Bulk acoustic wave (BAW) sensors for liquid level measurements

    公开(公告)号:US10168198B2

    公开(公告)日:2019-01-01

    申请号:US14577487

    申请日:2014-12-19

    摘要: A method for sensing at least one level parameter of at least one liquid in a tank. At least one bulk acoustic wave (BAW) sensor is positioned inside the tank. Electrodes of the BAW sensor are at least switchably connected to a positive feedback loop across an amplifier to provide an electronic oscillator. At least one acoustic viscosity measurement is determined from an output of the electronic oscillator, wherein the output of the electronic oscillator is different when the BAW sensor contacts the liquid as compared to when the BAW sensor contacts air. The level parameter is determined from the acoustic viscosity measurement.

    FET based humidity sensor with barrier layer protecting gate dielectric

    公开(公告)号:US10585058B2

    公开(公告)日:2020-03-10

    申请号:US15594184

    申请日:2017-05-12

    摘要: An illustrative humidity sensor may include a substrate having a source and a drain, wherein the drain is laterally spaced from the source. A gate stack is provided in the space between the source and the drain to form a transistor. The gate stack may include a gate insulator situated on the substrate to form a gate insulator/substrate interface. The gate stack may further include a barrier layer above the gate insulator. The barrier layer may be configured to act as a barrier to mobile charge, humidity and/or other contaminates, and may help prevent such contaminates from reaching the gate insulator/substrate interface. The gate stack may further include a humidity sensing layer above the barrier layer. The humidity sensing layer, when exposed to humidity, may modulate the conduction channel in the substrate under the gate insulator and between the source and the drain. In some cases, the humidity level may be determined by monitoring the current flowing between the source and drain.