公开(公告)号：US20150007771A1

公开(公告)日：2015-01-08

申请号：US14232246

申请日：2012-07-05

申请人： Hugo Silva ,  Nico Jouault ,  Victor Saywell ,  Fred Crawley ,  Martin Dauelsberg ,  Johannes Lindner

发明人： Hugo Silva ,  Nico Jouault ,  Victor Saywell ,  Fred Crawley ,  Martin Dauelsberg ,  Johannes Lindner

IPC分类号： C23C16/455

CPC分类号： C23C16/45591 ,  C23C16/301 ,  C23C16/45565 ,  C23C16/45572 ,  C23C16/45574 ,  C23C16/45576 ,  C30B25/14

摘要： A gas inlet member of a CVD reactor includes a gas inlet housing having a gas distribution volume supplied with a process gas by a feed line and a multiplicity of gas lines, each formed as a tube and engaging openings of a gas outlet plate arranged in front of an inlet housing wall, and through which the process gas enters a process chamber. A coolant chamber adjoins the gas inlet housing wall and a coolant cools the gas inlet housing wall and outlet ends of the gas lines that are in heat-conductive contact with the gas inlet housing wall. The gas outlet plate is thereby thermally decoupled from the gas inlet housing wall such that the gas outlet plate, which is acted on by radiation heat coming from the process chamber, heats up more intensely than the outlet ends which extend into the openings of the gas outlet plate.

摘要翻译： CVD反应器的气体入口构件包括：气体入口壳体，其具有通过进料管线供给处理气体的气体分配体积和多个气体管线，每个气体管线形成为管和布置在前面的气体出口板的接合开口 的入口壳体壁，并且工艺气体通过入口壳体壁进入处理室。 冷却剂室邻接气体入口壳体壁，并且冷却剂冷却气体入口壳体壁和与气体入口壳体壁导热接触的气体管线的出口端。 气体出口板因此与气体入口壳体壁热分离，使得由来自处理室的辐射热作用的气体出口板比延伸到气体开口中的出口端更加强烈地加热 出口板。

公开(公告)号：US09587312B2

公开(公告)日：2017-03-07

申请号：US14232246

申请日：2012-07-05

申请人： Hugo Silva ,  Nico Jouault ,  Victor Saywell ,  Fred Crawley ,  Martin Dauelsberg ,  Johannes Lindner

发明人： Hugo Silva ,  Nico Jouault ,  Victor Saywell ,  Fred Crawley ,  Martin Dauelsberg ,  Johannes Lindner

IPC分类号： C23C16/455 ,  C23C16/30 ,  C30B25/14

CPC分类号： C23C16/45591 ,  C23C16/301 ,  C23C16/45565 ,  C23C16/45572 ,  C23C16/45574 ,  C23C16/45576 ,  C30B25/14

摘要： A gas inlet member of a CVD reactor includes a gas inlet housing having a gas distribution volume supplied with a process gas by a feed line and a multiplicity of gas lines, each formed as a tube and engaging openings of a gas outlet plate arranged in front of an inlet housing wall, and through which the process gas enters a process chamber. A coolant chamber adjoins the gas inlet housing wall and a coolant cools the gas inlet housing wall and outlet ends of the gas lines that are in heat-conductive contact with the gas inlet housing wall. The gas outlet plate is thereby thermally decoupled from the gas inlet housing wall such that the gas outlet plate, which is acted on by radiation heat coming from the process chamber, heats up more intensely than the outlet ends which extend into the openings of the gas outlet plate.

摘要翻译： CVD反应器的气体入口构件包括：气体入口壳体，其具有通过进料管线供给处理气体的气体分配体积和多个气体管线，每个气体管线形成为管和布置在前面的气体出口板的接合开口 的入口壳体壁，并且工艺气体通过入口壳体壁进入处理室。 冷却剂室邻接气体入口壳体壁，并且冷却剂冷却气体入口壳体壁和与气体入口壳体壁导热接触的气体管线的出口端。 气体出口板因此与气体入口壳体壁热分离，使得由来自处理室的辐射热作用的气体出口板比延伸到气体开口中的出口端更加强烈地加热 出口板。