiko OYAMA ,  Katsuyuki HISHIYA ,  Yasushi TAKEUCHI

发明人： Katsuhiko OYAMA ,  Katsuyuki HISHIYA ,  Yasushi TAKEUCHI

IPC分类号： H01L21/677

CPC分类号： H01L21/67772

摘要： A substrate conveying container opening/closing device includes an elevator carriage provided in a substrate transfer area and configured to be moved up and down by an elevator mechanism, a cover member for opening and closing an opening of a wall, a seal member for sealing a gap between the cover member and the periphery of the opening, a lid detaching/attaching mechanism provided in the cover member and configured to detach and attach the lid, a guide unit provided in the elevator carriage and configured to guide the cover member upward so that the cover member can advance from a retracting position toward the wall, a guideway provided in the wall to extend in a direction perpendicular to a seal surface of the opening, and a rotating body provided in the cover member and configured to roll downward along the guideway as the elevator carriage is moved downward.

摘要翻译： 基板输送容器开闭装置具备：设置在基板输送区域中的升降台，其构造为通过升降机构上下移动，用于开闭壁部开口部的盖部件，密封部件 盖构件和开口周边之间的间隙，设置在盖构件中并构造成拆卸和附接盖的盖拆卸/附接机构，设置在升降机托架中并构造成向上引导盖构件的引导单元，使得 盖构件可以从缩回位置朝向壁前进，设置在壁中以沿着与开口的密封表面垂直的方向延伸的导轨以及设置在盖构件中并构造成沿着导轨向下滚动的旋转体 当电梯托架向下移动时。

公开(公告)号：US20100321040A1

公开(公告)日：2010-12-23

申请号：US12638057

申请日：2009-12-15

申请人： Yasushi TAKEUCHI

发明人： Yasushi TAKEUCHI

IPC分类号： G01R27/26

CPC分类号： G01R31/028 ,  H01G9/14 ,  H01H11/0062 ,  H01H33/6662

摘要： A capacitor capacitance diagnosis device includes a power supply which is for charging a capacitor, a discharge circuit which is connected to the capacitor in parallel to discharge energy of the capacitor, a resistance dividing circuit which is for measuring voltage drop value during discharging, a measurement circuit which measures divided voltage, and a diagnosis circuit which determines adequacy of capacitor capacitance from a time change in voltage due to the discharge. This makes it possible to diagnose adequacy of capacitor capacitance of an electric power apparatus during operation.

摘要翻译： 电容器电容诊断装置包括用于对电容器充电的电源，与电容器并联连接到电容器的放电能量的放电电路，用于测量放电期间的电压降值的电阻分压电路，测量 测量分压的电路，以及由于放电引起的电压时间变化确定电容器电容的充分性的诊断电路。 这使得可以在操作期间诊断电力设备的电容器电容的充足性。